Multi-axis wafer position detecting system using a mark having optical
power
    181.
    发明授权
    Multi-axis wafer position detecting system using a mark having optical power 失效
    使用具有光功率的标记的多轴波形位置检测系统

    公开(公告)号:US5148036A

    公开(公告)日:1992-09-15

    申请号:US835062

    申请日:1992-02-18

    摘要: A position detecting system, for detecting the position of a substrate having a surface, with respect to a first direction perpendicular to the surface of the substrate and a second direction perpendicular to the first direction, by use of a mark formed on the substrate and having an optical power, is disclosed. The system includes a directing device for directing a radiation beam to the mark so that the radiation beam is deflected by the mark; a sensor for receiving the radiation beam deflected by the mark, wherein the position of the radiation beam incident on the sensor is shiftable in a third direction in accordance with the position of the substrate with respect to the first direction and also is shiftable in a fourth direction, different from the third direction, in accordance with the position of the substrate with respect to the second direction; and a detecting device for detecting the position of the substrate with respect to the first and second directions on the basis of an output of the sensor corresponding to the position of incidence of the radiation beam upon the sensor.

    Information processing apparatus and method for controlling the same
    183.
    发明授权
    Information processing apparatus and method for controlling the same 有权
    信息处理装置及其控制方法

    公开(公告)号:US09511493B2

    公开(公告)日:2016-12-06

    申请号:US13582116

    申请日:2011-03-07

    IPC分类号: B25J9/16

    CPC分类号: B25J9/1671

    摘要: An information processing apparatus includes an imaging unit and is capable of setting arrangement of a structural member of a robot system which works based on an image captured by the imaging unit. The information processing apparatus includes an arrangement unit configured to arrange a virtual object corresponding to the structural member in a virtual space corresponding to a working space of the robot system, a first acquisition unit configured to acquire a virtual space image in the virtual space which corresponds to the captured image and in which the virtual object is arranged, and a second acquisition unit configured to acquire an evaluation value indicating adaptation of arrangement of the virtual object to the work of the robot system based on the virtual space image.

    摘要翻译: 信息处理设备包括成像单元,并且能够基于由成像单元捕获的图像来设置机器人系统的结构构件的布置。 该信息处理装置包括:配置单元,被配置为将与结构构件相对应的虚拟对象布置在与机器人系统的工作空间对应的虚拟空间中;第一获取单元,被配置为获取虚拟空间中的虚拟空间图像 以及第二获取单元,被配置为基于虚拟空间图像获取指示虚拟对象的布置适应于机器人系统的工作的评估值。

    Object recognition by comparison of patterns against map of image
    184.
    发明授权
    Object recognition by comparison of patterns against map of image 有权
    通过比较图像与图像的图像对象识别

    公开(公告)号:US09245198B2

    公开(公告)日:2016-01-26

    申请号:US13218976

    申请日:2011-08-26

    IPC分类号: G06K9/00 G06K9/46 G06K9/62

    摘要: An information processing apparatus comprises: a registration unit adapted to register information required to determine at least one specific pattern in an image; an input unit adapted to input image data; a first generation unit adapted to extract a predetermined feature distribution from the input image data, and to generate a first feature distribution map indicating the feature distribution; a second generation unit adapted to generate a second feature distribution map by applying a conversion required to relax localities of the first feature distribution map to the first feature distribution map; and a determination unit adapted to determine, using sampling data on the second feature distribution map and the registered information, which of the specific patterns the image data matches.

    摘要翻译: 一种信息处理装置,包括:注册单元,用于登记确定图像中的至少一个特定图案所需的信息; 适于输入图像数据的输入单元; 适于从所述输入图像数据提取预定特征分布的第一代单元,并且生成指示所述特征分布的第一特征分布图; 第二代单元,适于通过将所述第一特征分布图的位置放松到所述第一特征分布图来应用所需的转换来生成第二特征分布图; 以及确定单元,其适于使用所述第二特征分布图上的采样数据和所述登记信息来确定所述图像数据匹配的特定模式中的哪一个。

    Learning method and apparatus for pattern recognition
    185.
    发明授权
    Learning method and apparatus for pattern recognition 有权
    用于模式识别的学习方法和装置

    公开(公告)号:US09053393B2

    公开(公告)日:2015-06-09

    申请号:US13050872

    申请日:2011-03-17

    IPC分类号: G06K9/62 G06K9/68

    CPC分类号: G06K9/6282

    摘要: A method for information processing includes a learning process to generate a tree structured dictionary based on a plurality of patterns including a target object to be recognized. The method includes selecting a plurality of points from an input pattern based on a distribution of a probability that the target object to be recognized is present in the input pattern at each node of a tree structure generated in the learning process, and classifying the input pattern into a branch based on a value of a predetermined function that corresponds to values of the input pattern at selected plurality of points.

    摘要翻译: 一种用于信息处理的方法包括:基于包括要识别的目标对象的多个模式来生成树结构化字典的学习处理。 该方法包括基于在学习过程中生成的树结构的每个节点处的输入模式中存在要识别的目标对象的概率的分布从输入模式中选择多个点,并且对输入模式进行分类 基于与所选择的多个点处的输入图案的值相对应的预定函数的值来分支。

    INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND PROGRAM
    186.
    发明申请
    INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND PROGRAM 有权
    信息处理设备,信息处理方法和程序

    公开(公告)号:US20120099798A1

    公开(公告)日:2012-04-26

    申请号:US13379413

    申请日:2010-06-21

    IPC分类号: G06K9/46 H04N13/02 H04N7/18

    CPC分类号: G01B11/002

    摘要: An information processing apparatus for matching a position and/or orientation of a measurement object with that of a model of the measurement object includes an acquisition unit configured to acquire a captured image of the measurement object, a calculation unit configured to calculate information indicating a surface shape of the measurement object based on the captured image, and a limitation unit configured to limit a position and/or orientation of the model based on the information indicating the surface shape.

    摘要翻译: 一种用于将测量对象的位置和/或取向与测量对象的模型进行匹配的信息处理设备包括:获取单元,被配置为获取测量对象的拍摄图像;计算单元,被配置为计算指示表面的信息 基于捕获图像的测量对象的形状;以及限制单元,被配置为基于指示表面形状的信息来限制模型的位置和/或取向。

    IMAGE PROCESSING APPARATUS AND IMAGE PROCESSING METHOD
    187.
    发明申请
    IMAGE PROCESSING APPARATUS AND IMAGE PROCESSING METHOD 有权
    图像处理装置和图像处理方法

    公开(公告)号:US20110158535A1

    公开(公告)日:2011-06-30

    申请号:US12972322

    申请日:2010-12-17

    IPC分类号: G06K9/46

    CPC分类号: G06K9/6223 G06K9/4642

    摘要: A classification result is stored in advance. At the time of identification, classification is performed at a high speed based on the stored classification result. In pre-classification, classification is performed divisionally in two stages. In the first classification, a plurality of representative vectors are generated from the classification result using a fast executable method. In the second classification, the created representative vectors are classified, and the result is stored in a lookup table. When an identification target image is input, the classification result can be reflected at a high speed by using the lookup table.

    摘要翻译: 分类结果预先存储。 在识别时,基于存储的分类结果高速地进行分类。 在预分类中,分类分两个阶段进行。 在第一分类中,使用快速可执行方法从分类结果生成多个代表向量。 在第二分类中,对所创建的代表向量进行分类,将结果存储在查找表中。 当识别目标图像被输入时,通过使用查找表可以高速地反映分类结果。

    INFORMATION PROCESSING APPARATUS AND METHOD
    188.
    发明申请
    INFORMATION PROCESSING APPARATUS AND METHOD 有权
    信息处理装置和方法

    公开(公告)号:US20110037984A1

    公开(公告)日:2011-02-17

    申请号:US12812008

    申请日:2009-01-28

    IPC分类号: G01N21/55

    摘要: An information processing apparatus includes an obtaining unit configured to obtain first information regarding a distribution of reflected light from a target to be measured and second information regarding geometrical-optics components of the reflected light, a calculating unit configured to calculate third information on the basis of the first information and the second information, the third information indicating an approximation of the distribution of reflected light, and an output unit configured to output information regarding wave-optics components of the reflected light on the basis of the third information.

    摘要翻译: 一种信息处理设备,包括:获取单元,被配置为获得关于来自待测目标的反射光的分布的第一信息和关于反射光的几何光学分量的第二信息;计算单元,被配置为基于 所述第一信息和所述第二信息,所述第三信息指示反射光的分布的近似值;以及输出单元,被配置为基于所述第三信息输出关于所述反射光的波长成分的信息。

    Parallel Pulse Signal Processing Apparatus, Pattern Recognition Apparatus, And Image Input Apparatus
    189.
    发明申请
    Parallel Pulse Signal Processing Apparatus, Pattern Recognition Apparatus, And Image Input Apparatus 有权
    并行脉冲信号处理装置,模式识别装置和图像输入装置

    公开(公告)号:US20070208678A1

    公开(公告)日:2007-09-06

    申请号:US10592954

    申请日:2005-03-16

    申请人: Masakazu Matsugu

    发明人: Masakazu Matsugu

    IPC分类号: G06F15/18

    CPC分类号: G06N3/049 G06K9/4628

    摘要: In a parallel pulse signal processing apparatus including a plurality of pulse output arithmetic elements (2), a plurality of connection elements (3) which parallelly connect predetermined arithmetic elements, and a gate circuit (5) which selectively passes pulse signals from the plurality of connection elements, the arithmetic element inputs a plurality of time series pulse signals, executes predetermined modulation processing on the basis of the plurality of time series pulse signals which are input, and outputs a pulse signal on the basis of a result of modulation processing, wherein the gate circuit selectively passes, of the signals from the plurality of connection elements, a finite number of pulse signals corresponding to predetermined upper output levels.

    摘要翻译: 在包括多个脉冲输出运算元件(2)的并行脉冲信号处理装置中,并联连接预定的运算元件的多个连接元件(3)和选择性地从多个脉冲输出运算元件 连接元件,算术元件输入多个时间序列脉冲信号,基于输入的多个时间序列脉冲信号来执行预定的调制处理,并且基于调制处理的结果输出脉冲信号,其中 门电路选择性地将来自多个连接元件的信号通过对应于预定上限输出电平的有限数量的脉冲信号。