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    Variable-focus optical element and focus detecting device utilizing the same
    2.
    发明授权
    Variable-focus optical element and focus detecting device utilizing the same 失效
    可变焦光学元件和利用其的焦点检测装置

    公开(公告)号：US4802746A

    公开(公告)日：1989-02-07

    申请号：US832649

    申请日：1986-02-25

    申请人： Takeshi Baba ,  Shigeyuki Suda ,  Noriyuki Nose ,  Eigo Kawakami ,  Toshiyuki Nakajima ,  Nobuo Kushibiki

    发明人： Takeshi Baba ,  Shigeyuki Suda ,  Noriyuki Nose ,  Eigo Kawakami ,  Toshiyuki Nakajima ,  Nobuo Kushibiki

    IPC分类号： G02B3/14 ,  G02B7/36

    CPC分类号： G02B7/36 ,  G02B3/14

    摘要： A variable focus optical element comprises plural elastic members superposed in the axial direction and a deforming member having an aperture to cause the elastic member to protrude therefrom or descend therein thereby deforming the surface of the elastic members, and the modulus of elasticity of an elastic member at the protruding side is selected larger than that of another elastic member adjacent to first-mentioned elastic member at the protruding side. A focus detecting device comprises an imaging optical system having a variable-focus optical element, an image sensor provided at a determined image plane of the imaging optical system or an optically equivalent position, a sharpness detecting device for detecting the sharpness of the image from image signals obtained from the image sensor, and a device for varying the refractive power of the variable-focus optical element, and the focus state of the image on the image sensor is detected by comparing the sharpnesses detected by the sharpness detecting device at plural refractive powers of the variable-focus optical element.

    摘要翻译： 可变焦距光学元件包括沿轴向重叠的多个弹性构件和具有孔的变形构件，以使弹性构件从其突出或下降，从而使弹性构件的表面变形，并且弹性构件的弹性模量 在突出侧的突出侧被选择为大于在突出侧与第一弹性构件相邻的另一个弹性构件的突出侧。 焦点检测装置包括具有可变焦点光学元件的成像光学系统，设置在成像光学系统的确定的图像平面上的图像传感器或光学等效位置，用于从图像中检测图像的清晰度的锐度检测装置 通过将由锐度检测装置检测的锐度与多个折射力进行比较来检测从图像传感器获得的信号和用于改变可变焦点光学元件的折射力的装置和图像在图像传感器上的聚焦状态 的可变焦光学元件。

    IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
    7.
    发明申请
    IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE 有权
    印刷装置及其制造方法

    公开(公告)号：US20100314798A1

    公开(公告)日：2010-12-16

    申请号：US12816881

    申请日：2010-06-16

    申请人： Eigo Kawakami

    发明人： Eigo Kawakami

    IPC分类号： B29C59/02 ,  B28B11/08

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

    摘要： An imprint apparatus, which performs an imprint process for forming a pattern of a mold on a resin coated on a substrate, includes an imaging unit configured to image the resin on which the pattern is formed, and a controller configured to control the imprint process. When the pattern is continuously formed on the substrate, the controller compares an image of at least a partial area imaged by the imaging unit and an image of a reference state, which is obtained in advance, and when patterns each having a difference, which falls outside an allowable range, between the images are continuously formed, it determines a transfer error.

    摘要翻译： 执行用于在涂覆在基板上的树脂上形成模具图案的压印工艺的压印装置包括：成像单元，被配置为对形成有图案的树脂进行成像;以及控制器，被配置为控制压印处理。 当在基板上连续地形成图案时，控制器将由成像单元成像的至少一部分区域和预先获得的基准状态的图像以及各自具有差异的图案进行比较 在允许范围之外，图像之间连续形成，确定传送错误。

    Fine pattern forming apparatus and fine pattern inspecting apparatus
    10.
    发明申请
    Fine pattern forming apparatus and fine pattern inspecting apparatus 有权
    精细图案形成装置和精细图案检查装置

    公开(公告)号：US20050269035A1

    公开(公告)日：2005-12-08

    申请号：US11147562

    申请日：2005-06-07

    申请人： Eigo Kawakami ,  Hirohisa Ota ,  Takashi Nakamura ,  Kazuyuki Kasumi ,  Toshinobu Tokita

    发明人： Eigo Kawakami ,  Hirohisa Ota ,  Takashi Nakamura ,  Kazuyuki Kasumi ,  Toshinobu Tokita

    IPC分类号： G01Q30/04 ,  G01B5/28 ,  G01Q60/24 ,  G01Q80/00 ,  G03F7/20

    CPC分类号： G03F7/2049 ,  G01Q10/06 ,  G01Q70/06 ,  G01Q80/00

    摘要： Disclosed is a fine pattern forming apparatus and a fine pattern inspecting apparatus. In one preferred form, the fine pattern forming apparatus includes a surface irregularity information reading device for detecting a shape signal corresponding to a surface irregularity of a surface of an original, while scanning the surface by use of a first probe, and a surface irregularity information writing device for processing a substrate to be processed, while scanning a surface of the substrate by use of a second probe, wherein an applied electric voltage to the second probe is changed in accordance with the shape signal while a distance between the second probe and the substrate is kept substantially constant, or the distance between the second probe and the substrate is changed in accordance with the shape signal while the applied electric voltage to the second probe is kept substantially constant, such that the substrate is processed in accordance with the surface irregularity of the original.

    摘要翻译： 公开了一种精细图案形成装置和精细图案检查装置。 在一种优选形式中，精细图案形成装置包括：表面不规则信息读取装置，用于在利用第一探针扫描表面时检测与原件的表面的表面不规则相对应的形状信号，以及表面不规则信息 用于处理待处理的基板的写入装置，同时通过使用第二探针扫描基板的表面，其中根据形状信号改变施加到第二探针的电压，同时第二探针和第二探针之间的距离 基板保持基本恒定，或者第二探针和基板之间的距离根据形状信号而改变，同时施加到第二探针的电压保持基本上恒定，使得基板根据表面不规则性被加工 的原来。