公开(公告)号：US06707230B2

公开(公告)日：2004-03-16

申请号：US10157095

申请日：2002-05-29

Applicant: Stuart T. Smith ,  Shane C. Woody ,  Richard M. Seugling

Inventor： Stuart T. Smith ,  Shane C. Woody ,  Richard M. Seugling

IPC: H01L4108

CPC classification number: H02N2/062 ,  H01L41/1875 ,  H02N2/0095 ,  H02N2/043

Abstract: A closed loop motion control system employing at least one relaxor actuator which controls the position of a moving member having mass by controlling an electric field applied to the relaxor actuator. The actuator comprises a body of relaxor material dimensionally variable under the influence of the electric field applied in the form of a voltage to electrodes on at least two surfaces of the actuator. The voltage is applied in response to a feedback signal produced by at least one feedback sensor, which may be a displacement sensor or some other type of sensor. Thus, by constantly monitoring the displacement or other variable of the actuator device, the position of the moving member may be precisely controlled.

Abstract translation: 一种闭环运动控制系统，其采用至少一个放松器致动器，其通过控制施加到所述放松器致动器的电场来控制具有质量的移动构件的位置。 致动器包括在作用于致动器的至少两个表面上的电压的电压形式的电场的影响下尺寸可变的弛豫材料体。 响应于由至少一个反馈传感器产生的反馈信号施加电压，反馈传感器可以是位移传感器或一些其它类型的传感器。 因此，通过不断地监视致动器装置的位移或其他变量，可以精确地控制移动构件的位置。

公开(公告)号：US06504363B1

公开(公告)日：2003-01-07

申请号：US09521540

申请日：2000-03-07

Applicant: Teodor Dogaru ,  Stuart T. Smith

Inventor： Teodor Dogaru ,  Stuart T. Smith

IPC: G01N2782

CPC classification number: G01N27/9006

Abstract: A giant magnetoresistive (GMR) based eddy current sensor including a giant magnetoresistive sensor integrated on a silicon chip with a signal conditioning circuit and a circular coil.

Abstract translation: 一种基于巨磁阻（GMR）的涡流传感器，包括集成在硅芯片上的巨磁电阻传感​​器，带有信号调理电路和圆形线圈。

公开(公告)号：US07568381B2

公开(公告)日：2009-08-04

申请号：US11780208

申请日：2007-07-19

Applicant: Stuart T. Smith ,  Jonathan D. Ellis

Inventor： Stuart T. Smith ,  Jonathan D. Ellis

IPC: G01N3/48

CPC classification number: G01N3/42 ,  G01N2203/0078 ,  G01N2203/0082 ,  G01N2203/0286 ,  G01N2203/0623 ,  G01N2203/0682

Abstract: The present invention provides an apparatus and method for performing surface property measurements, such as workpiece hardness and other material property measurements, with in-process compensation for instrument frame distortion and the like. The apparatus includes a substantially rigid base; a stylus coupled to the substantially rigid base, the stylus configured and selectively positioned to interact with a surface of a specimen at points along a central axis of the stylus; a proximity detector sensor coupled to the substantially rigid base, the proximity detector sensor disposed at a predetermined distance from the surface of the specimen and operable for sensing the predetermined distance between the proximity detector sensor and the surface of the specimen; and a proximity detector actuator coupled to the substantially rigid base, the proximity detector actuator operable for maintaining the predetermined distance between the proximity detector sensor and the surface of the specimen as the substantially rigid base and the stylus are moved with respect to the surface of the specimen along the central axis of the stylus.

Abstract translation: 本发明提供了一种用于进行诸如工件硬度和其它材料性质测量的表面性质测量的装置和方法，其中用于仪器框架失真等的过程中补偿。 该装置包括基本刚性的基座; 触针连接到基本上刚性的基部，触针构造并选择性地定位成与沿着触针的中心轴线的点处的样本表面相互作用; 接近检测器传感器，其耦合到所述基本上刚性的基部，所述接近检测器传感器设置在距离所述样本表面预定距离处，并且可操作以感测所述接近检测器传感器和所述样本表面之间的预定距离; 以及耦合到所述基本上刚性的基座的接近检测器致动器，所述接近检测器致动器可操作以在所述接近检测器传感器和所述样本的表面之间保持所述预定距离，因为所述基本上刚性的基部和所述触针相对于所述接触检测器的表面移动 沿着手写笔的中心轴的样本。

公开(公告)号：US20080202222A1

公开(公告)日：2008-08-28

申请号：US11956915

申请日：2007-12-14

Applicant: Shane C. Woody ,  Marcin B. Bauza ,  Stuart T. Smith

Inventor： Shane C. Woody ,  Marcin B. Bauza ,  Stuart T. Smith

IPC: G01B5/28

CPC classification number: B25J7/00

Abstract: The present invention provides a multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification, including: a filament having a first free end and a second end that is attached to at least one actuator to apply oscillation cycles to the filament; wherein the oscillation of the filament during at least one complete cycle of oscillation of the actuator causes the free end to move in a multi-dimensional envelope, producing a defined virtual probe tip at the free end, wherein a shape of the virtual probe tip is defined by both a characteristic shape of the oscillation of the free end and a geometry of the filament. Optionally, the actuator includes a monolithic crystal actuator. Preferably, the monolithic crystal actuator includes a crystal having zero grain boundaries. The monolithic crystal actuator also includes a plurality of thin flexure structures. The monolithic crystal actuator further includes a plurality of metallic electrodes disposed on inside or outside surfaces, or a combination thereof, of the plurality of thin flexure structures.

Abstract translation: 本发明提供了一种用于微尺度和纳米尺度测量，操作和表面改性的多维驻波探头，包括：具有第一自由端和第二端的灯丝，其连接到至少一个致动器以将振荡周期施加到 灯丝; 其中在致动器的振荡的至少一个完整循环期间灯丝的振荡导致自由端在多维包络中移动，从而在自由端产生限定的虚拟探针尖端，其中虚拟探针尖端的形状为 由自由端的振荡的特征形状和细丝的几何形状两者限定。 可选地，致动器包括单片晶体致动器。 优选地，单晶晶体致动器包括具有零晶界的晶体。 单片晶体致动器还包括多个薄弯曲结构。 单片晶体致动器还包括设置在多个薄弯曲结构的内表面或外表面上的多个金属电极或其组合。

公开(公告)号：US07278297B2

公开(公告)日：2007-10-09

申请号：US10989744

申请日：2004-11-16

Applicant: Marcin B. Bauza ,  Robert J. Hocken ,  Stuart T. Smith

Inventor： Marcin B. Bauza ,  Robert J. Hocken ,  Stuart T. Smith

IPC: G01B5/28 ,  G01N13/10 ,  G12B21/02

CPC classification number: G01Q70/12 ,  F02M61/1846 ,  G01Q60/32

Abstract: An oscillating probe of an elongated rod, having a first free end, and a second end that is attached to at least one actuator to apply oscillation cycles to the rod. Oscillation of the elongated rod during at least one complete cycle of oscillation of the actuator causes the free end to move in at least one-dimensional envelope, producing a defined virtual probe tip geometry at the free end. The probe is connected to a system for utilizing information sensed as the free end is placed near a surface.

Abstract translation: 具有第一自由端的细长杆的振荡探针和附接到至少一个致动器以向杆施加振荡周期的第二端。 在致动器的振荡的至少一个完整循环期间，细长杆的振荡导致自由端至少在一维外壳中移动，从而在自由端产生限定的虚拟探针尖端几何形状。 当自由端放置在表面附近时，探头连接到用于利用感测信息的系统。