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公开(公告)号：US20130049367A1
公开(公告)日：2013-02-28
申请号：US13566197
申请日：2012-08-03
CPC分类号： F01C1/16 , F04C29/0064
摘要： For a power generation apparatus to efficiently extract rotational driving force generated by an expander to the exterior of a housing that contains the expander while preventing a working medium from leaking, the power generation apparatus according to the present invention includes a housing that contains a driving unit of the expander within a space enclosed by a partition wall, and a magnetic coupling that is divided between the inside and outside of the housing through the partition wall and that transmits the rotational driving force of the expander to the exterior of the housing.
摘要翻译： 为了能够在防止工作介质泄漏的同时有效地将膨胀机产生的旋转驱动力提取到包含膨胀机的壳体的外部的发电装置，本发明的发电装置包括：壳体，其具有驱动部 在由分隔壁包围的空间内的膨胀机，以及通过分隔壁在壳体的内部和外部之间分隔开并将膨胀机的旋转驱动力传递到壳体外部的磁性联轴器。
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公开(公告)号：US08167478B2
公开(公告)日：2012-05-01
申请号：US12267902
申请日：2008-11-10
申请人： Yutaka Narukawa , Yoshimitsu Tanaka
发明人： Yutaka Narukawa , Yoshimitsu Tanaka
IPC分类号： B01F7/08
CPC分类号： B29C47/402 , B29C47/0009 , B29C47/38 , B29C47/60 , B29C47/6012 , B29C47/6056 , B29C2947/9279
摘要： A kneading screw is disclosed which comprises a screw body, the screw body comprising a feed section and a kneading section, the feed section comprising screw segments for feeding a to-be-kneaded material to a downstream side and the kneading section comprising kneading segments for kneading the material. The screw body is provided within the kneading section with a multi-stage portion which gradually changes axially in rotating outside diameter. It is preferable that the multi-stage portion be constituted by kneading segments of plural kneading discs different in rotating outside diameter. With such a construction, it is possible to avoid stress concentration on an axial part of the kneading screw and thereby prevent breaking of a spline shaft and abnormal wear of kneading flights.
摘要翻译： 公开了一种捏合螺杆，其包括螺杆体，螺杆体包括进料部分和捏合部分，所述进料部分包括用于将待混炼材料输送到下游侧的螺杆段，所述捏合部分包括用于 揉捏材料。 螺杆体设置在捏合部内，具有在旋转外径上逐渐变化的多级部。 优选多级部分通过捏合旋转外径不同的多个捏合盘的段来构成。 通过这样的结构，能够避免在混炼螺杆的轴向部分产生应力集中，防止花键轴的断裂和揉搓翼的异常磨损。
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公开(公告)号：US20090161476A1
公开(公告)日：2009-06-25
申请号：US12267902
申请日：2008-11-10
申请人： Yutaka Narukawa , Yoshimitsu Tanaka
发明人： Yutaka Narukawa , Yoshimitsu Tanaka
IPC分类号： B29C47/10
CPC分类号： B29C47/402 , B29C47/0009 , B29C47/38 , B29C47/60 , B29C47/6012 , B29C47/6056 , B29C2947/9279
摘要： A kneading screw is disclosed which comprises a screw body, the screw body comprising a feed section and a kneading section, the feed section comprising screw segments for feeding a to-be-kneaded material to a downstream side and the kneading section comprising kneading segments for kneading the material. The screw body is provided within the kneading section with a multi-stage portion which gradually changes axially in rotating outside diameter. It is preferable that the multi-stage portion be constituted by kneading segments of plural kneading discs different in rotating outside diameter. With such a construction, it is possible to avoid stress concentration on an axial part of the kneading screw and thereby prevent breaking of a spline shaft and abnormal wear of kneading flights.
摘要翻译： 公开了一种捏合螺杆，其包括螺杆体，螺杆体包括进料部分和捏合部分，所述进料部分包括用于将待混炼材料输送到下游侧的螺杆段，所述捏合部分包括用于 揉捏材料。 螺杆体设置在捏合部内，具有在旋转外径上逐渐变化的多级部。 优选多级部分通过捏合旋转外径不同的多个捏合盘的段来构成。 通过这样的结构，能够避免在混炼螺杆的轴向部分产生应力集中，防止花键轴的断裂和揉搓翼的异常磨损。
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公开(公告)号：US06733592B2
公开(公告)日：2004-05-11
申请号：US10142990
申请日：2002-05-13
申请人： Takao Fujikawa , Yoichi Inoue , Yutaka Narukawa , Takahiko Ishii , Tsuneharu Masuda , Makoto Kadoguchi , Yoshihiko Sakashita
发明人： Takao Fujikawa , Yoichi Inoue , Yutaka Narukawa , Takahiko Ishii , Tsuneharu Masuda , Makoto Kadoguchi , Yoshihiko Sakashita
IPC分类号： C23C1600
CPC分类号： C30B33/005 , H01L21/67109 , Y10S414/135
摘要： The present invention has an object to obtain a small-size, high-temperature and high-pressure treatment device adapted to treat semiconductor wafers. The high-temperature and high-pressure device of the invention is intended to treat semiconductor wafers in an atmosphere of high-temperature and high-pressure gas, and comprises a pressure vessel having at a lower portion thereof an opening for putting the semiconductor wafers in and out, a lower lid disposed so as to be vertically movable for opening and closing the lower opening, wafer transfer means for stacking and unstacking the semiconductor wafers onto and from the lower lid, and a heater attached to the lower lid for heating the semiconductor wafers.
摘要翻译： 本发明的目的是获得适于处理半导体晶片的小尺寸，高温和高压处理装置。 本发明的高温高压装置旨在在高温高压气体的气氛中处理半导体晶片，并且包括在其下部具有用于将半导体晶片放置在其中的开口的压力容器 并且，设置成能够垂直移动以便打开和关闭下部开口的下盖，用于将半导体晶片堆叠和分离到下盖上的晶片传送装置和附接到下盖的加热半导体的加热器 晶圆
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公开(公告)号：US06491518B1
公开(公告)日：2002-12-10
申请号：US09287558
申请日：1999-04-06
IPC分类号： F27D312
CPC分类号： H01L21/67109 , C30B31/10
摘要： An apparatus treating substrates in a high-temperature and high-pressure atmosphere, the substrates being treated in a batch that includes one lot of the substrates treated as a unit. A supporting jig is provided with means to support a plurality of the substrates in a shelved arrangement, the supporting jig and substrates being configured to enter and exit from a treating chamber within a pressure vessel as a single unit. The supporting jig is surrounded by a casing. In order to cope with the difficulty of oxidization of the substrates, an oxygen getter is disposed in either the supporting jig or in the casing. The pressure vessel includes an opening whereby a reducing gas can be introduced into the treating chamber. Further, the pressure vessel and a stocking portion of the substrates are installed within a housing such that contamination is further reduced and control is made easier.
摘要翻译： 一种在高温高压气氛中处理基板的设备，其中一批处理的基板包括一批作为一个单元处理的基板。 支撑夹具设置有用于将多个基板支撑在搁置布置中的装置，支撑夹具和基板构造成作为单个单元进入和离开压力容器内的处理室。 支撑夹具被壳体包围。 为了应对基板氧化的困难，将氧吸气剂设置在支撑夹具或壳体中。 压力容器包括开口，由此可以将还原气体引入处理室。 此外，压力容器和基材的放养部分安装在壳体内，使得污染进一步减小，并且控制变得更容易。
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公开(公告)号：US06390811B1
公开(公告)日：2002-05-21
申请号：US09721646
申请日：2000-11-27
IPC分类号： F27D300
CPC分类号： H01L21/67098 , H01L21/67092 , Y10S414/14
摘要： To provide a high-temperature and high-pressure treatment device in which articles to be treated such as wafers of LSI semiconductors can be transported in a stable attitude, and the entire apparatus is made compact. A high-temperature and high-pressure treatment device in which articles to be treated 16 are arranged within a pressure vessel 13, and said pressure vessel 3 is interiorly placed in an atmosphere of high-temperature and high-pressure gases to treat the articles be treated 16 under the high-temperature and high-pressure, the treatment device comprising: a module for carrying articles to be treated 21 for carrying the articles to be treated 16 in and out of a pressure vessel, and a press frame module 20 for holding the pressure vessel 3 in an axial direction of vessel when the articles to be treated 16 are subjected to high-temperature and high-pressure treatment in the pressure vessel 3 closed by top and bottom closures 2, 4, wherein the module for carrying articles to be treated 21 and the press frame module 20 are connected and fixed so that both the modules 20, 21 can be reciprocated integrally.
摘要翻译： 本发明提供一种能够稳定地输送LSI半导体晶片等待处理物品的高温高压处理装置，使整个装置紧凑化。高温高压处理装置 其中待处理物品16布置在压力容器13内，并且所述压力容器3内部放置在高温高压气体气氛中，以在高温高压下处理待处理物品16， 所述处理装置包括：用于承载待处理物品21进入和离开压力容器的待处理物品21的模块，以及用于在所述容器的轴向方向上保持所述压力容器3的压力机架模块20 当要处理的物品16在由顶部和底部封闭物2,4封闭的压力容器3中进行高温和高压处理时，其中用于将物品运送到tr的模块 盖21和压框模块20连接并固定，使得模块20,21可以一体往复运动。
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公开(公告)号：US06299739B1
公开(公告)日：2001-10-09
申请号：US09294031
申请日：1999-04-20
申请人： Takao Fujikawa , Takahiko Ishii , Yutaka Narukawa , Makoto Kadoguchi , Yasushi Mizusawa , Tomoyasu Kondou , Yuji Taguchi
发明人： Takao Fujikawa , Takahiko Ishii , Yutaka Narukawa , Makoto Kadoguchi , Yasushi Mizusawa , Tomoyasu Kondou , Yuji Taguchi
IPC分类号： C23C1414
CPC分类号： C23C14/046 , H01L21/2855 , H01L21/76877
摘要： This invention provides a method of forming a metal wiring film excellent in EM resistance and low electric resistance. In a method of forming a wiring structure by filming and covering the surface of the insulating film of a substrate to be treated having a hole or groove formed thereon with a metallic material such as copper, aluminum, silver or the like, thereby filling the hole or groove inner part with the metallic material to form a wiring structure, the substrate to be treated is exposed to a high temperature under a high-pressure gas atmosphere after the continuous filming and covering with the metallic material along the inner surface profile of the hole or groove, whereby the surface diffusion phenomenon of the metallic material is promoted to reform the metal film into a film structure as the surface area of the metal film is minimized.
摘要翻译： 本发明提供一种形成EM电阻和低电阻优异的金属布线膜的方法。在通过对形成有孔或槽的待处理基板的绝缘膜的表面进行成膜和覆盖来形成布线结构的方法中 在其上用金属材料如铜，铝，银等，由此用金属材料填充孔或槽内部以形成布线结构，待处理的基板在高压下暴露于高温 气体气氛，连续成膜后沿着孔或槽的内表面轮廓与金属材料覆盖，从而促进金属材料的表面扩散现象，将金属膜重整为薄膜结构，作为金属的表面积 电影最小化。
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公开(公告)号：US6077053A
公开(公告)日：2000-06-20
申请号：US58185
申请日：1998-04-10
CPC分类号： F04B39/064 , F04B39/0005
摘要： It is intended to provide a piston type gas compressor capable of replacing a seal ring of a piston with a new one while preventing incorporation of metallic particles into a processing gas. A gas suction port 9 and a gas discharge port 10 are formed in a flange 2 of a cylinder 3 in communication with a gas compressing space H. With a plug 7 removed from an internally threaded hole 6A, a free piston 5, together with a seal ring 4, can be inserted into and removed from the cylinder 3 through the internally threaded hole 6A.
摘要翻译： 旨在提供一种活塞式气体压缩机，其能够用新的活塞代替活塞的密封环，同时防止金属颗粒结合到处理气体中。 在与气体压缩空间H连通的气缸3的凸缘2中形成气体吸入口9和气体排出口10.在从内螺纹孔6A除去塞子7的情况下，自由活塞5与 密封环4可以通过内螺纹孔6A插入和移出圆筒3。
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公开(公告)号：US4983112A
公开(公告)日：1991-01-08
申请号：US382267
申请日：1989-07-20
CPC分类号： B30B11/002 , B22F3/15 , C21D1/74 , F27D21/04 , F27D7/06 , F27D2021/0078
摘要： An interlocking device for a HIP equipment that prevents possible damage to the HIP equipment arising from use of a furnace or processing gas in error and can control the oxygen concentration and pressure within the HIP equipment. The device includes a sensor for detecting a concentration of oxygen in the processing gas in a processing gas pipe system. If the sensor detects an excessively high oxygen concentration, a supply side interlocking mechanism closes a valve for the pipe system and disconnects a power source for a furnace in a high pressure vessel. A flow switch is connected to a safety pipe system having a safety device, and a thermocouple is provided for each of the safety and processing gas pipe systems and a relief pipe system. When the flow switch detects processing gas being spouted from the safety pipe system and/or when one of the temperature signals from the thermocouples exceeds a preset value, a relief side interlocking mechanism closes the processing gas pipe system, opens the relief pipe system, stops a gas compressor and disconnects the power source.
摘要翻译： 一种用于HIP设备的互锁装置，其可防止由于使用炉子而产生的HIP设备或由于处理气体而导致的HIP设备的可能损坏，并且可以控制HIP设备内的氧气浓度和压力。 该装置包括用于检测处理气体管道系统中处理气体中的氧浓度的传感器。 如果传感器检测到氧浓度过高，则供给侧互锁机构关闭用于管道系统的阀，并且在高压容器中断开炉的电源。 流量开关连接到具有安全装置的安全管系统，并且为每个安全和加工气体管道系统以及安全管系统提供热电偶。 当流量开关检测到从安全管道系统喷出的处理气体和/或当来自热电偶的温度信号之一超过预设值时，泄压侧联锁机构关闭处理气体管道系统，打开排水管系统，停止 气体压缩机并断开电源。
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