公开(公告)号：US08944080B2

公开(公告)日：2015-02-03

申请号：US13196086

申请日：2011-08-02

Applicant: Yen-Shao Peng ,  Chia-Hao Hsueh ,  Kuo-Hsing Teng

Inventor： Yen-Shao Peng ,  Chia-Hao Hsueh ,  Kuo-Hsing Teng

IPC: B08B9/027 ,  H01L21/67

CPC classification number: H01L21/67017 ,  B08B9/027 ,  H01L21/67051

Abstract: A cleaning device is provided, including a top portion, a middle portion, and a bottom portion. The top portion includes a first opening. The middle portion is connected to the top portion, and includes an inlet on a lateral side, an annular channel communicated with the inlet, and a second opening communicated with the first opening. The bottom portion is connected to the middle portion, and includes a reservoir and a third opening. The third opening communicates the second opening and the reservoir.

Abstract translation: 提供一种清洁装置，包括顶部，中间部分和底部。 顶部包括第一开口。 中间部分连接到顶部，并且包括在侧面上的入口，与入口连通的环形通道，以及与第一开口连通的第二开口。 底部连接到中间部分，并且包括储存器和第三开口。 第三开口连通第二开口和储存器。

公开(公告)号：US20090184028A1

公开(公告)日：2009-07-23

申请号：US12061216

申请日：2008-04-02

Applicant: Yang-Kuao KUO ,  Kuo-Hsing Teng ,  Chen-Chun Lee

Inventor： Yang-Kuao KUO ,  Kuo-Hsing Teng ,  Chen-Chun Lee

IPC: B65D85/00

CPC classification number: H01L21/67326

Abstract: A wafer cassette. At least one support bar includes a composite curved holding portion. Multiple separation plates are connected to the composite curved holding portion and are parallel to and separated from each other.

Abstract translation: 晶圆盒。 至少一个支撑杆包括复合弯曲保持部分。 多个分离板连接到复合弯曲保持部分并且彼此平行并分离。