公开(公告)号：US20080310058A1

公开(公告)日：2008-12-18

申请号：US11763721

申请日：2007-06-15

Applicant: William James Premerlani ,  Joshua Isaac Wright ,  Kanakasabapathi Subramanian ,  John Norton Park

Inventor： William James Premerlani ,  Joshua Isaac Wright ,  Kanakasabapathi Subramanian ,  John Norton Park

IPC: H02H3/08

CPC classification number: H01H83/20 ,  H01H9/42 ,  H01H9/50 ,  H01H9/541 ,  H01H9/56 ,  H01H59/0009 ,  H01H2071/008 ,  H01H2083/201

Abstract: The present invention comprises MEMS enabled apparatus for the detection of arc-faults and the elimination of arc-flash conditions. The apparatus comprises an arc-flash detection component and a current limiting component. The current limiting component comprises a logic circuit in communication with the user interface, an MEMS protection circuit in communication with the logic circuit, and a switching circuit in communication with the MEMS protection circuit. The switching circuit comprises a plurality of micro-electromechanical system switching devices and a voltage limiting device, wherein the voltage limiting device is configured to prevent an over voltage event during a current limiting operation.

Abstract translation: 本发明包括用于检测电弧故障和消除电弧闪光条件的MEMS启用装置。 该装置包括电弧闪光检测部件和限流部件。 电流限制部件包括与用户接口通信的逻辑电路，与逻辑电路通信的MEMS保护电路，以及与MEMS保护电路通信的开关电路。 开关电路包括多个微机电系统开关装置和电压限制装置，其中所述电压限制装置被配置为在限流操作期间防止过电压事件。

公开(公告)号：US20080211347A1

公开(公告)日：2008-09-04

申请号：US11681205

申请日：2007-03-02

Applicant: Joshua Isaac Wright ,  Kanakasabapathi Subramanian ,  Nicole Christine Reeves ,  John Norton Park

Inventor： Joshua Isaac Wright ,  Kanakasabapathi Subramanian ,  Nicole Christine Reeves ,  John Norton Park

IPC: H01L41/107

CPC classification number: H01H59/0009 ,  H01H1/0036 ,  H01H2071/008

Abstract: A circuit for controlling operation of a load. In one example, a MEMS switch is positioned in the circuit to place the load in one of a conducting state or a nonconducting state. A piezoelectric transformer provides a relatively high voltage output signal or a relatively low voltage output signal to control movement of the switch between a closed position, placing the load in the conducting state, and an open position. The high voltage output signal includes a frequency component in the resonant frequency range of the transformer. Control circuitry provides an input voltage signal to the piezoelectric transformer to provide the high voltage output signal or the low voltage output signal at the output terminals of the piezoelectric transformer.

Abstract translation: 用于控制负载运行的电路。 在一个示例中，MEMS开关位于电路中以将负载置于导通状态或非导通状态之一。 压电变压器提供相对较高的电压输出信号或相对低电压的输出信号，以控制开关在将负载置于导通状态的关闭位置和打开位置之间的移动。 高压输出信号包括变压器谐振频率范围内的频率分量。 控制电路向压电变压器提供输入电压信号，以在压电变压器的输出端提供高压输出信号或低压输出信号。

公开(公告)号：US07365437B2

公开(公告)日：2008-04-29

申请号：US11337249

申请日：2006-01-23

Applicant: Kanakasabapathi Subramanian ,  Jeffrey Bernard Fortin ,  Wei-Cheng Tian

Inventor： Kanakasabapathi Subramanian ,  Jeffrey Bernard Fortin ,  Wei-Cheng Tian

IPC: H01L29/40

CPC classification number: H01L21/30617 ,  H01L21/76898 ,  H01L23/481 ,  H01L2223/54453 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for forming smooth walled, prismatically-profiled through-wafer vias and articles formed through the method. An etch stop material is provided on a wafer, which may be a silicon wafer. A mask material is provided on the etch stop material and patterned in such a way as to lead to the formation of vias that have at least one pair of opposing side walls that run parallel to a plane in the wafer. A wet etchant, such as potassium hydroxide, is used to etch vias in the wafer. The use of a wet etchant leads to the formation of smooth side walls. This method allows an aspect ratio of height versus width of the vias of greater than 75 to 1.

Abstract translation: 用于形成通过该方法形成的平滑壁，棱镜通孔晶片通孔和制品的方法。 在晶片上提供蚀刻停止材料，晶片可以是<110>硅晶片。 在蚀刻停止材料上提供掩模材料，并以这样的方式图案化，以便导致形成通孔，其具有平行于晶片中的111平面延伸的至少一对相对的侧壁。 使用诸如氢氧化钾的湿蚀刻剂来蚀刻晶片中的通孔。 使用湿蚀刻剂导致形成平滑的侧壁。 该方法允许通孔的高度与宽度的长宽比大于75至1。

公开(公告)号：US20070139830A1

公开(公告)日：2007-06-21

申请号：US11314879

申请日：2005-12-20

Applicant: William Premerlani ,  Kanakasabapathi Subramanian ,  Christopher Keimel ,  John Park ,  Ajit Achuthan ,  Wensen Wang ,  Joshua Wright ,  Kristina Korosi ,  Somashekhar Basavaraj

Inventor： William Premerlani ,  Kanakasabapathi Subramanian ,  Christopher Keimel ,  John Park ,  Ajit Achuthan ,  Wensen Wang ,  Joshua Wright ,  Kristina Korosi ,  Somashekhar Basavaraj

IPC: H02H3/00

CPC classification number: H02H3/025 ,  H01H1/0036 ,  H01H9/40 ,  H01H9/54 ,  H01H9/56 ,  H01H2071/008

Abstract: A system is presented. The system includes detection circuitry configured to detect occurrence of a zero crossing of an alternating source voltage or an alternating load current. The system also includes switching circuitry coupled to the detection circuitry and comprising a micro-electromechanical system switch. Additionally, the system includes control circuitry coupled to the detection circuitry and the switching circuitry and configured to perform arc-less switching of the micro-electromechanical system switch responsive to a detected zero crossing of an alternating source voltage or alternating load current.

Abstract translation: 提出了一个系统。 该系统包括被配置为检测交流源电压或交流负载电流的零交叉的发生的检测电路。 该系统还包括耦合到检测电路并包括微机电系统开关的开关电路。 另外，该系统包括耦合到检测电路和开关电路的控制电路，并被配置为响应于检测到的交流源电压或交流负载电流的过零点而执行微机电系统开关的无弧切换。

公开(公告)号：US20070000330A1

公开(公告)日：2007-01-04

申请号：US11516237

申请日：2006-09-06

Applicant: Steven Tysoe ,  Mark D'Evelyn ,  Charles Becker ,  Abasifreke Ebong ,  Stephen Arthur ,  Steven LeBoeuf ,  Robert Wojnarowski ,  Samhita Dasgupta ,  Vinayak Tilak ,  Kanakasabapathi Subramanian ,  Jeffrey Fortin

Inventor： Steven Tysoe ,  Mark D'Evelyn ,  Charles Becker ,  Abasifreke Ebong ,  Stephen Arthur ,  Steven LeBoeuf ,  Robert Wojnarowski ,  Samhita Dasgupta ,  Vinayak Tilak ,  Kanakasabapathi Subramanian ,  Jeffrey Fortin

IPC: G01L7/00

CPC classification number: H01L21/31111

Abstract: A pressure sensor is provided. The pressure sensor includes a multi-layer laminate comprising a substrate and a semiconductor layer, wherein the substrate comprises single crystal or quasi-single crystal aluminum oxide, and a portion of the substrate that is spaced from a peripheral edge is wet etched to form an inwardly facing sidewall that defines a volume; and a substrate to which the multi-layer laminate is secured. The volume is an enclosed volume further defined by a substrate surface.

Abstract translation: 提供压力传感器。 压力传感器包括多层层压体，其包括基底和半导体层，其中基底包括单晶或准单晶氧化铝，并且与周边边缘间隔开的部分基底被湿蚀刻以形成 限定体积的面向内的侧壁; 以及固定有多层层叠体的基板。 体积是由衬底表面进一步限定的封闭体积。

公开(公告)号：US20060118920A1

公开(公告)日：2006-06-08

申请号：US11337249

申请日：2006-01-23

Applicant: Kanakasabapathi Subramanian ,  Jeffrey Fortin ,  Wei-Cheng Tian

Inventor： Kanakasabapathi Subramanian ,  Jeffrey Fortin ,  Wei-Cheng Tian

IPC: H01L29/04 ,  H01L23/48 ,  H01L29/06

CPC classification number: H01L21/30617 ,  H01L21/76898 ,  H01L23/481 ,  H01L2223/54453 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for forming smooth walled, prismatically-profiled through-wafer vias and articles formed through the method. An etch stop material is provided on a wafer, which may be a silicon wafer. A mask material is provided on the etch stop material and patterned in such a way as to lead to the formation of vias that have at least one pair of opposing side walls that run parallel to a plane in the wafer. A wet etchant, such as potassium hydroxide, is used to etch vias in the wafer. The use of a wet etchant leads to the formation of smooth side walls. This method allows an aspect ratio of height versus width of the vias of greater than 75 to 1.

公开(公告)号：US20050199069A1

公开(公告)日：2005-09-15

申请号：US10799053

申请日：2004-03-12

Applicant: Jeffrey Fortin ,  Kuna Kishore ,  Kanakasabapathi Subramanian

Inventor： Jeffrey Fortin ,  Kuna Kishore ,  Kanakasabapathi Subramanian

IPC: G01L1/14 ,  G01L9/00 ,  G01M9/00

CPC classification number: G01L1/148 ,  G01L9/0073

Abstract: According to some embodiments, an apparatus includes a substrate that defines a plane. The apparatus also includes a first conducting plate that is substantially normal to the substrate and a second conducting plate that is (i) substantially normal to the substrate and (ii) deformable in response to a pressure.

Abstract translation: 根据一些实施例，一种装置包括限定平面的基板。 该设备还包括基本上垂直于衬底的第一导电板和第二导电板，其是（i）基本上垂直于衬底和（ii）响应于压力而变形的。

公开(公告)号：US09076607B2

公开(公告)日：2015-07-07

申请号：US11866849

申请日：2007-10-03

Applicant: William James Premerlani ,  Kanakasabapathi Subramanian ,  Kathleen Ann O'Brien ,  John Norton Park ,  Owen Jannis Schelenz ,  Maja Harfman Todorovic

Inventor： William James Premerlani ,  Kanakasabapathi Subramanian ,  Kathleen Ann O'Brien ,  John Norton Park ,  Owen Jannis Schelenz ,  Maja Harfman Todorovic

IPC: H01H1/36 ,  H01H9/54 ,  H01H1/00 ,  H01H59/00 ,  H01H71/00

CPC classification number: H01H9/54 ,  H01H1/0036 ,  H01H9/541 ,  H01H9/542 ,  H01H59/0009 ,  H01H2071/008

Abstract: A system that includes micro-electromechanical system switching circuitry is provided. The system may include a first over-current protection circuitry connected in a parallel circuit with the micro-electromechanical system switching circuitry for suppressing a voltage level across contacts of the micro-electromechanical system switching circuitry during a first switching event, such as a turn-on event. The system may further include a second over-current protection circuitry connected in a parallel circuit with the micro-electromechanical system switching circuitry for suppressing a current flow through the contacts of the micro-electromechanical system switching circuitry during a second switching event, such as a turn-off event.

Abstract translation: 提供了一种包括微机电系统切换电路的系统。 该系统可以包括与并联电路连接的微机电系统开关电路的第一过电流保护电路，用于在第一切换事件期间抑制微机电系统开关电路的触点之间的电压电平， 事件。 该系统还可以包括与微机电系统开关电路并联连接的第二过电流保护电路，用于在第二切换事件期间抑制通过微机电系统开关电路的触点的电流，例如 关闭事件。

公开(公告)号：US08916995B2

公开(公告)日：2014-12-23

申请号：US12629309

申请日：2009-12-02

Applicant: Lincoln Mamoru Fujita ,  Kanakasabapathi Subramanian

Inventor： Lincoln Mamoru Fujita ,  Kanakasabapathi Subramanian

IPC: H02H3/00 ,  G01D4/00 ,  H01H1/00 ,  H01H59/00

CPC classification number: G01D4/004 ,  H01H1/0036 ,  H01H59/0009 ,  Y02B90/242 ,  Y02B90/244 ,  Y04S20/322 ,  Y04S20/327 ,  Y10T307/74 ,  Y10T307/832 ,  Y10T307/865

Abstract: A current control device is described. The current control device includes at least one line socket configured to couple to a first power system. The current control device also includes at least one load socket configured to couple to a second power system and at least one micro-electromechanical system (MEMS) switching device coupled between the at least one line socket and the at least one load socket. The at least one MEMS switching device is configured to selectably couple the first power system to the second power system.

Abstract translation: 描述电流控制装置。 电流控制装置包括配置成耦合到第一电力系统的至少一个线路插座。 电流控制装置还包括配置成耦合到第二电力系统的至少一个负载插座和耦合在所述至少一个线路插座和所述至少一个负载插座之间的至少一个微机电系统（MEMS）开关装置。 所述至少一个MEMS开关装置被配置为将所述第一电力系统可选择地耦合到所述第二电力系统。

公开(公告)号：US08610519B2

公开(公告)日：2013-12-17

申请号：US11961737

申请日：2007-12-20

Applicant: Christopher Fred Keimel ,  Xuefeng Wang ,  Marco Francesco Aimi ,  Kanakasabapathi Subramanian

Inventor： Christopher Fred Keimel ,  Xuefeng Wang ,  Marco Francesco Aimi ,  Kanakasabapathi Subramanian

IPC: H01H51/22

CPC classification number: H01H59/0009 ,  H01H9/40 ,  H01H2001/0084 ,  H01H2057/006

Abstract: In accordance with one aspect of the present invention, a MEMS switch is provided. The MEMS switch includes a substrate, a first and a second actuating element electrically coupled together, an anchor mechanically coupled to the substrate and supporting at least one of the first and second actuating elements, and a gate driver configured to actuate the first and second actuating elements.

Abstract translation: 根据本发明的一个方面，提供一种MEMS开关。 MEMS开关包括基板，电耦合在一起的第一和第二致动元件，机械耦合到基板并支撑第一和第二致动元件中的至少一个的锚固件，以及配置成致动第一和第二致动元件的栅极驱动器 元素。