公开(公告)号：US08543353B2

公开(公告)日：2013-09-24

申请号：US13352687

申请日：2012-01-18

申请人： Daniel Ian Mansfield

发明人： Daniel Ian Mansfield

IPC分类号： G01B5/02

CPC分类号： G01B9/02083 ,  G01B9/02057 ,  G01B9/02084 ,  G01B9/0209 ,  G01B11/0675 ,  G01B11/303

摘要： Light reflected by a sample surface region and a reference surface interfere. A detector senses light intensity at intervals during relative movement along a scan path between the sample surface and the reference surface to provide a series of intensity values representing interference fringes. A data processor receives first intensity data including a first series of intensity values resulting from a measurement operation on a surface area of a substrate and second intensity data including a second series of intensity values resulting from a measurement operation on a surface area of a thin film structure. A gain is determined for each thin film of the thin film structure. Substrate and apparent thin film structure surface characteristics are determined on the basis of the first and second intensity data, respectively. The apparent thin film structure surface characteristic is modified using the substrate surface characteristic and the determined gain or gains.

摘要翻译： 由样品表面区域和参考表面反射的光线干涉。 检测器在沿着样品表面和参考表面之间的扫描路径的相对移动期间间隔地感测光强度，以提供表示干涉条纹的一系列强度值。 数据处理器接收第一强度数据，该第一强度数据包括由衬底的表面区域上的测量操作产生的第一系列强度值，以及包括由薄膜表面积上的测量操作产生的第二系列强度值的第二强度数据 结构体。 为薄膜结构的每个薄膜确定增益。 基于第一和第二强度数据确定基板和表观薄膜结构表面特性。 使用基板表面特性和确定的增益或增益来修改表观薄膜结构表面特性。

公开(公告)号：US08239163B2

公开(公告)日：2012-08-07

申请号：US13116541

申请日：2011-05-26

申请人： Daniel Ian Mansfield

发明人： Daniel Ian Mansfield

IPC分类号： G06F15/00 ,  G01B11/02

CPC分类号： G01B9/02084 ,  G01B9/02057 ,  G01B9/02089 ,  G01B9/0209 ,  G01B9/04 ,  Y10T29/49124

摘要： A coherence scanning interferometer carries out: a coherence scanning measurement operation on a surface area using a low numeric aperture objective so that the pitch of the surface structure elements is less that the spread of the point spread function at the surface to obtain structure surface intensity data; and a coherence scanning measurement operation on a non-structure surface area to obtain non-structure surface intensity data. A frequency transform ratio determiner determines a frequency transform ratio related to the ratio between the structure surface intensity data and the non-structure surface intensity data. A structure provider sets that frequency transform ratio equal to an expression representing the electric field at the image plane of the interferometer in terms of surface structure element size (height or depth) and width-to-pitch ratio and derives the surface structure element size and width-to-pitch ratio using the frequency transform ratio.

摘要翻译： 相干扫描干涉仪执行：使用低数值孔径物镜在表面区域上的相干扫描测量操作，使得表面结构元件的间距小于表面处的点扩散函数的扩展以获得结构表面强度数据 ; 以及对非结构表面区域的相干扫描测量操作，以获得非结构表面强度数据。 变频比确定器确定与结构表面强度数据和非结构表面强度数据之间的比率相关的频率变换比。 结构提供者根据表面结构元素尺寸（高度或深度）和宽度与间距比将该变换率设置为等于干涉仪的像面处的电场的表达式，并导出表面结构元件尺寸和 宽度与间距比使用频率变换比。

公开(公告)号：US20120004888A1

公开(公告)日：2012-01-05

申请号：US13116541

申请日：2011-05-26

申请人： Daniel Ian Mansfield

发明人： Daniel Ian Mansfield

IPC分类号： G01B11/02 ,  G01B11/22 ,  G06F15/00 ,  G01B11/24

CPC分类号： G01B9/02084 ,  G01B9/02057 ,  G01B9/02089 ,  G01B9/0209 ,  G01B9/04 ,  Y10T29/49124

摘要： A coherence scanning interferometer carries out: a coherence scanning measurement operation on a surface area using a low numeric aperture objective so that the pitch of the surface structure elements is less that the spread of the point spread function at the surface to obtain structure surface intensity data; and a coherence scanning measurement operation on a non-structure surface area to obtain non-structure surface intensity data. A frequency transform ratio determiner determines a frequency transform ratio related to the ratio between the structure surface intensity data and the non-structure surface intensity data. A structure provider sets that frequency transform ratio equal to an expression representing the electric field at the image plane of the interferometer in terms of surface structure element size (height or depth) and width-to-pitch ratio and derives the surface structure element size and width-to-pitch ratio using the frequency transform ratio.

摘要翻译： 相干扫描干涉仪执行：使用低数值孔径物镜在表面区域上的相干扫描测量操作，使得表面结构元件的间距小于表面处的点扩散函数的扩展以获得结构表面强度数据 ; 以及对非结构表面区域的相干扫描测量操作，以获得非结构表面强度数据。 变频比确定器确定与结构表面强度数据和非结构表面强度数据之间的比率相关的频率变换比。 结构提供者根据表面结构元素尺寸（高度或深度）和宽度与间距比将该变换率设置为等于干涉仪的像面处的电场的表达式，并导出表面结构元件尺寸和 宽度与间距比使用频率变换比。

公开(公告)号：US07877227B2

公开(公告)日：2011-01-25

申请号：US12162728

申请日：2007-02-09

申请人： Ivor McDonnell ,  Andrew Douglas Bankhead ,  Daniel Ian Mansfield

发明人： Ivor McDonnell ,  Andrew Douglas Bankhead ,  Daniel Ian Mansfield

IPC分类号： G01B11/24

CPC分类号： G01B11/303 ,  G01B9/02057 ,  G01B9/0209 ,  G01B2290/65

摘要： A surface measurement instrument (1) for obtaining surface characteristic data of a sample surface (13) is described. Relative movement between a reference surface (11) and a sample support (15) is caused to occur while a sensor (16) senses light intensity at intervals along a scan path (SP) to provide a series of intensity values representing interference fringes produced by a region of a sample surface (13) during said relative movement and from which series of intensity values surface characteristic data can be derived. The sample support (15) is both translatable and tiltable in at least one direction perpendicular to a scan direction so that the sample support (15) can be both tilted to cause the scan path (SP) to be normal to the sample surface region and translated to compensate for translation movement due to the tilting.

摘要翻译： 描述了用于获得样品表面（13）的表面特性数据的表面测量仪器（1）。 当传感器（16）沿着扫描路径（SP）以间隔感测光强度时，引起参考表面（11）和样品支架（15）之间的相对运动，以提供一系列强度值，表示由 在所述相对移动期间的样品表面（13）的区域，并且可以从其导出一系列强度值表面特征数据。 样品支撑件（15）在垂直于扫描方向的至少一个方向上是可平移的和可倾斜的，使得样品支撑件（15）可以倾斜以使得扫描路径（SP）垂直于样品表面区域，并且 翻译为补偿由于倾斜引起的翻译运动。

公开(公告)号：US07697726B2

公开(公告)日：2010-04-13

申请号：US11260072

申请日：2005-10-26

申请人： Daniel Ian Mansfield ,  Andrew Douglas Bankhead

发明人： Daniel Ian Mansfield ,  Andrew Douglas Bankhead

IPC分类号： G06K9/00

CPC分类号： G01B11/2441

摘要： An interferometer system (2) directs light along a sample path (SP) towards a sample surface (7) and along a reference path (RP) towards a reference surface (6). Light reflected by a sample surface region and by the reference surface interfere. Sensing elements (SE) sense interference fringes at intervals along a scan path to provide a set of intensity data. A coherence peak position determiner (201) determines from the intensity data set a position on the scan path that corresponds to the height of the surface region. An amplitude determiner (202) determines amplitude data representing the amplitude of the intensity data at the determined height position. A modified surface height calculator (207) calculates modified height data by modifying the height data by a correction factor determined using the corresponding amplitude data and a correction parameter provided by a correction parameter provider (260).

摘要翻译： 干涉仪系统（2）沿着样本路径（SP）将光沿着参考路径（RP）朝向参考表面（6）引导到样本表面（7）并沿着参考路径（RP）。 由样品表面区域和参考面反射的光线干涉。 感测元件（SE）沿着扫描路径间隔地感测干涉条纹以提供一组强度数据。 相干峰位置确定器（201）根据强度数据设置与扫描路径上对应于表面区域的高度的位置。 振幅确定器（202）确定表示所确定的高度位置处的强度数据的振幅的振幅数据。 经修改的表面高度计算器（207）通过使用由对应的幅度数据确定的校正因子和由校正参数提供者（260）提供的校正参数来修改高度数据来计算修改的高度数据。

公开(公告)号：US20120176624A1

公开(公告)日：2012-07-12

申请号：US13352687

申请日：2012-01-18

申请人： Daniel Ian Mansfield

发明人： Daniel Ian Mansfield

IPC分类号： G01B11/24

CPC分类号： G01B9/02083 ,  G01B9/02057 ,  G01B9/02084 ,  G01B9/0209 ,  G01B11/0675 ,  G01B11/303

摘要： Light reflected by a sample surface region and a reference surface interfere. A detector senses light intensity at intervals during relative movement along a scan path between the sample surface and the reference surface to provide a series of intensity values representing interference fringes. A data processor receives first intensity data comprising a first series of intensity values resulting from a measurement operation on a surface area of a substrate and second intensity data comprising a second series of intensity values resulting from a measurement operation on a surface area of a thin film structure. A gain is determined for each thin film of the thin film structure. Substrate and apparent thin film structure surface characteristics are determined on the basis of the first and second intensity data, respectively. The apparent thin film structure surface characteristic is modified using the substrate surface characteristic and the determined gain or gains.

摘要翻译： 由样品表面区域和参考表面反射的光线干涉。 检测器在沿着样品表面和参考表面之间的扫描路径的相对移动期间间隔地感测光强度，以提供表示干涉条纹的一系列强度值。 数据处理器接收包括由衬底的表面区域上的测量操作产生的第一系列强度值的第一强度数据和包括由薄膜表面积上的测量操作产生的第二系列强度值的第二强度数据 结构体。 为薄膜结构的每个薄膜确定增益。 基于第一和第二强度数据确定基板和表观薄膜结构表面特性。 使用基板表面特性和确定的增益或增益来修改表观薄膜结构表面特性。

公开(公告)号：US08112246B2

公开(公告)日：2012-02-07

申请号：US12158903

申请日：2006-12-15

申请人： Daniel Ian Mansfield

发明人： Daniel Ian Mansfield

IPC分类号： G01B5/02

CPC分类号： G01B9/02083 ,  G01B9/02057 ,  G01B9/02084 ,  G01B9/0209 ,  G01B11/0675 ,  G01B11/303

摘要： Light reflected by a sample surface region and a reference surface interfere. A detector senses light intensity at intervals during relative movement along a scan path between the sample surface and the reference surface to provide a series of intensity values representing interference fringes. A data processor receives first intensity data comprising a first series of intensity values resulting from a measurement operation on a surface area of a substrate and second intensity data including a second series of intensity values resulting from a measurement operation on a surface area of a thin film structure. A gain is determined for each thin film of the thin film structure. Substrate and apparent thin film structure surface characteristics are determined on the basis of the first and second intensity data, respectively. The apparent thin film structure surface characteristic is modified using the substrate surface characteristic and the determined gain or gains.

摘要翻译： 由样品表面区域和参考表面反射的光线干涉。 检测器在沿着样品表面和参考表面之间的扫描路径的相对移动期间间隔地感测光强度，以提供表示干涉条纹的一系列强度值。 数据处理器接收第一强度数据，该第一强度数据包括由衬底的表面区域上的测量操作产生的第一系列强度值和包括由薄膜表面积上的测量操作产生的第二系列强度值的第二强度数据 结构体。 为薄膜结构的每个薄膜确定增益。 基于第一和第二强度数据确定基板和表观薄膜结构表面特性。 使用基板表面特性和确定的增益或增益来修改表观薄膜结构表面特性。

公开(公告)号：US07970579B2

公开(公告)日：2011-06-28

申请号：US12094733

申请日：2006-11-22

申请人： Daniel Ian Mansfield

发明人： Daniel Ian Mansfield

IPC分类号： G06F15/00 ,  G01B11/24

CPC分类号： G01B9/02084 ,  G01B9/02057 ,  G01B9/02089 ,  G01B9/0209 ,  G01B9/04 ,  Y10T29/49124

摘要： A coherence scanning interferometer (2) carries out: a coherence scanning measurement operation on a surface area (81) carrying a structure using a low numeric aperture objective so that the pitch of the surface structure elements (82) is much less that the spread of the point spread function at the surface (7) to obtain structure surface intensity data; and a coherence scanning measurement operation on a non-structure surface area (83), which may be part of the same sample or a different sample, to obtain non-structure surface intensity data. A frequency transform ratio determiner (105) determines a frequency transform ratio (the HCF function) related to the ratio between the structure surface intensity data and the non-structure surface intensity data. A structure provider (109) sets that frequency transform ratio equal to an expression which represents the electric field at the image plane of the coherence scanning interferometer in terms of surface structure element size (height or depth) and width-to-pitch ratio and derives the surface structure element size and width-to-pitch ratio using the frequency transform ratio. The structure provider (109) may also extract the surface structure element width, if the pitch is independently known.

摘要翻译： 相干扫描干涉仪（2）执行：在表面区域（81）上进行相干扫描测量操作，所述表面区域承载使用低数值孔径物镜的结构，使得表面结构元件（82）的间距远小于 表面上的点扩散函数（7）获得结构表面强度数据; 以及可以是相同样品或不同样品的一部分的非结构表面积（83）上的相干扫描测量操作，以获得非结构表面强度数据。 变频比确定器（105）确定与结构表面强度数据和非结构表面强度数据之间的比率相关的频率变换比（HCF功能）。 结构提供者（109）根据表面结构元素尺寸（高度或深度）和宽度与间距比来设置该频率变换比等于相干扫描干涉仪的像平面处的电场的表达式，并导出 使用频率变换比的表面结构元件尺寸和宽度与间距比。 如果间距是独立已知的，结构提供者（109）也可以提取表面结构元素宽度。

公开(公告)号：US20100161273A1

公开(公告)日：2010-06-24

申请号：US12094733

申请日：2006-11-22

申请人： Daniel Ian Mansfield

发明人： Daniel Ian Mansfield

IPC分类号： G01B11/24 ,  G06F15/00 ,  G01B9/02 ,  H05K3/00

CPC分类号： G01B9/02084 ,  G01B9/02057 ,  G01B9/02089 ,  G01B9/0209 ,  G01B9/04 ,  Y10T29/49124

摘要： A coherence scanning interferometer (2) carries out: a coherence scanning measurement operation on a surface area (81) carrying a structure using a low numeric aperture objective so that the pitch of the surface structure elements (82) is much less that the spread of the point spread function at the surface (7) to obtain structure surface intensity data; and a coherence scanning measurement operation on a non-structure surface area (83), which may be part of the same sample or a different sample, to obtain non-structure surface intensity data. A frequency transform ratio determiner (105) determines a frequency transform ratio (the HCF function) related to the ratio between the structure surface intensity data and the non-structure surface intensity data. A structure provider (109) sets that frequency transform ratio equal to an expression which represents the electric field at the image plane of the coherence scanning interferometer in terms of surface structure element size (height or depth) and width-to-pitch ratio and derives the surface structure element size and width-to-pitch ratio using the frequency transform ratio. The structure provider (109) may also extract the surface structure element width, if the pitch is independently known.

摘要翻译： 相干扫描干涉仪（2）执行：在表面区域（81）上进行相干扫描测量操作，所述表面区域承载使用低数值孔径物镜的结构，使得表面结构元件（82）的间距远小于 表面上的点扩散函数（7）获得结构表面强度数据; 以及可以是相同样品或不同样品的一部分的非结构表面积（83）上的相干扫描测量操作，以获得非结构表面强度数据。 变频比确定器（105）确定与结构表面强度数据和非结构表面强度数据之间的比率相关的频率变换比（HCF功能）。 结构提供者（109）根据表面结构元素尺寸（高度或深度）和宽度与间距比来设置该频率变换比等于相干扫描干涉仪的像平面处的电场的表达式，并导出 使用频率变换比的表面结构元件尺寸和宽度与间距比。 如果间距是独立已知的，结构提供者（109）也可以提取表面结构元素宽度。

公开(公告)号：US20090319225A1

公开(公告)日：2009-12-24

申请号：US12158903

申请日：2006-12-15

申请人： Daniel Ian Mansfield

发明人： Daniel Ian Mansfield

IPC分类号： G01B11/06

CPC分类号： G01B9/02083 ,  G01B9/02057 ,  G01B9/02084 ,  G01B9/0209 ,  G01B11/0675 ,  G01B11/303

摘要： Light from a light source (4) is directed along a sample path (SP) towards a region of a sample surface (7) and along a reference path (RP) towards a reference surface (6) such that light reflected by the region of the sample surface and light reflected by the reference surface interfere. A mover (11) effects relative movement along a scan path between the sample surface (7) and the reference surface (6). A detector (10) senses light intensity at intervals to provide a series of intensity values representing interference fringes produced by a region of a sample surface. A data processor (32) receives first intensity data comprising a first series of intensity values resulting from a measurement operation on a surface area of a substrate and second intensity data comprising at least a second series of intensity values resulting from a measurement operation on a surface area of a thin film structure. The data processor (32) has a gain determiner (100) that determines a gain for the or each thin film of a thin film structure and a surface characteristic determiner (101) that determines a substrate surface characteristic on the basis of the first intensity data, that determines an apparent thin film structure surface characteristic on the basis of the second intensity data, and that modifies the apparent thin film structure surface characteristic using the substrate surface characteristic and the gain or gains determined by the gain determiner.

摘要翻译： 来自光源（4）的光沿着样品路径（SP）朝向样品表面（7）的区域并沿着参考路径（RP）朝向参考表面（6）引导，使得由 样品表面和参考面反射的光线会干扰。 移动器（11）沿着样品表面（7）和参考表面（6）之间的扫描路径实现相对运动。 检测器（10）间隔地感测光强度以提供一系列表示由样品表面的区域产生的干涉条纹的强度值。 数据处理器（32）接收第一强度数据，该第一强度数据包括由衬底的表面区域上的测量操作产生的第一系列强度值和包括由表面上的测量操作产生的至少第二系列强度值的第二强度数据 薄膜结构区域。 数据处理器（32）具有确定薄膜结构的每个薄膜的增益的增益确定器（100）和基于第一强度数据确定衬底表面特性的表面特性确定器（101） ，其基于第二强度数据确定表观薄膜结构表面特性，并且使用基板表面特性和由增益确定器确定的增益或增益来修改表观薄膜结构表面特性。