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18 条记录 (耗时 0.017 秒)

    CMOS integrated micromechanical resonators and methods for fabricating the same
    11.
    发明授权
    CMOS integrated micromechanical resonators and methods for fabricating the same 有权
    CMOS集成微机械谐振器及其制造方法

    公开(公告)号：US08704315B2

    公开(公告)日：2014-04-22

    申请号：US13000650

    申请日：2009-06-26

    申请人： Jeevak M. Parpia ,  Harold G. Craighead ,  Joshua D. Cross ,  Bojan Robert Ilic ,  Maxim K. Zalalutdinov ,  Jeffrey W. Baldwin ,  Brian H. Houston

    发明人： Jeevak M. Parpia ,  Harold G. Craighead ,  Joshua D. Cross ,  Bojan Robert Ilic ,  Maxim K. Zalalutdinov ,  Jeffrey W. Baldwin ,  Brian H. Houston

    IPC分类号： H01L29/82

    CPC分类号： B81C1/00246 ,  B81B2201/0271 ,  Y10T29/49007

    摘要： The present invention is directed to a CMOS integrated micromechanical device fabricated in accordance with a standard CMOS foundry fabrication process. The standard CMOS foundry fabrication process is characterized by a predetermined layer map and a predetermined set of fabrication rules. The device includes a semiconductor substrate formed or provided in accordance with the predetermined layer map and the predetermined set of fabrication rules. A MEMS resonator device is fabricated in accordance with the predetermined layer map and the predetermined set of fabrication rules. The MEMS resonator device includes a micromechanical resonator structure having a surface area greater than or equal to approximately 20 square microns. At least one CMOS circuit is coupled to the MEMS resonator member. The at least one CMOS circuit is also fabricated in accordance with the predetermined layer map and the predetermined set of fabrication rules.

    摘要翻译： 本发明涉及根据标准CMOS铸造制造工艺制造的CMOS集成微机械装置。 标准CMOS铸造制造工艺的特征在于预定的层图和预定的制造规则集合。 该器件包括根据预定层图形成或提供的半导体衬底以及预定的一组制造规则。 根据预定层图和预定的制造规则集合制造MEMS谐振器装置。 MEMS谐振器装置包括具有大于或等于约20平方微米的表面积的微机械谐振器结构。 至少一个CMOS电路耦合到MEMS谐振器构件。 至少一个CMOS电路也是根据预定的层映射和预定的一组制造规则制造的。

    MEMS CONTROLLED OSCILLATOR
    14.
    发明申请
    MEMS CONTROLLED OSCILLATOR 有权
    MEMS控制振荡器

    公开(公告)号：US20110043405A1

    公开(公告)日：2011-02-24

    申请号：US12938126

    申请日：2010-11-02

    申请人： Robert B. Reichenbach ,  Keith Aubin ,  Maxim Zalalutdinov ,  Jeevak M. Parpia ,  Harold G. Craighead

    发明人： Robert B. Reichenbach ,  Keith Aubin ,  Maxim Zalalutdinov ,  Jeevak M. Parpia ,  Harold G. Craighead

    IPC分类号： H01Q3/00

    CPC分类号： H03H9/02401 ,  G01S7/032 ,  H01Q3/26 ,  H03H3/0072 ,  H03H9/2436

    摘要： An array of micromechanical oscillators have different resonant frequencies based on their geometries. In one embodiment, a micromechanical oscillator has a resonant frequency defined by an effective spring constant that is modified by application of heat. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated to modify the resonant frequency (or equivalently the spring constant or stiffness) of the disc. Continuous control of the output phase and frequency may be achieved when the oscillator becomes synchronized with an imposed sinusoidal force of close frequency. The oscillator frequency can be detuned to produce an easily controlled phase differential between the injected signal and the oscillator feedback. A phased array radar may be produced using independent phase controllable oscillators.

    摘要翻译： 微机械振荡器阵列根据其几何形状具有不同的谐振频率。 在一个实施例中，微机械振荡器具有由通过施加热来修改的有效弹簧常数限定的谐振频率。 在一个实施例中，振荡器是由比该盘小得多的直径支柱支撑的材料盘。 加热盘的周边以改变盘的共振频率（或等效地为弹簧常数或刚度）。 当振荡器与施加的接近频率的正弦力同步时，可以实现输出相位和频率的连续控制。 振荡器频率可以失谐，以在注入的信号和振荡器反馈之间产生容易控制的相位差。 可以使用独立的相位可控振荡器来产生相控阵雷达。

    STRESS-BASED SENSOR, METHOD, AND APPLICATIONS
    16.
    发明申请
    STRESS-BASED SENSOR, METHOD, AND APPLICATIONS 有权
    基于应力的传感器，方法和应用

    公开(公告)号：US20130118228A1

    公开(公告)日：2013-05-16

    申请号：US13637861

    申请日：2011-03-31

    申请人： Jeevak M. Parpia ,  Harold G. Craighead ,  Darren R. Southworth ,  Leon M. Bellan

    发明人： Jeevak M. Parpia ,  Harold G. Craighead ,  Darren R. Southworth ,  Leon M. Bellan

    IPC分类号： G01N33/497

    CPC分类号： G01N33/497 ,  G01N29/022

    摘要： A composite, analyte sensor includes a substrate; a micro- or nano-electro-mechanical (MEMS; NEMS) resonator that is coupled to the substrate at least two edge locations (i.e., it is at least doubly-clamped) of the resonator, wherein the resonator is in a statically-buckled state near a buckling transition point of the resonator; and a chemically-responsive substance covering at least a portion of the surface of the resonator that will undergo a conformational change upon exposure to a given analyte. The resonator may be a double-clamped, statically-buckled beam (or bridge), a multiply-clamped, statically-buckled dome (or crater), or other resonator geometry. The sensor may include two or more at least double-clamped, statically-buckled, composite MEMS or NEMS resonators each operating near a buckling transition point of the respective resonator, and each characterized by a different resonant frequency. A method for sensing an analyte in ambient air.

    摘要翻译： 复合分析物传感器包括基底; 谐振器的至少两个边缘位置（即，它至少被双钳位）耦合到衬底的微机械或纳米机电（MEMS; NEMS）谐振器，其中所述谐振器处于静态弯曲 在谐振器的屈曲转变点附近; 以及覆盖谐振器表面的至少一部分的化学响应物质，其在暴露于给定的分析物时将经历构象变化。 谐振器可以是双夹紧，静态弯曲梁（或桥），多夹紧，静态弯曲的圆顶（或火山口）或其他谐振器几何形状。 传感器可以包括两个或更多个至少双夹紧，静态弯曲的复合MEMS或NEMS谐振器，每个谐振器在相应谐振器的屈曲转变点附近操作，并且每个谐振器的特征在于不同的谐振频率。 用于感测环境空气中的分析物的方法。

    Heat pumped parametric MEMS device
    18.
    发明授权
    Heat pumped parametric MEMS device 有权
    热泵参数MEMS器件

    公开(公告)号：US07654140B2

    公开(公告)日：2010-02-02

    申请号：US10097178

    申请日：2002-03-12

    申请人： Maxim Zalalutdinov ,  Anatoli Olkhovets ,  Alan T. Zehnder ,  Bojan Ilic ,  David Alan Czaplewski ,  Lidija Sekaric ,  Jeevak M. Parpia ,  Harold G. Craighead

    发明人： Maxim Zalalutdinov ,  Anatoli Olkhovets ,  Alan T. Zehnder ,  Bojan Ilic ,  David Alan Czaplewski ,  Lidija Sekaric ,  Jeevak M. Parpia ,  Harold G. Craighead

    IPC分类号： G01N29/12

    CPC分类号： H02N1/006

    摘要： A micro-electrical mechanical oscillator has a resonant frequency of oscillation that is varied by application of heat. The resonant frequency is varied at a frequency different from the resonant frequency of the oscillator to amplify oscillations. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated by a laser to provide a time varying shift of the resonant frequency (or equivalently the stiffness) of the disc. Feedback from movement of the disc is used to modulate the intensity of the laser, and thus the stiffness of the disc to provide parametric amplification of sensed vibrations, using heating as a pump. Various other shapes of micro-electrical mechanical oscillators are used in other embodiment, including an array of such oscillators on a substrate, each having different resonant frequencies.

    摘要翻译： 微电机械振荡器具有通过施加热量而变化的振荡的谐振频率。 谐振频率以与振荡器的谐振频率不同的频率变化以放大振荡。 在一个实施例中，振荡器是由比该盘小得多的直径支柱支撑的材料盘。 盘的周边被激光加热，以提供盘的共振频率（或等效的刚度）的时变位移。 使用盘的运动的反馈来调制激光的强度，并因此调节光盘的刚度，以使用加热作为泵来提供所感测的振动的参数放大。 在另一实施例中使用各种其他形状的微电机械振荡器，包括在衬底上的每个具有不同谐振频率的这种振荡器的阵列。