-
公开(公告)号：US20060289386A1
公开(公告)日：2006-12-28
申请号：US11167719
申请日：2005-06-27
申请人： Steven Tysoe , Steven LeBoeuf , Mark D'Evelyn , Venkat Venkataramani , Vinayak Tilak , Jeffrey Fortin , Charles Becker , Stephen Arthur , Samhita Dasgupta , Kanakasabapathi Subramanian , Robert Wojnarowski , Abasifreke Ebong
发明人： Steven Tysoe , Steven LeBoeuf , Mark D'Evelyn , Venkat Venkataramani , Vinayak Tilak , Jeffrey Fortin , Charles Becker , Stephen Arthur , Samhita Dasgupta , Kanakasabapathi Subramanian , Robert Wojnarowski , Abasifreke Ebong
CPC分类号： H01L21/31111
摘要： An etchant including a halogenated salt, such as Cryolite (Na3AlF6) or potassium tetrafluoro borate (KBF4), is provided. The salt may be present in the etchant in an amount sufficient to etch a substrate and may have a melt temperature of greater than about 200 degrees Celsius. A method of wet etching may include contacting an etchant to at least one surface of a support layer of a multi-layer laminate, wherein the support layer may include aluminum oxide; or contacting an etchant to at least one surface of a support layer of a multi-layer laminate, wherein the etchant may include Cryolite (Na3AlF6), potassium tetrafluoro borate (KBF4), or both; and etching at least a portion of the support layer. The method may provide a laminate produced by growing a crystal onto an aluminum oxide support layer, and chemically removing at least a portion of the support layer by wet etch. An electronic device, optical device or combined device including the laminate is provided.
摘要翻译： 提供了包括卤化盐的蚀刻剂，例如Cryolite（Na 3 AlF 6）或四氟硼酸钾（KBF 4 N 4）。 盐可以以足以蚀刻基材的量存在于蚀刻剂中，并且可以具有大于约200摄氏度的熔体温度。 湿蚀刻的方法可以包括使蚀刻剂与多层层压体的支撑层的至少一个表面接触，其中所述支撑层可以包括氧化铝; 或使蚀刻剂与多层层压体的支撑层的至少一个表面接触，其中所述蚀刻剂可以包括冰晶石（Na 3 AlF 6 N），四氟硼酸钾 （KBF 4）或两者; 并蚀刻所述支撑层的至少一部分。 该方法可以提供通过将结晶生长到氧化铝载体层上并通过湿蚀刻化学去除至少一部分载体层而制备的层压体。 提供了包括层压板的电子设备，光学设备或组合设备。
-
公开(公告)号：US20070000330A1
公开(公告)日：2007-01-04
申请号：US11516237
申请日：2006-09-06
申请人： Steven Tysoe , Mark D'Evelyn , Charles Becker , Abasifreke Ebong , Stephen Arthur , Steven LeBoeuf , Robert Wojnarowski , Samhita Dasgupta , Vinayak Tilak , Kanakasabapathi Subramanian , Jeffrey Fortin
发明人： Steven Tysoe , Mark D'Evelyn , Charles Becker , Abasifreke Ebong , Stephen Arthur , Steven LeBoeuf , Robert Wojnarowski , Samhita Dasgupta , Vinayak Tilak , Kanakasabapathi Subramanian , Jeffrey Fortin
IPC分类号： G01L7/00
CPC分类号： H01L21/31111
摘要： A pressure sensor is provided. The pressure sensor includes a multi-layer laminate comprising a substrate and a semiconductor layer, wherein the substrate comprises single crystal or quasi-single crystal aluminum oxide, and a portion of the substrate that is spaced from a peripheral edge is wet etched to form an inwardly facing sidewall that defines a volume; and a substrate to which the multi-layer laminate is secured. The volume is an enclosed volume further defined by a substrate surface.
摘要翻译： 提供压力传感器。 压力传感器包括多层层压体，其包括基底和半导体层，其中基底包括单晶或准单晶氧化铝，并且与周边边缘间隔开的部分基底被湿蚀刻以形成 限定体积的面向内的侧壁; 以及固定有多层层叠体的基板。 体积是由衬底表面进一步限定的封闭体积。
-
公开(公告)号：US20060137456A1
公开(公告)日：2006-06-29
申请号：US11023202
申请日：2004-12-27
申请人： Samhita Dasgupta , Jeffrey Fortin , Steven LeBoeuf , Vinayak Tilak , Chayan Mitra , Kanakasabapathi Subramanian , Steven Tysoe
发明人： Samhita Dasgupta , Jeffrey Fortin , Steven LeBoeuf , Vinayak Tilak , Chayan Mitra , Kanakasabapathi Subramanian , Steven Tysoe
IPC分类号： G01L9/00
CPC分类号： G01H9/00 , G01L1/142 , G01L1/18 , G01L9/0052 , G01L9/0073 , G01L9/0075 , G01L9/008 , G01L9/08 , G01L19/04
摘要： A sensor, in accordance with aspects of the present technique, is provided. The sensor comprises a membrane formed of gallium nitride. The membrane is disposed on a substrate, which is wet-etched to form a closed cavity. The membrane exhibits both a capacitive response and a piezo-response to an external stimulus. The sensor further includes a circuit for measuring at least one of the capacitive response or the piezo-response. In certain aspects, the sensor may be operable to measure external stimuli, such as, pressure, force and mechanical vibration.
摘要翻译： 提供了根据本技术方面的传感器。 传感器包括由氮化镓形成的膜。 膜被布置在衬底上，其被湿蚀刻以形成闭合腔。 膜对外部刺激具有电容响应和压电响应。 传感器还包括用于测量电容响应或压电响应中的至少一个的电路。 在某些方面，传感器可操作以测量外部刺激，例如压力，力和机械振动。
-
公开(公告)号：US07181972B2
公开(公告)日：2007-02-27
申请号：US11023202
申请日：2004-12-27
申请人： Samhita Dasgupta , Jeffrey Bernard Fortin , Steven Francis LeBoeuf , Vinayak Tilak , Chayan Mitra , Kanakasabapathi Subramanian , Steven Alfred Tysoe
发明人： Samhita Dasgupta , Jeffrey Bernard Fortin , Steven Francis LeBoeuf , Vinayak Tilak , Chayan Mitra , Kanakasabapathi Subramanian , Steven Alfred Tysoe
IPC分类号： G01L9/00
CPC分类号： G01H9/00 , G01L1/142 , G01L1/18 , G01L9/0052 , G01L9/0073 , G01L9/0075 , G01L9/008 , G01L9/08 , G01L19/04
摘要： A sensor, in accordance with aspects of the present technique, is provided. The sensor comprises a membrane formed of gallium nitride. The membrane is disposed on a substrate, which is wet-etched to form a closed cavity. The membrane exhibits both a capacitive response and a piezo-response to an external stimulus. The sensor further includes a circuit for measuring at least one of the capacitive response or the piezo-response. In certain aspects, the sensor may be operable to measure external stimuli, such as, pressure, force and mechanical vibration.
摘要翻译： 提供了根据本技术方面的传感器。 传感器包括由氮化镓形成的膜。 膜被布置在衬底上，其被湿蚀刻以形成闭合腔。 膜对外部刺激具有电容响应和压电响应。 传感器还包括用于测量电容响应或压电响应中的至少一个的电路。 在某些方面，传感器可操作以测量外部刺激，例如压力，力和机械振动。
-
公开(公告)号：US07527742B2
公开(公告)日：2009-05-05
申请号：US11167719
申请日：2005-06-27
申请人： Steven Alfred Tysoe , Steven Francis LeBoeuf , Mark Philip D'Evelyn , Venkat Subramaniam Venkataramani , Vinayak Tilak , Jeffrey Bernard Fortin , Charles Adrian Becker , Stephen Daley Arthur , Samhita Dasgupta , Kanakasabapathi Subramanian , Robert John Wojnarowski , Abasifreke Udo Ebong
发明人： Steven Alfred Tysoe , Steven Francis LeBoeuf , Mark Philip D'Evelyn , Venkat Subramaniam Venkataramani , Vinayak Tilak , Jeffrey Bernard Fortin , Charles Adrian Becker , Stephen Daley Arthur , Samhita Dasgupta , Kanakasabapathi Subramanian , Robert John Wojnarowski , Abasifreke Udo Ebong
CPC分类号： H01L21/31111
摘要： An etchant including a halogenated salt, such as Cryolite (Na3AlF6) or potassium tetrafluoro borate (KBF4), is provided. The salt may be present in the etchant in an amount sufficient to etch a substrate and may have a melt temperature of greater than about 200 degrees Celsius. A method of wet etching may include contacting an etchant to at least one surface of a support layer of a multi-layer laminate, wherein the support layer may include aluminum oxide; or contacting an etchant to at least one surface of a support layer of a multi-layer laminate, wherein the etchant may include Cryolite (Na3AlF6), potassium tetrafluoro borate (KBF4), or both; and etching at least a portion of the support layer. The method may provide a laminate produced by growing a crystal onto an aluminum oxide support layer, and chemically removing at least a portion of the support layer by wet etch. An electronic device, optical device or combined device including the laminate is provided.
摘要翻译： 提供包括卤化盐的蚀刻剂，例如冰晶石（Na 3 AlF 6）或四氟硼酸钾（KBF 4）。 盐可以以足以蚀刻基材的量存在于蚀刻剂中，并且可以具有大于约200摄氏度的熔体温度。 湿蚀刻的方法可以包括使蚀刻剂与多层层压体的支撑层的至少一个表面接触，其中所述支撑层可以包括氧化铝; 或使蚀刻剂与多层层压体的支撑层的至少一个表面接触，其中所述蚀刻剂可以包括冰晶石（Na 3 AlF 6），四氟硼酸钾（KBF 4）或两者; 并蚀刻所述支撑层的至少一部分。 该方法可以提供通过将结晶生长到氧化铝载体层上并通过湿蚀刻化学去除至少一部分载体层而制备的层压体。 提供了包括层压板的电子设备，光学设备或组合设备。
-
公开(公告)号：US20130255220A1
公开(公告)日：2013-10-03
申请号：US13436184
申请日：2012-03-30
申请人： Harry Kirk Mathews, JR. , Brent Jerome Brunell , Simon Shlomo Lis , R. Sheldon Carpenter , Samhita Dasgupta , Sridhar Adibhatla , Scott Douglas Waun , Emad Andarawis Andarawis
发明人： Harry Kirk Mathews, JR. , Brent Jerome Brunell , Simon Shlomo Lis , R. Sheldon Carpenter , Samhita Dasgupta , Sridhar Adibhatla , Scott Douglas Waun , Emad Andarawis Andarawis
IPC分类号： F02C9/00
CPC分类号： F02C9/00 , F05D2270/46 , Y02T50/671
摘要： In one embodiment, a gas turbine engine control system includes an engine controller configured to control multiple parameters associated with operation of a gas turbine engine system. The gas turbine engine control system also includes multiple remote interface units communicatively coupled to the engine controller. The remote interface unit is configured to receive an input signal from the engine controller indicative of respective target values of at least one parameter, and the remote interface unit is configured to provide closed-loop control of the at least one parameter based on the input signal and feedback signals indicative of respective measured values of the at least one parameter.
摘要翻译： 在一个实施例中，燃气涡轮发动机控制系统包括被配置为控制与燃气涡轮发动机系统的操作相关联的多个参数的发动机控制器。 燃气涡轮发动机控制系统还包括通信地耦合到发动机控制器的多个远程接口单元。 所述远程接口单元被配置为从所述引擎控制器接收指示至少一个参数的相应目标值的输入信号，并且所述远程接口单元被配置为基于所述输入信号来提供所述至少一个参数的闭环控制 以及指示所述至少一个参数的相应测量值的反馈信号。
-
公开(公告)号：US07652489B2
公开(公告)日：2010-01-26
申请号：US11295362
申请日：2005-12-06
申请人： Samhita Dasgupta , Minesh Ashok Shah , Kiyoung Chung , Emad Andarawis Andarawis , William Lee Herron , Hans Max Ortlepp
发明人： Samhita Dasgupta , Minesh Ashok Shah , Kiyoung Chung , Emad Andarawis Andarawis , William Lee Herron , Hans Max Ortlepp
IPC分类号： G01R27/26
摘要： A system for measuring clearance between a stationary object and a movable object is provided. The system includes at least one sensor configured to be disposed on the stationary object and configured to measure an operating parameter corresponding to the movable object and a controller coupled to the at least one sensor, wherein the controller is configured to control an operating mode of the sensor based upon the measured operating parameter.
摘要翻译： 提供了一种用于测量静止物体和可移动物体之间的间隙的系统。 该系统包括至少一个传感器，其被配置为设置在静止物体上并被配置成测量对应于可移动物体的操作参数和耦合到该至少一个传感器的控制器，其中该控制器被配置成控制该操作模式 传感器基于测量的操作参数。
-
公开(公告)号：US07466143B2
公开(公告)日：2008-12-16
申请号：US11229251
申请日：2005-09-16
IPC分类号： G01R27/04
CPC分类号： G01B7/14 , F01D21/003 , G01B15/00
摘要： A method is provided and includes exciting a sensor with an incident signal and generating a reflected signal by reflecting the incident signal from the sensor. The incident signal and the reflected signal interfere to form a standing wave. The method also includes processing the signals to determine a sensed parameter based upon a frequency at which the standing wave exhibits a null.
摘要翻译： 提供了一种方法，包括激励具有入射信号的传感器，并通过反射来自传感器的入射信号产生反射信号。 入射信号和反射信号干扰形成驻波。 该方法还包括处理信号以基于驻波呈现零点的频率来确定感测参数。
-
公开(公告)号：US07367945B2
公开(公告)日：2008-05-06
申请号：US10812243
申请日：2004-03-29
申请人： Samhita Dasgupta , Matthew Christian Nielsen , Min-Yi Shih , Robert John Filkins , Todd Ryan Tolliver , Bruno Hans Haider
发明人： Samhita Dasgupta , Matthew Christian Nielsen , Min-Yi Shih , Robert John Filkins , Todd Ryan Tolliver , Bruno Hans Haider
IPC分类号： A61B8/00
CPC分类号： A61B8/14 , A61B8/06 , A61B8/08 , A61B8/13 , A61B8/488 , A61B8/546 , G01S15/8968 , H04B10/505 , H04B11/00 , Y02D70/46 , Y02D70/48
摘要： An ultrasound system includes an ultrasound probe configured for sensing and transmitting ultrasound signals. The ultrasound system further includes an optical conduit configured for coupling a light source and an optical detector in an optical path. The optical conduit includes electro-optic modulators configured for modulating optical signals on the optical conduit with at least one of the electrical signals configured to generate corresponding optically modulated analog signals on the optical conduit. In one example, the electro-optic modulators comprise electro-optic polymer modulators.
摘要翻译： 超声波系统包括被配置用于感测和发送超声信号的超声波探头。 超声系统还包括配置用于将光源和光学检测器耦合在光路中的光导管。 光导管包括被配置用于调制光导管上的光信号的电光调制器，其中至少一个电信号被配置为在光导管上产生对应的光调制模拟信号。 在一个实例中，电光调制器包括电光聚合物调制器。
-
公开(公告)号：US06987619B2
公开(公告)日：2006-01-17
申请号：US10815908
申请日：2004-03-31
CPC分类号： G02B3/0075 , G02B6/4206 , G02B6/4228 , G02B6/43 , H01S5/005 , H01S5/02284 , H01S5/423
摘要： An optical lens structure includes a substantially transparent substrate a lens array attached to the substrate with lenses of the lens array situated opposite the substrate and packaging material surrounding at least the periphery of the lens array, the packaging material including at least two alignment holes which are aligned with respect to positions of the lenses. In one example, the structure is fabricated by attaching a lens array to a substrate with lenses of the lens array situated opposite the substrate, surrounding a periphery of the lens array with a packaging material, the packaging material being attached to the substrate, planarizing the packaging material, and providing alignment holes through the packaging material.
摘要翻译： 光学透镜结构包括基本上透明的基板，透镜阵列，其附接到基板，透镜阵列的透镜位于与基板相对的透镜阵列和至少围绕透镜阵列周围的包装材料上，该包装材料包括至少两个对准孔， 对准镜片的位置。 在一个示例中，通过将透镜阵列附接到基底上而制造结构，透镜阵列的透镜位于与基底相对的透镜阵列周围，用包装材料围绕透镜阵列的外围，该包装材料附着到基底上， 包装材料，并提供穿过包装材料的对准孔。
-
-
-
-
-
-
-
-
-
搜索结果
63 条记录 (耗时 0.042 秒)
