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    System for electrically connecting a mask to earth, a mask
    15.
    发明授权
    System for electrically connecting a mask to earth, a mask 失效
    用于将面罩与地面电连接的系统，面罩

    公开(公告)号：US07514186B2

    公开(公告)日：2009-04-07

    申请号：US11167560

    申请日：2005-06-28

    申请人： Hendricus Johannes Maria Meijer ,  Uwe Mickan ,  Marco Le Kluse

    发明人： Hendricus Johannes Maria Meijer ,  Uwe Mickan ,  Marco Le Kluse

    IPC分类号： G03F1/00

    CPC分类号： G03F7/70941 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/38 ,  G03F1/40 ,  G03F7/707 ,  G03F7/70708 ,  G21K2201/06

    摘要： A reticle includes an area provided with a conductive metal-based compound coating for electrically grounding the reticle. The reticle is suitable for use with a lithography apparatus whereby the reticle pattern is imaged using extreme ultra violet radiation. One or more conducting pins, held at zero potential, may be pressed against the conductive coating for electrically grounding the reticle either during patterning the reticle by electron beam writing or during use in the lithographic apparatus. The areas coated with the metal-based compounds are wear resistant which reduces the occurrence of particles due to damage caused by mechanical contact between the conducting pins and the conductive coating.

    摘要翻译： 掩模版包括设置有用于将掩模版电接地的导电金属基复合涂层的区域。 掩模版适用于光刻设备，由此使用极紫外辐射对掩模版图案进行成像。 保持在零电位的一个或多个导电引脚可以被压靠在导电涂层上，以在通过电子束写入或在光刻设备中的使用期间在掩模版图案化期间将掩模版电接地。 涂覆有金属基化合物的区域是耐磨的，其减少由于导电引脚和导电涂层之间的机械接触而引起的损伤的发生。