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公开(公告)号：US08489359B2
公开(公告)日：2013-07-16
申请号：US13008380
申请日：2011-01-18
CPC分类号： G01B11/303 , G01B9/02057 , G01B9/0209 , G01B2290/65
摘要： A surface measurement instrument for obtaining surface characteristic data of a sample surface is described. Relative movement between a reference surface and a sample support is caused to occur while a sensor senses light intensity at intervals along a scan path to provide a series of intensity values representing interference fringes produced by a region of a sample surface during said relative movement and from which series of intensity values surface characteristic data can be derived. The sample support is both translatable and tiltable in at least one direction perpendicular to a scan direction so that the sample support can be both tilted to cause the scan path to be normal to the sample surface region and translated to compensate for translation movement due to the tilting.
摘要翻译： 描述了用于获得样品表面的表面特性数据的表面测量仪器。 当传感器沿着扫描路径间隔地感测光强度时，引起参考表面和样品支架之间的相对运动，以提供一系列强度值，其表示在所述相对运动期间由样品表面的区域产生的干涉条纹， 可以推导出哪一系列的强度值表面特征数据。 样品支撑体可以在垂直于扫描方向的至少一个方向上是可平移的和可倾斜的，使得样品支撑件可以倾斜以使得扫描路径垂直于样品表面区域并且被平移以补偿由于 倾斜
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公开(公告)号：US08051576B2
公开(公告)日：2011-11-08
申请号：US12299992
申请日：2007-05-01
申请人： Ivor McDonnell , Jeremy Ayres
发明人： Ivor McDonnell , Jeremy Ayres
CPC分类号： G01B5/201
摘要： An attitude arm mounted to a support arm is rotatable about a pivot. The attitude arm holds a stylus gauge, which generates a signal representing deflection of the stylus in a measurement direction as the stylus follows a surface of a workpiece rotated on a turntable. An attitude switching mechanism allows switching between a first stylus attitude generally aligned with the turntable spindle axis and a second stylus attitude generally aligned perpendicular to the turntable spindle axis. To enable alignment of the measurement direction with the spindle axis, first and second adjusters enable the stylus tip to be moved perpendicular to the spindle axis and the measurement direction when in the first and second stylus attitudes, respectively. An orientation mechanism is provided to rotate the measurement direction of the stylus. A stylus tilt mechanism is provided to tilt the stylus about a tilt axis parallel with the measurement direction.
摘要翻译： 安装到支撑臂的姿态臂可绕枢轴旋转。 姿态臂保持一个触针计，当触笔跟随在转台上旋转的工件的表面时，它产生一个表示测量方向上的触针偏转的信号。 姿态切换机构允许在与转盘主轴轴线大致对准的第一触针姿态与大致垂直于转盘主轴轴线对准的第二触针姿态之间进行切换。 为了使测量方向与主轴轴线对准，第一和第二调节器分别使得触针尖端能够在第一和第二触针姿态下分别垂直于主轴轴线和测量方向移动。 提供定向机构以旋转触针的测量方向。 提供触针倾斜机构以使测针绕与测量方向平行的倾斜轴倾斜。
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公开(公告)号：US20110258867A1
公开(公告)日：2011-10-27
申请号：US13124547
申请日：2009-10-15
IPC分类号： G01B5/00
CPC分类号： G01B21/045 , G01B5/008 , G01B21/042
摘要： A method of determining a correction parameter for use in effecting alignment of a component of a metrological apparatus in at least one direction is described which includes: positioning an artefact on a support surface of a turntable of the metrological apparatus so that a measurement surface of the artefact is asymmetric with respect to a rotation axis of the turntable in the at least one direction; using a measurement probe of the measurement instrument to make a first measurement of the measurement surface; rotating the turntable; using the measurement probe of the measurement instrument to make a second measurement of the measurement surface after rotation of the turntable; and determining a correction parameter from the first and second measurements.
摘要翻译： 描述了确定用于在至少一个方向上实现计量装置的部件对准的校正参数的方法，其包括：将人造物定位在计量装置的转台的支撑表面上，使得测量表面 相对于转盘在至少一个方向上的旋转轴线，人造物不对称; 使用测量仪器的测量探头对测量表面进行第一次测量; 旋转转盘; 使用测量仪器的测量探头在旋转后对测量表面进行第二次测量; 以及从所述第一和第二测量确定校正参数。
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公开(公告)号：US20110166823A1
公开(公告)日：2011-07-07
申请号：US13008380
申请日：2011-01-18
CPC分类号： G01B11/303 , G01B9/02057 , G01B9/0209 , G01B2290/65
摘要： A surface measurement instrument for obtaining surface characteristic data of a sample surface is described. Relative movement between a reference surface and a sample support is caused to occur while a sensor senses light intensity at intervals along a scan path to provide a series of intensity values representing interference fringes produced by a region of a sample surface during said relative movement and from which series of intensity values surface characteristic data can be derived. The sample support is both translatable and tiltable in at least one direction perpendicular to a scan direction so that the sample support can be both tilted to cause the scan path to be normal to the sample surface region and translated to compensate for translation movement due to the tilting.
摘要翻译： 描述了用于获得样品表面的表面特性数据的表面测量仪器。 当传感器沿着扫描路径间隔地感测光强度时，引起参考表面和样品支架之间的相对运动，以提供一系列强度值，表示在所述相对运动期间由样品表面的区域产生的干涉条纹， 可以推导出哪一系列的强度值表面特征数据。 样品支撑体可以在垂直于扫描方向的至少一个方向上是可平移的和可倾斜的，使得样品支撑件可以倾斜以使扫描路径垂直于样品表面区域并且被平移以补偿由于 倾斜
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公开(公告)号：US07877227B2
公开(公告)日：2011-01-25
申请号：US12162728
申请日：2007-02-09
IPC分类号： G01B11/24
CPC分类号： G01B11/303 , G01B9/02057 , G01B9/0209 , G01B2290/65
摘要： A surface measurement instrument (1) for obtaining surface characteristic data of a sample surface (13) is described. Relative movement between a reference surface (11) and a sample support (15) is caused to occur while a sensor (16) senses light intensity at intervals along a scan path (SP) to provide a series of intensity values representing interference fringes produced by a region of a sample surface (13) during said relative movement and from which series of intensity values surface characteristic data can be derived. The sample support (15) is both translatable and tiltable in at least one direction perpendicular to a scan direction so that the sample support (15) can be both tilted to cause the scan path (SP) to be normal to the sample surface region and translated to compensate for translation movement due to the tilting.
摘要翻译： 描述了用于获得样品表面（13）的表面特性数据的表面测量仪器（1）。 当传感器（16）沿着扫描路径（SP）以间隔感测光强度时，引起参考表面（11）和样品支架（15）之间的相对运动，以提供一系列强度值，表示由 在所述相对移动期间的样品表面（13）的区域，并且可以从其导出一系列强度值表面特征数据。 样品支撑件（15）在垂直于扫描方向的至少一个方向上是可平移的和可倾斜的，使得样品支撑件（15）可以倾斜以使得扫描路径（SP）垂直于样品表面区域，并且 翻译为补偿由于倾斜引起的翻译运动。
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公开(公告)号：US20080215271A1
公开(公告)日：2008-09-04
申请号：US12115955
申请日：2008-05-06
CPC分类号： G01B11/2441 , G01B9/02057 , G01B9/02069 , G01B9/02083 , G01B9/0209 , G01B11/026
摘要： Light from a broadband source (4) is directed along a sample path (SP) towards a region of a sample surface (7) and along a reference path (RP) towards a reference surface (6) such that light reflected by the region of the sample surface and light reflected by the reference surface interfere. A mover (11) effects relative movement along a scan path between the sample surface (7) and the reference surface (6). A detector (10) senses light intensity at intervals to provide a series of intensity values representing interference fringes produced by a region of a sample surface. A data processor has a concurrent processing section (34a;340) for carrying out processing on intensity values as the intensity values are received by the receiving means during a measurement operation to produce data indicating the position of a coherence peak, and a post-processing section (34b;350) for, after completion of a measurement operation, using the data produced by the concurrent section to obtain data indicative of a height of the surface region. One of the processing sections has a correlator (44;440) for correlating intensity values with correlation function data representing a correlation function to provide correlation data to enable a position of a coherence peak to be identified. The post-processing section has a surface topography determiner (35;350) for determining a height of a sample surface region from coherence peak position data.
摘要翻译： 来自宽带源（4）的光沿着样本路径（SP）朝向样本表面（7）的区域并且沿着参考路径（RP）朝向参考表面（6）引导，使得由 样品表面和参考面反射的光线会干扰。 移动器（11）沿着样品表面（7）和参考表面（6）之间的扫描路径实现相对运动。 检测器（10）间隔地感测光强度以提供一系列表示由样品表面的区域产生的干涉条纹的强度值。 数据处理器具有并行处理部分（341a; 340），用于在测量操作期间由接收装置接收强度值以产生指示相干峰位置的数据的强度值进行处理， 处理部分（34b; 350），用于在完成测量操作之后，使用并发部分产生的数据来获得表示表面区域的高度的数据。 处理部分之一具有相关器（44; 440），用于将强度值与表示相关函数的相关函数数据相关联，以提供相关数据以使相关峰的位置能够被识别。 后处理部分具有用于根据相干峰位置数据确定样品表面区域的高度的表面形貌确定器（35; 350）。
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公开(公告)号：US07385707B2
公开(公告)日：2008-06-10
申请号：US10507837
申请日：2003-03-13
CPC分类号： G01B11/2441 , G01B9/02057 , G01B9/02069 , G01B9/02083 , G01B9/0209
摘要： A surface profiling apparatus and method. Broadband light is directed along sample and reference paths such that light reflected by a region of a sample surface and light reflected by a reference surface interfere. A mover effects relative movement between the sample and reference surfaces along a scan path. A detector senses a series of light intensity values representing interference fringes produced by the region of the sample surface during the movement. A data processor processes the intensity values as they are received during a measurement operation to produce data indicating the position of a coherence peak, and, after completion of a measurement operation, uses this coherence peak position data to obtain data indicative of the height of the surface region. The data processor includes a correlator for correlating intensity values with a correlation function to provide correlation data to enable the position of a coherence peak to be identified.
摘要翻译： 表面成型装置及方法。 宽带光沿着采样和参考路径被引导，使得由样品表面的区域反射的光和被参考表面反射的光被干扰。 移动器沿着扫描路径影响样品和参考表面之间的相对运动。 检测器感测一系列光强度值，其表示在运动期间由样品表面的区域产生的干涉条纹。 数据处理器处理在测量操作期间接收到的强度值以产生指示相干峰位置的数据，并且在完成测量操作之后，使用该相干峰位置数据来获得指示相关峰的高度的数据 表面区域。 数据处理器包括用于将强度值与相关函数相关联的相关器，以提供相关数据，以使得能够识别相干峰的位置。
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公开(公告)号：US20050225769A1
公开(公告)日：2005-10-13
申请号：US10507837
申请日：2003-03-13
申请人： Andrew Bankhead , Ivor McDonnell
发明人： Andrew Bankhead , Ivor McDonnell
CPC分类号： G01B11/2441 , G01B9/02057 , G01B9/02069 , G01B9/02083 , G01B9/0209
摘要： Light from a broadband source (4) is directed along a sample path (SP) towards a region of a sample surface (7) and along a reference path (RP) towards a reference surface (6) such that light reflected by the region of the sample surface and light reflected by the reference surface interfere. A mover (11) effects relative movement along a scan path between the sample surface (7) and the reference surface (6). A detector (10) senses light intensity at intervals to provide a series of intensity values representing interference fringes produced by a region of a sample surface. A data processor has a concurrent processing section (34a;340) for carrying out processing on intensity values as the intensity values are received by the receiving means during a measurement operation to produce data indicating the position of a coherence peak, and a post-processing section (34b;350) for, after completion of a measurement operation, using the data produced by the concurrent section to obtain data indicative of a height of the surface region. One of the processing sections has a correlator (44;440) for correlating intensity values with correlation function data representing a correlation function to provide correlation data to enable a position of a coherence peak to be identified. The post-processing section has a surface topography determiner (35;350) for determining a height of a sample surface region from coherence peak position data.
摘要翻译： 来自宽带源（4）的光沿着样本路径（SP）朝向样本表面（7）的区域并且沿着参考路径（RP）朝向参考表面（6）引导，使得由 样品表面和参考面反射的光线会干扰。 移动器（11）沿着样品表面（7）和参考表面（6）之间的扫描路径实现相对运动。 检测器（10）间隔地感测光强度以提供一系列表示由样品表面的区域产生的干涉条纹的强度值。 数据处理器具有并行处理部分（341a; 340），用于在测量操作期间由接收装置接收强度值以产生指示相干峰位置的数据的强度值进行处理， 处理部分（34b; 350），用于在完成测量操作之后，使用并发部分产生的数据来获得表示表面区域的高度的数据。 处理部分之一具有相关器（44; 440），用于将强度值与表示相关函数的相关函数数据相关联，以提供相关数据以使相关峰的位置能够被识别。 后处理部分具有用于根据相干峰位置数据确定样品表面区域的高度的表面形貌确定器（35; 350）。
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公开(公告)号：US20090300929A1
公开(公告)日：2009-12-10
申请号：US12299992
申请日：2007-05-01
申请人： Ivor McDonnell , Jeremy Ayres
发明人： Ivor McDonnell , Jeremy Ayres
IPC分类号： G01B7/28
CPC分类号： G01B5/201
摘要： An attitude arm mounted to a support arm is rotatable about a pivot. The attitude arm holds a stylus gauge, which generates a signal representing deflection of the stylus in a measurement direction as the stylus follows a surface of a workpiece rotated on a turntable. An attitude switching mechanism allows switching between a first stylus attitude generally aligned with the turntable spindle axis and a second stylus attitude generally aligned perpendicular to the turntable spindle axis. To enable alignment of the measurement direction with the spindle axis, first and second adjusters enable the stylus tip to be moved perpendicular to the spindle axis and the measurement direction when in the first and second stylus attitudes, respectively. An orientation mechanism is provided to rotate the measurement direction of the stylus. A stylus tilt mechanism is provided to tilt the stylus about a tilt axis parallel with the measurement direction.
摘要翻译： 安装到支撑臂的姿态臂可绕枢轴旋转。 姿态臂保持一个触针计，当触笔跟随在转台上旋转的工件的表面时，它产生一个表示测量方向上的触针偏转的信号。 姿态切换机构允许在与转盘主轴轴线大致对准的第一触针姿态与大致垂直于转盘主轴轴线对准的第二触针姿态之间进行切换。 为了使测量方向与主轴轴线对准，第一和第二调节器分别使得触针尖端能够在第一和第二触针姿态下分别垂直于主轴轴线和测量方向移动。 提供定向机构以旋转触针的测量方向。 提供触针倾斜机构以使测针绕与测量方向平行的倾斜轴倾斜。
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公开(公告)号：US07518733B2
公开(公告)日：2009-04-14
申请号：US10536821
申请日：2003-11-21
IPC分类号： G01B11/02
CPC分类号： G01B11/303 , G01B9/02057 , G01B9/02072 , G01B9/02089 , G01B9/0209
摘要： Light is directed along a sample path towards the sample surface and along a reference path towards a reference surface such that light reflected by the sample surface and light reflected by the reference surface interfere. Relative movement is effected between the sample surface and the reference surface along a measurement path and the light intensity resulting from interference between light reflected from the reference surface and regions of the sample surface is sensed at intervals along the measurement path to provide a number of sets of light intensity data values with each light intensity data value representing the sensed light intensity associated with a corresponding one of said regions. The sets of light intensity data are processed to determine a position along the measurement path at which a predetermined feature occurs in the light intensity data for each sensed region and to enhance image data representing the intensity data to facilitate the detection by a user of the interference fringes.
摘要翻译： 光沿取样路径朝向样品表面并沿着参考路径被引向参考表面，使得由样品表面反射的光和被参考表面反射的光干涉。 沿着测量路径在样品表面和参考表面之间进行相对运动，并且沿着测量路径以间隔感测从参考表面反射的光与样品表面的区域之间的干涉产生的光强度，以提供多个组 的光强数据值，其中每个光强数据值表示与所述区域中的相应一个相关联的感测光强度。 处理光强度数据集合以确定在每个感测区域的光强度数据中发生预定特征的测量路径的位置，并且增强表示强度数据的图像数据，以便于用户检测到干扰 边缘。
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