SURFACE MEASUREMENT INSTRUMENT AND METHOD
    1.
    发明申请
    SURFACE MEASUREMENT INSTRUMENT AND METHOD 有权
    表面测量仪器和方法

    公开(公告)号:US20110258867A1

    公开(公告)日:2011-10-27

    申请号:US13124547

    申请日:2009-10-15

    IPC分类号: G01B5/00

    摘要: A method of determining a correction parameter for use in effecting alignment of a component of a metrological apparatus in at least one direction is described which includes: positioning an artefact on a support surface of a turntable of the metrological apparatus so that a measurement surface of the artefact is asymmetric with respect to a rotation axis of the turntable in the at least one direction; using a measurement probe of the measurement instrument to make a first measurement of the measurement surface; rotating the turntable; using the measurement probe of the measurement instrument to make a second measurement of the measurement surface after rotation of the turntable; and determining a correction parameter from the first and second measurements.

    摘要翻译: 描述了确定用于在至少一个方向上实现计量装置的部件对准的校正参数的方法,其包括:将人造物定位在计量装置的转台的支撑表面上,使得测量表面 相对于转盘在至少一个方向上的旋转轴线,人造物不对称; 使用测量仪器的测量探头对测量表面进行第一次测量; 旋转转盘; 使用测量仪器的测量探头在旋转后对测量表面进行第二次测量; 以及从所述第一和第二测量确定校正参数。

    Surface measurement instrument and method
    2.
    发明授权
    Surface measurement instrument and method 有权
    表面测量仪器及方法

    公开(公告)号:US08635783B2

    公开(公告)日:2014-01-28

    申请号:US13124547

    申请日:2009-10-15

    IPC分类号: G01B5/004

    摘要: A method of determining a correction parameter for use in effecting alignment of a component of a metrological apparatus in at least one direction is described which includes: positioning an artefact on a support surface of a turntable of the metrological apparatus so that a measurement surface of the artefact is asymmetric with respect to a rotation axis of the turntable in the at least one direction; using a measurement probe of the measurement instrument to make a first measurement of the measurement surface; rotating the turntable; using the measurement probe of the measurement instrument to make a second measurement of the measurement surface after rotation of the turntable; and determining a correction parameter from the first and second measurements.

    摘要翻译: 描述了确定用于在至少一个方向上实现计量装置的部件对准的校正参数的方法,其包括:将人造物定位在计量装置的转台的支撑表面上,使得测量表面 相对于转盘在至少一个方向上的旋转轴线,人造物不对称; 使用测量仪器的测量探头对测量表面进行第一次测量; 旋转转盘; 使用测量仪器的测量探头在旋转后对测量表面进行第二次测量; 以及从所述第一和第二测量确定校正参数。

    Surface measurement instrument and method

    公开(公告)号:US10444000B2

    公开(公告)日:2019-10-15

    申请号:US13504214

    申请日:2010-11-01

    申请人: Paul James Scott

    发明人: Paul James Scott

    IPC分类号: G01B5/28 G01B5/20 G01M11/02

    摘要: A method of characterizing the surface of an aspheric diffractive structure includes using a metrological apparatus to perform a measurement on the surface of the structure so as to provide a measurement profile representing the z-direction deviations of the surface of the structure; determining parameters relating to the aspheric and diffractive components of the aspheric diffractive structure; producing data having the determined parameters; and comparing the produced data with the measurement profile to determine residual error data.

    Calibration of a Metrological apparatus
    4.
    发明授权
    Calibration of a Metrological apparatus 有权
    校准仪器

    公开(公告)号:US07668678B2

    公开(公告)日:2010-02-23

    申请号:US12063963

    申请日:2006-08-16

    申请人: Paul James Scott

    发明人: Paul James Scott

    IPC分类号: G01C17/38

    CPC分类号: G01B21/042

    摘要: A metrological apparatus has a driver (33) that effects relative movement between a support (4) and a measurement probe (8) carriage (7) in a first direction (X) to cause the measurement probe (8) to traverse a measurement path along a surface of an object supported by the support. The measurement probe (8) moves in a second direction (Z) transverse to the first direction as it follows surface characteristics. Respective first and second position transducers (35, 32) provide first and second position data representing the position of the measurement probe in the first and second direction. A calibrator (300) carries out a calibration procedure using measurement data obtained on a surface of known form. The calibrator determines calibration coefficients of an expression relating corrected measurement data and the actual measurement data by using the known form of the reference surface as the corrected measurement data. The calibrator varies the calibration coefficient for Chebychev points until the at least one expression provides a fit to the data.

    摘要翻译: 计量装置具有驱动器(33),其在第一方向(X)上实现支撑件(4)和测量探针(8)滑架(7)之间的相对运动,以使测量探头(8)穿过测量路径 沿着由支撑件支撑的物体的表面。 测量探针(8)沿着与第一方向横向的第二方向(Z)移动,因为它遵循表面特性。 相应的第一和第二位置传感器(35,32)提供表示测量探针在第一和第二方向上的位置的第一和第二位置数据。 校准器(300)使用在已知形式的表面上获得的测量数据来执行校准程序。 校准器通过使用已知形式的参考表面来确定与校正的测量数据和实际测量数据相关联的表达式的校准系数作为校正的测量数据。 校准器改变切比可夫点的校准系数,直到至少一个表达式提供了对数据的拟合。

    Calibration of a Metrological Apparatus
    5.
    发明申请
    Calibration of a Metrological Apparatus 有权
    校准仪器

    公开(公告)号:US20080234963A1

    公开(公告)日:2008-09-25

    申请号:US12063963

    申请日:2006-08-16

    申请人: Paul James Scott

    发明人: Paul James Scott

    IPC分类号: G01D18/00

    CPC分类号: G01B21/042

    摘要: A metrological apparatus has a driver (33) that effects relative movement between a support (4) and a measurement probe (8) carriage (7) in a first direction (X) to cause the measurement probe (8) to traverse a measurement path along a surface of an object supported by the support. The measurement probe (8) moves in a second direction (Z) transverse to the first direction as it follows surface characteristics. Respective first and second position transducers (35, 32) provide first and second position data representing the position of the measurement probe in the first and second direction. A calibrator (300) carries out a calibration procedure using measurement data obtained on a surface of known form. The calibrator determines calibration coefficients of an expression relating corrected measurement data and the actual measurement data by using the known form of the reference surface as the corrected measurement data. The calibrator varies the calibration coefficient for Chebychev points until the at least one expression provides a fit to the data.

    摘要翻译: 计量装置具有驱动器(33),其在第一方向(X)上实现支撑件(4)和测量探针(8)滑架(7)之间的相对运动,以使测量探头(8)穿过测量路径 沿着由支撑件支撑的物体的表面。 测量探针(8)沿着与第一方向横向的第二方向(Z)移动,因为它遵循表面特性。 相应的第一和第二位置传感器(35,32)提供表示测量探针在第一和第二方向上的位置的第一和第二位置数据。 校准器(300)使用在已知形式的表面上获得的测量数据来执行校准程序。 校正器通过使用已知形式的参考表面来确定与校正的测量数据和实际测量数据相关联的表达式的校准系数作为校正的测量数据。 校准器改变切比可夫点的校准系数,直到至少一个表达式提供了对数据的拟合。

    Image processing apparatus and method of processing height data to obtain image data using gradient data calculated for a plurality of different points of a surface and adjusted in accordance with a selected angle of illumination
    6.
    发明授权
    Image processing apparatus and method of processing height data to obtain image data using gradient data calculated for a plurality of different points of a surface and adjusted in accordance with a selected angle of illumination 失效
    图像处理装置和处理高度数据的方法,以使用针对表面的多个不同点计算的梯度数据获得图像数据,并根据所选择的照明角度

    公开(公告)号:US06345107B1

    公开(公告)日:2002-02-05

    申请号:US09453255

    申请日:1999-12-02

    申请人: Paul James Scott

    发明人: Paul James Scott

    IPC分类号: G06K900

    CPC分类号: G06T11/001 G06T17/05

    摘要: An apparatus and method for the processing of height information indicative of the roughness or texture of a surface which may be used to produce an improved two dimensional recording of the surface. The apparatus or method has particular applicability in the field on metrological instruments. In processing the surface information, the apparatus or method takes account not only of the basic height information but also of gradient information. Such gradient information is furthermore adjusted dependent upon a desired angle of illumination which may be selected by the user.

    摘要翻译: 用于处理指示表面的粗糙度或纹理的高度信息的装置和方法,其可用于产生表面的改进的二维记录。 该仪器或方法在计量仪器领域具有特别的适用性。 在处理表面信息时,装置或方法不仅考虑基本高度信息,而且还考虑梯度信息。 进一步根据可由用户选择的期望的照明角度来调整这种梯度信息。

    SURFACE MEASUREMENT INSTRUMENT AND METHOD
    7.
    发明申请
    SURFACE MEASUREMENT INSTRUMENT AND METHOD 审中-公开
    表面测量仪器和方法

    公开(公告)号:US20120278035A1

    公开(公告)日:2012-11-01

    申请号:US13504214

    申请日:2010-11-01

    申请人: Paul James Scott

    发明人: Paul James Scott

    IPC分类号: G06F15/00

    CPC分类号: G01B5/20 G01M11/025

    摘要: A method of characterising the surface of an aspheric diffractive structure includes using a metrological apparatus to perform a measurement on the surface of the structure so as to provide a measurement profile representing the z-direction deviations of the surface of the structure; determining parameters relating to the aspheric and diffractive components of the aspheric diffractive structure; producing data having the determined parameters; and comparing the produced data with the measurement profile to determine residual error data.

    摘要翻译: 表征非球面衍射结构的表面的方法包括使用计量装置对结构的表面进行测量,以便提供表示结构表面的z方向偏差的测量曲线; 确定与非球面衍射结构的非球面和衍射部件相关的参数; 产生具有确定参数的数据; 并将生成的数据与测量轮廓进行比较以确定残差误差数据。

    Surface form measurement
    8.
    发明授权
    Surface form measurement 失效
    表面形状测量

    公开(公告)号:US06327788B1

    公开(公告)日:2001-12-11

    申请号:US09091035

    申请日:1999-01-20

    IPC分类号: G01B314

    CPC分类号: G01B5/201

    摘要: A nominally cylindrical surface of a workpiece is sensed by a stylus displaceable radially of an axis of rotation of the surface relative to a support column defining a reference datum so that the stylus follows the cylindrical surface at a given height along the surface. Relative rotation of the workpiece and the stylus about the axis of rotation of the surface is effected and the displacement of the stylus used to determine information relating to the radial form of the surface at that height. These measurements are represented at different heights along the surface so as to determine its cylindrical form. The displacement of the stylus from a given position on the surface at each height before and after rotation of the stylus and workpiece through 180° are measured and the resulting measurements used to compensate for any error or deviation in the reference datum.

    摘要翻译: 工件的名义上的圆柱形表面通过可从该表面相对于限定参考基准的支撑柱的旋转轴线的径向位移的触针感测,使得触针沿着表面沿给定高度跟随圆柱形表面。 实现工件和触针围绕表面旋转轴线的相对旋转,并且用于确定与该高度处的表面的径向形式相关的信息的触针的位移。 这些测量在表面的不同高度处表示,以便确定其圆柱形。 测量触针从触针和工件旋转180°之前和之后的每个高度处的表面上的给定位置的位移,并且所得到的测量用于补偿参考基准中的任何误差或偏差。

    Roundness measuring
    10.
    发明授权
    Roundness measuring 失效
    圆度测量

    公开(公告)号:US5926781A

    公开(公告)日:1999-07-20

    申请号:US817491

    申请日:1997-05-28

    申请人: Paul James Scott

    发明人: Paul James Scott

    CPC分类号: G01B21/20

    摘要: A roundness measuring machine is described which measures the position of the surface of an object as the object is rotated on a turntable. The machine determines the circle which is the best fit to the measured points and converts the measurements to distances from the best fit circle. An improved algorithm for determining the best fit circle is used in place of the limacon fit. Calculated differences between the measured surface position and the best fit circle are corrected for the effect of measuring the difference in the direction towards the center of rotation of the turntable instead of in the direction towards the center of the circle. Data values are calculated representing points at equal angles around the center of the best fit circle rather than equal angles around the center of rotation of the turntable. The improved accuracy of correction allows the machine to tolerate greater eccentricity of the workplace relative to the turntable, reducing the necessity for accurate centering of the workpiece.

    摘要翻译: PCT No.PCT / GB95 / 02460 Sec。 371日期1997年5月28日 102(e)日期1997年5月28日PCT提交1995年10月18日PCT公布。 出版物WO96 / 12162 日期1996年4月25日描述了一种测量当物体在转台上旋转时物体表面的位置的圆度测量机。 机器确定与测量点最合适的圆,并将测量转换为距离最佳拟合圆的距离。 使用用于确定最佳拟合圆的改进的算法来代替limacon拟合。 对于测量的表面位置和最佳拟合圆之间的计算的差异被校正用于测量朝向转台的旋转中心的方向的差异的效果,而不是朝向圆的中心的方向。 计算数据值,代表围绕最佳拟合圆的中心的相等角度的点,而不是围绕转台旋转中心的相等角度。 校正精度的提高使得机器能容忍工作台相对于转台的较大的偏心度,从而减少了精确对准工件的必要性。