公开(公告)号：US20130015594A1

公开(公告)日：2013-01-17

申请号：US13350989

申请日：2012-01-16

Applicant: Charles Michael Birtcher ,  Thomas Andrew Steidl

Inventor： Charles Michael Birtcher ,  Thomas Andrew Steidl

IPC: B01F3/04

CPC classification number: B01F3/04

Abstract: The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.

Abstract translation: 本发明是一种具有汲取管入口的容器，至少一个位于汲取管的出口和容器出口之间的挡板，以在挡板和容器的侧壁之间提供窄的环形空间，以防止液滴从 进入容器的出口和容器侧壁的内表面以及邻近挡板的侧壁上的环形径向向内突出的偏转器凸缘。 本发明也是从具有上述结构的容器输送化学前体的方法。 液态和蒸气输送都是预期的。

公开(公告)号：US08002247B2

公开(公告)日：2011-08-23

申请号：US12464922

申请日：2009-05-13

Applicant: Charles Michael Birtcher ,  Thomas Andrew Steidl ,  John Eric Baker

Inventor： Charles Michael Birtcher ,  Thomas Andrew Steidl ,  John Eric Baker

IPC: B01F3/04

CPC classification number: F16K11/02 ,  B08B9/00 ,  B08B9/08 ,  B08B9/0826 ,  B67D7/0272 ,  B67D7/0283 ,  B67D7/0294 ,  Y10T137/8376

Abstract: The present invention is a quartz bubbler container with cross purge capability. This cross purge allows the user to easily purge air and chemical from the valve inlet and outlet by simply flowing inert gas, and avoids the requirement for a more complicated vacuum purging apparatus. The design incorporates two small footprint 3-way valves mounted on the bubbler container inlet and outlet connectors. The 3rd port of each valve is piped together between the valves with a crosspurge line. The valves are corrosion resistant, leak free, maintenance free, non-leaching of impurities, and can accommodate an optional breakseal crusher that will perforate quartz break seals (on the inlet and outlet of ampoule). Liquid out containers of various materials of construction are also contemplated.

Abstract translation: 本发明是具有交叉吹扫能力的石英起泡器容器。 这种交叉吹扫允许用户通过简单地流动惰性气体容易地从阀入口和出口清除空气和化学物质，并且避免了对更复杂的真空清洗装置的要求。 该设计包括安装在起泡器容器入口和出口连接器上的两个小尺寸三通阀。 每个阀门的第三个端口通过交叉管线连接在阀门之间。 阀门是耐腐蚀的，无泄漏的，免维护的，不浸出的杂质，并且可以容纳一个可选的裂缝式破碎机，其将穿孔石英密封（在安瓿的入口和出口）。 也考虑了各种各样的结构材料的液体容器。

公开(公告)号：US20100237085A1

公开(公告)日：2010-09-23

申请号：US12407279

申请日：2009-03-19

Applicant: Charles Michael Birtcher ,  Thomas Andrew Steidl

Inventor： Charles Michael Birtcher ,  Thomas Andrew Steidl

IPC: B65D1/40 ,  B65B31/00

CPC classification number: B01J4/008 ,  B01J4/02

Abstract: The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.

Abstract translation: 本发明是一种具有汲取管入口的容器，至少一个位于汲取管的出口和容器出口之间的挡板，以在挡板和容器的侧壁之间提供窄的环形空间，以防止液滴从 进入容器的出口和容器侧壁的内表面以及邻近挡板的侧壁上的环形径向向内突出的偏转器凸缘。 本发明也是从具有上述结构的容器输送化学前体的方法。 液态和蒸气输送都是预期的。

公开(公告)号：US08944420B2

公开(公告)日：2015-02-03

申请号：US13350989

申请日：2012-01-16

Applicant: Charles Michael Birtcher ,  Thomas Andrew Steidl

Inventor： Charles Michael Birtcher ,  Thomas Andrew Steidl

IPC: B01F3/04

CPC classification number: B01F3/04

Abstract: The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.

Abstract translation: 本发明是一种具有汲取管入口的容器，至少一个位于汲取管的出口和容器出口之间的挡板，以在挡板和容器的侧壁之间提供窄的环形空间，以防止液滴从 进入容器的出口和容器侧壁的内表面以及邻近挡板的侧壁上的环形径向向内突出的偏转器凸缘。 本发明也是从具有上述结构的容器输送化学前体的方法。 液态和蒸气输送都是预期的。

公开(公告)号：US20100043918A1

公开(公告)日：2010-02-25

申请号：US12464922

申请日：2009-05-13

Applicant: Charles Michael Birtcher ,  Thomas Andrew Steidl ,  John Eric Baker

Inventor： Charles Michael Birtcher ,  Thomas Andrew Steidl ,  John Eric Baker

IPC: F17C13/04 ,  B65D85/84

CPC classification number: F16K11/02 ,  B08B9/00 ,  B08B9/08 ,  B08B9/0826 ,  B67D7/0272 ,  B67D7/0283 ,  B67D7/0294 ,  Y10T137/8376

Abstract: The present invention is a quartz bubbler container with cross purge capability. This cross purge allows the user to easily purge air and chemical from the valve inlet and outlet by simply flowing inert gas, and avoids the requirement for a more complicated vacuum purging apparatus. The design incorporates two small footprint 3-way valves mounted on the bubbler container inlet and outlet connectors. The 3rd port of each valve is piped together between the valves with a crosspurge line. The valves are corrosion resistant, leak free, maintenance free, non-leaching of impurities, and can accommodate an optional breakseal crusher that will perforate quartz break seals (on the inlet and outlet of ampoule). Liquid out containers of various materials of construction are also contemplated.

Abstract translation: 本发明是具有交叉吹扫能力的石英起泡器容器。 这种交叉吹扫允许用户通过简单地流动惰性气体容易地从阀入口和出口清除空气和化学物质，并且避免了对更复杂的真空清洗装置的要求。 该设计包括安装在起泡器容器入口和出口连接器上的两个小尺寸三通阀。 每个阀门的第三个端口通过交叉管线连接在阀门之间。 阀门是耐腐蚀的，无泄漏的，免维护的，不浸出的杂质，并且可以容纳一个可选的裂缝式破碎机，其将穿孔石英密封（在安瓿的入口和出口）。 也考虑了各种各样的结构材料的液体容器。

公开(公告)号：US07261118B2

公开(公告)日：2007-08-28

申请号：US10902778

申请日：2004-08-02

Applicant: Charles Michael Birtcher ,  Richard J. Dunning ,  Robert Daniel Clark ,  Arthur Kenneth Hochberg ,  Thomas Andrew Steidl

Inventor： Charles Michael Birtcher ,  Richard J. Dunning ,  Robert Daniel Clark ,  Arthur Kenneth Hochberg ,  Thomas Andrew Steidl

IPC: F17D1/00

CPC classification number: C23C16/4481 ,  Y10T137/0391 ,  Y10T137/4891

Abstract: Vessel and method for the production and delivery of a precursor-containing fluid stream comprising the gaseous phase of a precursor material are disclosed herein. In one aspect, there is provided an vessel comprising: an interior volume wherein the interior volume is segmented into an upper volume and a lower volume wherein the upper volume and the lower volume are in fluid communication; a lid comprising a fluid inlet, a fluid outlet, an optional fill port, and an internal recess wherein at least a portion of the upper volume resides within the internal recess; a sidewall interposed between the lid and a base; and at least one protrusion that extends into the lower volume wherein the precursor is in contact with the at least one protrusion and wherein at least one protrusion extends from at least one selected from the lid, the sidewall, the base, and combinations thereof.

Abstract translation: 本文公开了用于生产和递送包含前体材料的气相的含前体流体物流的容器和方法。 在一个方面，提供了一种容器，包括：内部容积，其中内部容积被分段成上部体积和下部体积，其中上部体积和下部体积是流体连通的; 包括流体入口，流体出口，可选的填充口和内部凹部的盖子，其中上部容积的至少一部分位于内部凹部内; 插入在盖和基座之间的侧壁; 以及至少一个延伸到所述下部体积中的突起，其中所述前体与所述至少一个突起接触，并且其中至少一个突起从选自所述盖，所述侧壁，所述基座及其组合中的至少一个延伸。

公开(公告)号：US07124913B2

公开(公告)日：2006-10-24

申请号：US10602329

申请日：2003-06-24

Applicant: Charles Michael Birtcher ,  Gildardo Vivanco ,  Thomas Andrew Steidl ,  Richard J. Dunning

Inventor： Charles Michael Birtcher ,  Gildardo Vivanco ,  Thomas Andrew Steidl ,  Richard J. Dunning

IPC: B67D5/08

CPC classification number: B67D7/0272

Abstract: A transportable container for high purity, high cost, liquid chemicals capable of maximizing dispensing of the liquid chemical content of the container at deviations from an upright position, comprising; a top wall, a side wall and a bottom wall, the bottom wall having an internal surface contacting liquid chemical with a concave upward contour having a lowest most point axially central to the container, an inlet, an outlet comprising a diptube through which the liquid chemical can be dispensed from said container with an outlet end adjacent the top surface and an inlet terminal end adjacent the lowest most point, a level sensor assembly having an output end adjacent the top surface and a terminal end adjacent the lowest most point; the diptube and the level sensor assembly being more proximate to one another at their terminal ends than their ends adjacent the top surface.

Abstract translation: 一种用于高纯度，高成本的液体化学品的可运送容器，其能够在偏离直立位置时最大限度地分配容器的液体化学成分，包括： 顶壁，侧壁和底壁，底壁具有接触液体化学品的内表面和具有沿容器轴向中心的最低点的凹形向上轮廓，入口，包括汲取管的出口，液体 化学品可以从所述容器分配，出口端邻近顶表面和邻近最低点的入口终端，水平传感器组件具有邻近顶表面的输出端和邻近最低点的终端; 汲取管和液位传感器组件在其末端比邻近顶表面的端部更靠近彼此。

公开(公告)号：US06648034B1

公开(公告)日：2003-11-18

申请号：US10155726

申请日：2002-05-23

Applicant: Charles Michael Birtcher ,  Martin Castaneda Martinez ,  Thomas Andrew Steidl ,  Gil Vivanco ,  David James Silva

Inventor： Charles Michael Birtcher ,  Martin Castaneda Martinez ,  Thomas Andrew Steidl ,  Gil Vivanco ,  David James Silva

IPC: F17C1300

CPC classification number: C23C16/4402 ,  B08B9/00 ,  Y10T137/3127 ,  Y10T137/87684

Abstract: A manifold comprising a container having two ports; a conduit connecting the container to a source/dispense of chemical having a first end and a second end and a connector for the ends; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of the conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent; a second block valve having two diaphragm valves, having a valve seat side and a diaphragm side, wherein each valve seat side faces the other valve seat side, and each valve seat side connected to the second end of the conduit, the diaphragm side of one valve connected to purge, and the diaphragm side of another valve connected to push gas or chemical outlet.

Abstract translation: 一种歧管，包括具有两个端口的容器; 将容器连接到具有第一端和第二端的化学品的源/分配的导管和用于端部的连接器; 第一截止阀具有两个隔膜阀，每个阀具有阀座侧和隔膜侧，每个阀座侧面对另一个阀座侧，并连接到导管的第一端，一个隔膜侧连接到第一端口， 另一个隔膜侧连接到排气口; 具有两个隔膜阀的第二截止阀，其具有阀座侧和隔膜侧，其中每个阀座侧面向另一个阀座侧，并且每个阀座侧连接到导管的第二端，隔膜侧为一个 阀门连接吹扫，另一个阀门的隔膜侧连接以推动气体或化学品出口。

公开(公告)号：US06431229B1

公开(公告)日：2002-08-13

申请号：US09938883

申请日：2001-08-24

Applicant: Charles Michael Birtcher ,  Robert Sam Zorich ,  Thomas Andrew Steidl ,  Gil Vivanco ,  Cynthia Lee Trent ,  David James Silva

Inventor： Charles Michael Birtcher ,  Robert Sam Zorich ,  Thomas Andrew Steidl ,  Gil Vivanco ,  Cynthia Lee Trent ,  David James Silva

IPC: B65B104

CPC classification number: F17C13/04 ,  F17C2205/0323 ,  F17C2205/0385 ,  F17C2221/05 ,  F17C2227/044 ,  F17C2270/0518 ,  Y10T137/87684

Abstract: A manifold for transfer of chemical, comprising; a heated first conduit for connecting a vessel for containing the chemical to a another vessel, a source of pressurized gas and a source of vacuum; a heated first block valve assembly having first and second diaphragm valves, each valve having a diaphragm and a valve seat side and a diaphragm side, wherein the valve seat side of each valve is juxtaposed to the valve seat side of the other valve, and each valve seat side of each valve communicating with the first conduit; a first connector in the first conduit for detaching the conduit from the vessel; a second conduit, for delivering chemical to the vessel, the second conduit connected to the diaphragm side of the first valve; and a third conduit, for communicating pressurized gas and vacuum to the first conduit, connected to the diaphragm side of the second valve.

Abstract translation: 用于转移化学品的歧管，包括： 用于将用于容纳化学品的容器连接到另一容器的加热的第一管道，加压气体源和真空源; 具有第一和第二隔膜阀的加热的第一截止阀组件，每个阀具有隔膜和阀座侧和隔膜侧，其中每个阀的阀座侧与另一个阀的阀座侧并置，并且每个 每个阀的阀座侧与第一导管连通; 第一连接器，用于将导管从容器中分离出来; 用于将化学品输送到容器的第二导管，连接到第一阀的隔膜侧的第二导管; 以及第三导管，用于将加压气体和真空传送到连接到第二阀的隔膜侧的第一导管。

公开(公告)号：US06264064B1

公开(公告)日：2001-07-24

申请号：US09418084

申请日：1999-10-14

Applicant: Charles Michael Birtcher ,  Thomas Andrew Steidl ,  Martin Castaneda Martinez ,  Jamshid Jay Hamidi

Inventor： Charles Michael Birtcher ,  Thomas Andrew Steidl ,  Martin Castaneda Martinez ,  Jamshid Jay Hamidi

IPC: G01F1100

CPC classification number: B01J4/02 ,  C23C16/448 ,  Y02E60/321

Abstract: A chemical delivery system for delivering chemicals having at least a high purity includes at least one first reservoir for containing a fluid and at least one second reservoir for containing the fluid. The system also includes a first conduit, a first fluid sensor, and a controller. The first conduit is for transferring the fluid over time from the at least one first reservoir to the at least one second reservoir. The first conduit is metallic and has a first end in communication with the at least one first reservoir and a second end in communication with the at least one second reservoir. The fluid being transferred from the at least one first reservoir to the at least one second reservoir flows through the first conduit from the first end to the second end. The first fluid sensor is adjacent the first conduit, and the first fluid sensor is adapted to detect a presence of the fluid and to detect an absence of the fluid in the first conduit. The first fluid sensor generates at least one first signal indicative of the presence of the fluid or the absence of the fluid. The controller receives the at least one first signal. The controller is adapted to identify an empty condition in the at least one first reservoir upon receiving the at least one first signal indicative of the absence of the fluid in the first conduit or upon not receiving at least one first signal indicative of the presence of the fluid in the first conduit.

Abstract translation: 用于输送具有至少高纯度的化学品的化学物质输送系统包括至少一个用于容纳流体的第一储存器和用于容纳流体的至少一个第二储存器。 该系统还包括第一导管，第一流体传感器和控制器。 第一导管用于随着时间将流体从至少一个第一储存器传送到至少一个第二储存器。 第一导管是金属的，并且具有与至少一个第一储存器连通的第一端和与至少一个第二储存器连通的第二端。 从至少一个第一储存器传送到至少一个第二储存器的流体从第一端部流过第一管道至第二端部。 第一流体传感器与第一导管相邻，并且第一流体传感器适于检测流体的存在并检测第一导管中的流体的不存在。 第一流体传感器产生指示流体存在或不存在流体的至少一个第一信号。 控制器接收至少一个第一信号。 控制器适于在接收到指示第一导管中不存在流体的至少一个第一信号或者在不接收至少一个指示存在的第一信号的情况下，在至少一个第一储存器中识别空状态 第一导管中的流体。