Abstract:
A transport system within a fabrication system. The fabrication system contains a plurality of tool bays, each of which has a plurality of processing tools for processing articles. The transport system contains a plurality of intrabay transport subsystems, an interbay transport subsystem, a plurality of stockers, and at least one linking subsystem. Each intrabay transport subsystem is dedicated to transporting articles within a particular tool bay. The interbay transport subsystem, linking the tool bays, transports articles between the tool bays. The stockers, located between the intrabay and interbay transport subsystems, store articles between processing and transfer articles between the intrabay and interbay transport subsystems. The linking subsystem, located between two adjacent intrabay transport subsystems, provides direct transport between the two corresponding tool bays.
Abstract:
A method for switch dual Id verification systems for installing another carrier ID system on an equipment installation complying with SEMI E87. A first identification access system has internally installed on an equipment installation on which a second identification access system is then installed. Both systems are switched using a control flow and a wafer carrier ID is obtained by the chosen verification system.
Abstract:
An ink cartridge includes a hollow ink tank body defining an accommodating chamber therein. The ink tank body has an ink outlet port and a mounted seat being formed on a bottom surface thereof. A cover member has an ink filling inlet formed therein. The cover member is fixedly secured to the hollow ink tank body and sealing the accommodating chamber of said hollow ink tank body. A pressure regulator is mounted on the mounted seat and has a box body, an elastic member, and a cover body. As a result of a negative pressure will increase during printing, the elastic member will change its shape and allow air pass through it unidirectional, and because the elastic member has an elastic force, the ink tank still maintains a certain amount of negative pressure and thereof the ink will not leak through the pressure regulator to outside.
Abstract:
The present invention provides a wideband frequency tunable ring resonator, wherein, comprises a closed λg/2 transmission line and two variable capacitors with tunable capacitance, the λg/2 transmission line is axisymmetric around a central line, first ends of the two variable capacitors are respectively connected to two intersection points of the λg/2 transmission line and the central line, the second ends of the two variable capacitors are respectively grounded. By implementing the technical solution of present invention, following technical effects are obtained. The fundamental resonant frequency (ffund) can be shifted up and down by controlling the respective values of the two loading capacitors, resulting in a bi-directional tuning of ffund. As a result, the tuning range of this invention can be approximately doubled as compared with the conventional tunable ring resonator.
Abstract:
A spindle control system for a milling machine is provided. The milling machine includes a column, an overarm, a spindle for mounting a cutter, a first motor mounted on the column for driving movement of the overarm, and a second motor mounted on the overarm for driving rotation of the spindle. The spindle control system includes a distance sensor and a temperature sensor, each to be mounted on the overarm and to be disposed proximate to the end portion of the spindle. The spindle control system further includes a central control unit for determining a compensation parameter based on the displacement sensed by the distance sensor and the temperature sensed by the temperature sensor, and for controlling movement of the overarm by the first motor through a compensation distance based on the compensation parameter to compensate for at least one of the cutter deformation and the spindle deformation.
Abstract:
A microwave frequency tunable filtering balun is provided. The microwave frequency tunable filtering balun comprises a first microwave split ring transmission line resonator and a second microwave split ring transmission line resonator arranged in a bilaterally symmetrical manner, a fourth variable capacitor and a fifth variable capacitor of same parameters. It combines two functions of balun and tunable bandpass filter (BPF) into one circuit, resulting in a compact design. The balun characteristic and frequency-tuning mechanism are investigated, and the design equations are derived.
Abstract:
A milling machine has a carriage, a main spindle seat extending along an axis, and a motor operable to drive displacement of the main spindle seat relative to the carriage along the axis. A deflection correction system includes a control unit, a displacement sensor, at least one pressure cylinder, and a pressure sensor. The pressure cylinder includes a cylinder body, and a control rod extended retractably into the cylinder body. The control unit is configured to determine a pressure range as a function of displacement detected by the displacement sensor, and to maintain fluid pressure in the pressure cylinder within a pressure range, thereby controlling the control rod via the cylinder body to position the second end portion of the main spindle seat relative to the axis.
Abstract:
A system for inspecting a scraped surface of a workpiece performs steps of: a) capturing an image of the scraped surface to obtain a original image section; b) removing high point regions whose areas are outside of a predetermined area range to obtain a base image; c) processing pixels of the base image using a first imaging mask to generate a judgment image; d) determining whether uniformity of the high point regions in the base image conforms a standard; e) determining whether a number of the high point regions in the base image falls within a predetermined number range; and f) evaluating whether or not a portion of the scraped surface conforms with the standard based on results of determinations made in steps d) and e).