公开(公告)号：US09081027B2

公开(公告)日：2015-07-14

申请号：US12734228

申请日：2008-10-02

Applicant: Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

Inventor： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC: G01C19/56 ,  G01P3/44 ,  G01C19/574 ,  F16F1/02

CPC classification number: G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract translation: 具有衬底和多个可移动子结构的偏转速率传感器，其安装在衬底的表面上，可移动子结构耦合到共享的，特别是中心弹簧元件，其中可移动子结构可激发成耦合振荡 在平行于衬底的表面延伸的平面中，具有科里奥利元件的可移动子结构，其中可检测科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕第一轴线的偏航率， 提供了用于检测围绕第二轴线的偏航率的第二科里奥利元件，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US07229694B2

公开(公告)日：2007-06-12

申请号：US10446583

申请日：2003-05-27

Applicant: Lutz Mueller ,  Kersten Kehr ,  Markus Ulm

Inventor： Lutz Mueller ,  Kersten Kehr ,  Markus Ulm

IPC: B32B9/04

CPC classification number: B81B3/0005 ,  B05D1/62 ,  B05D5/083 ,  B81C2201/019 ,  B81C2201/112 ,  C09D4/00 ,  C09D183/08 ,  C23C28/00 ,  C23C28/42 ,  C23C28/44 ,  Y10T428/31663 ,  C08G77/24

Abstract: A micromechanical component includes an anti-adhesive layer, formed from at least one fluorine-containing silane, applied to at least parts of its surface for reducing surface forces. To increase mechanical and thermal load capacity, the anti-adhesive layer is provided as a multilayer coating which is formed from at least one metal oxide layer and at least one layer composed of at least one fluorine-containing silane.

Abstract translation: 微机械部件包括由至少一种含氟硅烷形成的防粘层，其被施加到其表面的至少部分以减小表面力。 为了增加机械和热负荷能力，抗粘剂层被提供为由至少一个金属氧化物层和至少一层由至少一种含氟硅烷组成的多层涂层。