公开(公告)号：US09818869B2

公开(公告)日：2017-11-14

申请号：US14903769

申请日：2014-07-24

Applicant: National Institute of Advanced Industrial Science and Technology ,  WACOM R&D Corporation

Inventor： Shigeki Sakai ,  Mitsue Takahashi ,  Masaki Kusuhara ,  Masayuki Toda ,  Masaru Umeda

IPC: H01L29/78 ,  C23C16/40 ,  H01L21/28 ,  H01L29/51 ,  H01L29/66 ,  H01L21/02 ,  H01L27/1159

CPC classification number: H01L29/78391 ,  C23C16/40 ,  H01L21/02197 ,  H01L21/02271 ,  H01L21/28291 ,  H01L27/1159 ,  H01L29/516 ,  H01L29/6684

Abstract: A ferroelectric device and a manufacturing method are provided. While holding a nonvolatile memory retention capability and a multiple rewriting endurance as the distinctive features of a ferroelectric device, the disclosed ferroelectric device is wider in memory window and more adaptively made microfiner than a conventional ferroelectric device that has used a ferroelectric mainly constituted of Sr—Bi—Ta—O as an oxide of strontium, bismuth and tantalum. Directly on or with intermediary of an insulator on a semiconductor there are layered a first ferroelectric and a conductor to form a gate stack, the first ferroelectric being mainly constituted of Sr—Ca—Bi—Ta—O as an oxide of strontium, calcium, bismuth and tantalum and being built up by a metal organic vapor deposition technique from a suitable film-forming raw material. The gate stack is heat-treated to cause the first ferroelectric to develop its ferroelectricity.

公开(公告)号：US20160247932A1

公开(公告)日：2016-08-25

申请号：US14903769

申请日：2014-07-24

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ,  WACOM R&D CORPORATION

Inventor： Shigeki SAKAI ,  Mitsue TAKAHASHI ,  Masaki KUSUHARA ,  Masayuki TODA ,  Masaru UMEDA

IPC: H01L29/78 ,  H01L21/28 ,  H01L29/66

CPC classification number: H01L29/78391 ,  C23C16/40 ,  H01L21/02197 ,  H01L21/02271 ,  H01L21/28291 ,  H01L27/1159 ,  H01L29/516 ,  H01L29/6684

Abstract: A ferroelectric device and a manufacturing method are provided. While holding a nonvolatile memory retention capability and a multiple rewriting endurance as the distinctive features of a ferroelectric device, the disclosed ferroelectric device is wider in memory window and more adaptively made microfiner than a conventional ferroelectric device that has used a ferroelectric mainly constituted of Sr—Bi—Ta—O as an oxide of strontium, bismuth and tantalum. Directly on or with intermediary of an insulator on a semiconductor there are layered a first ferroelectric and a conductor to form a gate stack, the first ferroelectric being mainly constituted of Sr—Ca—Bi—Ta—O as an oxide of strontium, calcium, bismuth and tantalum and being built up by a metal organic vapor deposition technique from a suitable film-forming raw material. The gate stack is heat-treated to cause the first ferroelectric to develop its ferroelectricity.

Abstract translation: 提供了一种铁电体元件及其制造方法。 在将非易失性存储器保持能力和多次重写耐久性作为铁电体器件的特征的同时，所公开的铁电体器件与使用主要由Sr-型铁电体构成的铁电体的常规铁电体器件相比，在存储窗口中更宽， Bi-Ta-O作为锶，铋和钽的氧化物。 直接在半导体上或具有中间体的半导体上的绝缘体，层叠有第一铁电体和导体以形成栅极堆叠，第一铁电体主要由作为锶，钙，锶的氧化物的Sr-Ca-Bi-Ta-O构成， 铋和钽，并由合适的成膜原料由金属有机气相沉积技术构成。 对栅极叠层进行热处理，使第一铁电体产生铁电性。

公开(公告)号：US20150069642A1

公开(公告)日：2015-03-12

申请号：US14520457

申请日：2014-10-22

Applicant: Masayuki TODA ,  WACOM R&d Corporation

Inventor： Masayuki TODA ,  Masaru UMEDA

IPC: B01B1/00

CPC classification number: B01B1/005 ,  C23C16/4481

Abstract: Provided is a vaporizer that can efficiently cool a carrier gas, improve the effect of preventing a material from being clogged near the outlet port of a gas passage, contribute to prolonging the timing of maintenance and improving operating efficiency, and exert more uniform dispersing effect. A vaporizer includes: a center rod inserted into a carrier gas introduction hole formed in a disperser to form the gas passage in cooperation with the inner wall of the carrier gas introduction hole; a cooling part disposed on the outer circumferential side of the carrier gas introduction hole in the disperser to cool the inside of the gas passage; a cooling member insertion hole formed across almost the entire length of the center rod along the axial direction of the center rod; and a cooling member disposed in the inside of the cooling member insertion hole to cool the center rod.

Abstract translation: 本发明提供一种能够有效地冷却载气的蒸发器，提高防止材料在气体通路的出口附近堵塞的效果，有助于延长维护时间，提高作业效率，发挥更均匀的分散效果。 蒸发器包括：插入到分散器中形成的载气导入孔中的中心杆，与载气引入孔的内壁配合形成气体通道; 冷却部，其设置在所述分散器中的所述载气导入孔的外周侧，以冷却所述气体通道的内部; 沿所述中心杆的轴向方向跨过所述中心杆的整个长度形成的冷却构件插入孔; 以及设置在冷却部件插入孔的内部以冷却中心杆的冷却部件。