公开(公告)号：US08635783B2

公开(公告)日：2014-01-28

申请号：US13124547

申请日：2009-10-15

申请人： Ivor McDonnell ,  Paul James Scott ,  Daniel Ian Mansfield

发明人： Ivor McDonnell ,  Paul James Scott ,  Daniel Ian Mansfield

IPC分类号： G01B5/004

CPC分类号： G01B21/045 ,  G01B5/008 ,  G01B21/042

摘要： A method of determining a correction parameter for use in effecting alignment of a component of a metrological apparatus in at least one direction is described which includes: positioning an artefact on a support surface of a turntable of the metrological apparatus so that a measurement surface of the artefact is asymmetric with respect to a rotation axis of the turntable in the at least one direction; using a measurement probe of the measurement instrument to make a first measurement of the measurement surface; rotating the turntable; using the measurement probe of the measurement instrument to make a second measurement of the measurement surface after rotation of the turntable; and determining a correction parameter from the first and second measurements.

摘要翻译： 描述了确定用于在至少一个方向上实现计量装置的部件对准的校正参数的方法，其包括：将人造物定位在计量装置的转台的支撑表面上，使得测量表面 相对于转盘在至少一个方向上的旋转轴线，人造物不对称; 使用测量仪器的测量探头对测量表面进行第一次测量; 旋转转盘; 使用测量仪器的测量探头在旋转后对测量表面进行第二次测量; 以及从所述第一和第二测量确定校正参数。

公开(公告)号：US07948634B2

公开(公告)日：2011-05-24

申请号：US12115955

申请日：2008-05-06

申请人： Andrew Douglas Bankhead ,  Ivor McDonnell

发明人： Andrew Douglas Bankhead ,  Ivor McDonnell

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01B9/02057 ,  G01B9/02069 ,  G01B9/02083 ,  G01B9/0209 ,  G01B11/026

摘要： Broadband light is directed along sample and reference paths such that light reflected by a sample surface and light reflected by a reference surface interfere. A mover effects relative movement between the sample and reference surfaces along a scan path. A detector senses a series of light intensity values representing interference fringes produced by a sample surface region during the movement. A data processor processes the intensity values as they are received to produce coherence peak position data and, after completion of a measurement operation, uses this coherence peak position data to obtain data indicative of the height of the surface region. The data processor includes a correlator for correlating intensity values with correlation function data to provide correlation data to enable identification of a position of a coherence peak. A surface topography determiner determines a height of a sample surface region from coherence peak position data.

摘要翻译： 宽带光沿着采样和参考路径被引导，使得被样品表面反射的光和被参考表面反射的光干涉。 移动器沿着扫描路径影响样品和参考表面之间的相对运动。 检测器感测在运动期间由表面区域产生的干涉条纹的一系列光强度值。 数据处理器处理它们被接收的强度值以产生相干峰位置数据，并且在完成测量操作之后，使用该相干峰位置数据来获得表示表面区域的高度的数据。 数据处理器包括用于将强度值与相关函数数据相关联以提供相关数据以使得能够识别相干峰的位置的相关器。 表面形貌确定器从相干峰位置数据确定样品表面区域的高度。

公开(公告)号：US20090012743A1

公开(公告)日：2009-01-08

申请号：US12162728

申请日：2007-02-09

申请人： Ivor McDonnell ,  Andrew Douglas Bankhead ,  Daniel Ian Mansfield

发明人： Ivor McDonnell ,  Andrew Douglas Bankhead ,  Daniel Ian Mansfield

IPC分类号： G01B11/24

CPC分类号： G01B11/303 ,  G01B9/02057 ,  G01B9/0209 ,  G01B2290/65

摘要： A surface measurement instrument (1) for obtaining surface characteristic data of a sample surface (13) is described. Relative movement between a reference surface (11) and a sample support (15) is caused to occur while a sensor (16) senses light intensity at intervals along a scan path (SP) to provide a series of intensity values representing interference fringes produced by a region of a sample surface (13) during said relative movement and from which series of intensity values surface characteristic data can be derived. The sample support (15) is both translatable and tiltable in at least one direction perpendicular to a scan direction so that the sample support (15) can be both tilted to cause the scan path (SP) to be normal to the sample surface region and translated to compensate for translation movement due to the tilting.

摘要翻译： 描述了用于获得样品表面（13）的表面特性数据的表面测量仪器（1）。 当传感器（16）沿着扫描路径（SP）以间隔感测光强度时，引起参考表面（11）和样品支架（15）之间的相对运动，以提供一系列强度值，表示由 在所述相对移动期间的样品表面（13）的区域，并且可以从其导出一系列强度值表面特征数据。 样品支撑件（15）在垂直于扫描方向的至少一个方向上是可平移的和可倾斜的，使得样品支撑件（15）可以倾斜以使得扫描路径（SP）垂直于样品表面区域，并且 翻译为补偿由于倾斜引起的翻译运动。