公开(公告)号：US20150295521A1

公开(公告)日：2015-10-15

申请号：US14441957

申请日：2013-09-24

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Yoshiaki Tatsumi ,  Toshifumi Sugawara

IPC: H02N13/00

CPC classification number: H02N13/00 ,  H01L21/6833

Abstract: In an electrostatic chuck and a power supply system, high-voltage drive is performed without generating electrical discharge even in a vacuum atmosphere, and a structure of the power supply system for the electrostatic chuck is simplified. This power supply system includes: an electrostatic chuck (2) having a booster circuit (3); and an electric contact mechanism (4). Terminals (31a, 32a) of the booster circuit (3) are exposed to the outside. The terminals (31b, 32b) are connected to an attraction electrode (23). The electric contact mechanism (4) is configured from rails (41, 42), and flexible contacts (43, 44) in contact with the rails. The rails (41, 42) are connected to an external power supply (40), and the flexible contacts (43, 44) are provided on conductive plates (45, 46) of the electrostatic chuck (2). The conductive plates (45, 46) are connected to the terminals (31a, 32a) of the booster circuit (3).

Abstract translation: 在静电卡盘和电源系统中，即使在真空环境中也不产生放电而进行高压驱动，并且简化了用于静电卡盘的电源系统的结构。 该电源系统包括：具有升压电路（3）的静电卡盘（2）; 和电接触机构（4）。 升压电路（3）的端子（31a，32a）暴露在外部。 端子（31b，32b）与吸引电极（23）连接。 电接触机构（4）由轨道（41,42）和与轨道接触的柔性触点（43,44）构成。 轨道（41,42）连接到外部电源（40），柔性触点（43,44）设置在静电卡盘（2）的导电板（45,46）上。 导电板（45,46）连接到升压电路（3）的端子（31a，32a）。

公开(公告)号：US11911863B2

公开(公告)日：2024-02-27

申请号：US17624746

申请日：2020-08-31

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Masaru Ozawa

IPC: H02N13/00 ,  B23Q3/15 ,  H01L21/683

CPC classification number: B23Q3/15 ,  H01L21/6833 ,  H02N13/00 ,  B23Q2703/02

Abstract: An attachment and detachment device that excels in responsiveness to attachment and detachment of a workpiece even when the workpiece is thin while utilizing an electrostatic chuck method is provided. The attachment and detachment device that enables suction and separation of a workpiece includes a machinable ceramic layer, an adhesion activating layer provided on the machinable ceramic layer, an electrode layer provided on the adhesion activating layer, and a dielectric layer provided on the electrode layer, wherein the electrode layer is covered with the adhesion activating layer and the dielectric layer, and the dielectric layer has a volume resistivity of 109 to 1012 Ω·cm.

公开(公告)号：US20230381791A1

公开(公告)日：2023-11-30

申请号：US17768465

申请日：2021-08-31

Applicant: Creative Technology Corporation

Inventor： Takaaki HASEGAWA ,  Hiroyuki MORIYAMA

IPC: B03C3/70 ,  B03C3/47 ,  B03C3/64

CPC classification number: B03C3/70 ,  B03C3/47 ,  B03C3/64

Abstract: Provides a dust collector capable of being installed even in small spaces and capable of collecting dust efficiently. A dust collector 1 includes a first electrode layer 12 formed of a conductor, a second electrode layer 14 formed of a conductor, having sufficient size to cover the first electrode layer 12 in planar view, having lacking parts (through holes 14H, slits 14S) piercing therethrough in a thickness direction, having sufficient size to cover the first electrode layer 12 in planar view, and placed interfacing the first electrode layer 12, and an insulating layer (a first insulating layer 13, a second insulating layer 15) formed of an insulative material, insulating the first electrode layer 12 and the second electrode layer 14, and forming a single merged layer structure with the first electrode layer 12 and the second electrode layer 14.

公开(公告)号：US20200338222A1

公开(公告)日：2020-10-29

申请号：US16757987

申请日：2018-11-07

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Satomi KOYAMA ,  Shinsuke HIRANO ,  Yoshiaki TATSUMI

IPC: A61L2/20 ,  A42C3/04

Abstract: Provided are a headgear stand and a headgear cleaner that is small-sized and has low power consumption, and that is capable of sterilizing and deodorizing headgear made of any material. A headgear cleaner 1-1 is provided with an ozone generator 2 and a voltage supply part 5. The ozone generator 2 is constituted from an ozone generator body 3-1 and a connecting part 4. The ozone generator body 3-1 forms a shape in which twelve leaf parts extend radially. The voltage supply part 5 supplies a voltage necessary for generating ozone to the ozone generator 2.

公开(公告)号：US20190076852A1

公开(公告)日：2019-03-14

申请号：US15743105

申请日：2016-09-08

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Li LUO ,  Yoshiaki TATSUMI ,  Kazuki TSUBOI

IPC: B03C3/15 ,  B03C3/47 ,  B64C27/08 ,  B64C39/02 ,  F24F3/16 ,  F24F7/007

Abstract: Provided is an air cleaner that can take air in a wider range into a dust collector and can have attached a small dust collector without dropout of dust from the dust collector. An air cleaner 1-1 is provided with a flying body 2 and dust collectors 4-1-4-4. The flying body 2 is a drone and has a main body unit 20 and propellers 21-24 attached to the tips of frames 25-28. Each of the dust collectors 4-1 (4-2-4-4) is constituted of a cylindrical adsorption unit 40A-40C assembled to the propeller 21 (22-24), and a power supply unit 31 and a booster unit 33 within the main body unit 20. Each adsorption unit 40A (40B, 40C) is formed from a dielectric 41 and an electrode 42 within the dielectric 41. The electrodes 42, 42, 42 of the adsorption units 40A, 40B, 40C are connected to the booster unit 33 via respective wiring 33a, 33b, 33c, and the power supply unit 31 is connected to the booster unit 33.

公开(公告)号：US20180147308A1

公开(公告)日：2018-05-31

申请号：US15568197

申请日：2016-05-13

Applicant: CREATIVE TECHNOLOGY CORPORATION ,  MATSUDA DESIGN LTD

Inventor： Satomi KOYAMA ,  Yoshiaki TATSUMI ,  Li LUO ,  Kazuki TSUBOI ,  Mutsumi KUSANO ,  Takeshi MATSUDA ,  Shujiro HAYASHI

IPC: A61L2/20 ,  A61L2/10 ,  A61L2/26

CPC classification number: A61L2/202 ,  A01N59/00 ,  A61L2/10 ,  A61L2/26 ,  A61L2202/11 ,  A61L2202/16 ,  A61L2202/20 ,  A61L2202/26 ,  C01B13/11 ,  A01N25/34

Abstract: A sterilizing sheet is excellent in terms of saving space when a sterilizing operation is being performed, and sterilizing objects of various sizes. This sterilizing sheet is provided with a flexible sheet body, a sheet accommodating body and a handle. The sheet body is formed from a dielectric and a pair of electrodes accommodated inside the dielectric. The sheet accommodating body is a cylindrical body in which the sheet body is accommodated to be capable of being pulled out and rewound, and is provided with a case, a rotating body and a rewinding mechanism. The rewinding mechanism is a mechanism for automatically rewinding the sheet body, when pulled out from the sheet accommodating body, back into the sheet accommodating body. The handle is attached to a distal end portion of the sheet body, and includes, inside the handle, a battery, a switch mechanism, a booster circuit and a monitoring circuit.

公开(公告)号：US20150288302A1

公开(公告)日：2015-10-08

申请号：US14441937

申请日：2013-10-21

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Yoshiaki Tatsumi ,  Toshifumi Sugawara

IPC: H02N13/00 ,  C03C17/00

CPC classification number: H02N13/00 ,  B65G49/061 ,  C03C17/002 ,  C23C14/50 ,  H01L21/6831 ,  Y10T29/49998

Abstract: An electrostatic chuck that enables high speed and high quality processing of a plate to be processed, and in which the weight of a base member is reduced and the strength thereof increased so as to maintain the flatness of the base member and prevent the plate to be processed from falling; a glass substrate processing method; and said glass substrate. An electrostatic chuck (1) provided with a base member (2) and an electrostatic suction layer (3). The base member (2) is formed by a lower-surface plate (20), side-surface plates (21-24), and an upper-surface plate (25), and has a part (4) for a plurality of individual structures configured therein. The part (4) for a plurality of individual structures has a honeycomb structure that is caused by regular hexagonal tubes (40) and enables the weight of the base member (2) to be reduced and the strength thereof increased.

Abstract translation: 一种静电卡盘，其能够对待加工的板进行高速度和高质量的加工，并且其中底部构件的重量减小并且其强度增加，以便保持基底构件的平坦度并防止板 从下降处理 玻璃基板处理方法; 和玻璃基板。 设置有基体部件（2）和静电吸附层（3）的静电卡盘（1）。 基部构件（2）由下表面板（20），侧面板（21-24）和上表面板（25）形成，并且具有用于多个个体的部分（4） 配置在其中的结构。 用于多个单独结构的部分（4）具有由正六边形管（40）引起的蜂窝结构，并且能够减小基部构件（2）的重量并且其强度增加。

公开(公告)号：US20150268026A1

公开(公告)日：2015-09-24

申请号：US14434805

申请日：2013-10-01

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Toshifumi Sugawara ,  Eunsun Kim ,  Yoshiaki Tatsumi

IPC: G01B7/00 ,  G01D5/24 ,  H01L21/673 ,  G01B7/02

CPC classification number: G01B7/002 ,  G01B7/003 ,  G01B7/02 ,  G01D5/24 ,  G01D5/2412 ,  H01L21/67259 ,  H01L21/673

Abstract: Provided are a workpiece holding apparatus capable of detecting lateral displacement of a workpiece (w) in a planar direction, and a method of detecting lateral displacement of a workpiece (w) with use of the workpiece holding apparatus. The workpiece holding apparatus, which is configured to hold the workpiece (w), with an adhesive pad (2) mounted on a support plate, includes: a capacitance measuring device (5) including an electrode pair formed of first and second electrodes (3a, 3b) and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece (w), the capacitance measuring device (5) being configured to measure capacitance of the electrode pair; and a comparator circuit (6) configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece (w) in a planar direction of the support plate (1). Further, the method of detecting lateral displacement of a workpiece (w) includes comparing the capacitance input to the comparator circuit (6) with a predetermined reference value, to thereby detect the lateral displacement of the workpiece (w).

Abstract translation: 提供一种能够检测工件（w）在平面方向上的横向位移的工件保持装置以及使用工件保持装置检测工件（w）的横向位移的方法。 通过安装在支撑板上的粘合剂垫（2）构造成保持工件（w）的工件保持装置包括：电容测量装置（5），包括由第一和第二电极（3a）形成的电极对 ，3b）并且至少布置在与所述工件（w）的周边部分相对应的位置的一部分处，所述电容测量装置（5）被配置为测量所述电极对的电容; 以及比较器电路（6），被配置为将所测量的电容与预定参考值进行比较，从而检测所述工件（w）在所述支撑板（1）的平面方向上的横向位移。 此外，检测工件的横向位移的方法（w）包括将电容输入与比较器电路（6）进行比较以预定的参考值，从而检测工件的横向位移（w）。

公开(公告)号：US20240375121A1

公开(公告)日：2024-11-14

申请号：US18690336

申请日：2022-10-04

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Takaaki HASEGAWA ,  Hiroyuki MORIYAMA ,  Daisuke HORIUCHI ,  Yoshiki OSHIMA ,  Tadayuki MORISHITA ,  Yoshihiro NAGANO ,  Tomio WASEDA ,  Manabu TOMIYA

IPC: B03C3/64 ,  B03C3/47 ,  B03C3/70 ,  B03C3/86 ,  B21D55/00

Abstract: To provide an electric precipitator for a press mold, which can collect more reliably dusty foreign matter emitted during stamping process utilizing an electrostatic force, has excellent installability, and can be used safely. Provided is an electric precipitator for a press mold, the electric precipitator being used together with the press mold to collect dusty foreign matter emitted during stamping process by an electrostatic force and including: a laminated sheet in which a dust collection layer that holds the dusty foreign matter in contact, a first electrode layer, a second electrode layer, an insulation layer, and a close-contact fixation layer for installation on and fixation to a mold to be used are laminated; and a power supply device that applies voltages across the first and second electrode layers. The insulation layer at least has a first insulation layer that insulates the dust collection layer and the first electrode layer, a second insulation layer that insulates the first electrode layer and the second electrode layer, and a third insulation layer that insulates the second electrode layer and the close-contact fixation layer. The first and second electrode layers are films obtained by coating a polyethylene terephthalate (PET) base material with a conductive polymer and having a surface resistivity of 104 to 105 Ω. A polyimide film having a base material thickness of 75 μm is used for the second insulation layer. A press mold including the same is also provided.

公开(公告)号：US11121649B2

公开(公告)日：2021-09-14

申请号：US16638614

申请日：2018-07-25

Applicant: CREATIVE TECHNOLOGY CORPORATION

Inventor： Masaru Ozawa

IPC: H01L21/683 ,  H02N13/00 ,  H01L21/677 ,  H01T23/00 ,  H01L21/67

Abstract: An electrostatic workpiece-holding method includes an initialization step, a static elimination step, a workpiece setting step, a workpiece attracting step, and a workpiece release step. The initialization step is a step of applying a positive voltage to electrode of the electrostatic attracting part while applying a negative voltage to electrode. The static elimination step is a step of removing the static charge on the surface of the electrostatic attracting part. The workpiece setting step is a step of placing the workpiece in contact with the surface of the electrostatic attracting part. The workpiece attracting step is a step of interrupting the application of the positive voltage to electrode of the electrostatic attracting part and the application of the negative voltage to electrode. The workpiece release step is a step of applying the positive voltage to electrode of the electrostatic attracting part while applying the negative voltage to electrode.