Abstract:
A compact, balanced, up to three degrees of freedom measuring interferometer having dual beam splitters rotated ninety degrees with respect to each other and a measurement detector including a quadrant detector or multi-core fiber with four detectors which enables fiber delivery of an optical source without periodic error, an interferometer system, and method for using is disclosed.
Abstract:
The present invention provides an apparatus and method for performing surface property measurements, such as workpiece hardness and other material property measurements, with in-process compensation for instrument frame distortion and the like. The apparatus includes a substantially rigid base; a stylus coupled to the substantially rigid base, the stylus configured and selectively positioned to interact with a surface of a specimen at points along a central axis of the stylus; a proximity detector sensor coupled to the substantially rigid base, the proximity detector sensor disposed at a predetermined distance from the surface of the specimen and operable for sensing the predetermined distance between the proximity detector sensor and the surface of the specimen; and a proximity detector actuator coupled to the substantially rigid base, the proximity detector actuator operable for maintaining the predetermined distance between the proximity detector sensor and the surface of the specimen as the substantially rigid base and the stylus are moved with respect to the surface of the specimen along the central axis of the stylus.
Abstract:
An optical probe system has a light source fiber-delivered and the detector fiber-coupled for analyzing carrier fringes using a line sensor to measure displacement and tilt. Simultaneous surface metrology to measure both the front and back surface of the same optic, is enabled provided the two surfaces are substantially parallel to within the measurement range. Alternatively, the front surface can be measured and then subsequently the back surface.
Abstract:
A compact, balanced, up to three degrees of freedom measuring interferometer which enables fiber delivery of an optical source without periodic nonlinearity, an interferometer system, and method for using an interferometer to measure up to three degrees of freedom is disclosed.
Abstract:
The present invention provides an apparatus and method for performing surface property measurements, such as workpiece hardness and other material property measurements, with in-process compensation for instrument frame distortion and the like. The apparatus includes a substantially rigid base; a stylus coupled to the substantially rigid base, the stylus configured and selectively positioned to interact with a surface of a specimen at points along a central axis of the stylus; a proximity detector sensor coupled to the substantially rigid base, the proximity detector sensor disposed at a predetermined distance from the surface of the specimen and operable for sensing the predetermined distance between the proximity detector sensor and the surface of the specimen; and a proximity detector actuator coupled to the substantially rigid base, the proximity detector actuator operable for maintaining the predetermined distance between the proximity detector sensor and the surface of the specimen as the substantially rigid base and the stylus are moved with respect to the surface of the specimen along the central axis of the stylus.