Temperature measuring apparatus of high melting point metal carbide-carbon system material thermocouple type, and method for producing the apparatus
    3.
    发明授权
    Temperature measuring apparatus of high melting point metal carbide-carbon system material thermocouple type, and method for producing the apparatus 有权
    高熔点金属碳化物 - 碳系材料热电偶型的温度测量装置及其制造方法

    公开(公告)号:US06991370B2

    公开(公告)日:2006-01-31

    申请号:US10623521

    申请日:2003-07-22

    CPC分类号: G01K7/02

    摘要: The temperature measuring apparatus according to the present invention is of the high melting point metal carbide—carbon system material thermocouple type. According to this temperature measuring apparatus, it is possible to measure temperatures from a room temperature range to a high temperature range in excess of 2000° C. continuously, stably and with good accuracy. A constitution is preferable wherein a rod-like member formed of high melting point metal carbide is inserted into a pipe-like member with a bottom formed of carbon system material, and connected at the bottom to serve as a temperature measuring portion.

    摘要翻译: 根据本发明的温度测量装置是高熔点金属碳化物 - 碳系材料热电偶类型。 根据该温度测量装置,可以连续,稳定地并且以高精度测量从室温到超过2000℃的高温范围的温度。 优选其中将由高熔点金属碳化物形成的棒状构件插入由碳系材料形成的底部的管状构件中,并且在底部连接以用作温度测量部分。

    Method of forming a wiring film
    4.
    发明授权
    Method of forming a wiring film 失效
    形成布线膜的方法

    公开(公告)号:US06323120B1

    公开(公告)日:2001-11-27

    申请号:US09522473

    申请日:2000-03-09

    IPC分类号: H01L21283

    摘要: A method of forming an intact wiring film by applying a filling treatment with a metal material with no pores to holes/trenches, the method comprising forming a barrier layer 3 to an insulation film 2 having holes/trenches 2A, forming a seed layer by a PVD method on the surface of the barrier layer and laminating a wiring film 5A by a electrolytic plating method and heat treating the same under a high temperature/high pressure gas atmosphere.

    摘要翻译: 通过对孔/沟槽没有孔的金属材料进行填充处理来形成完整的布线膜的方法,该方法包括在具有孔/沟槽2A的绝缘膜2上形成阻挡层3,形成阻挡层3,通过 PVD法,通过电解电镀法层叠布线膜5A,并在高温高压气体气氛下进行热处理。

    High-temperature high-pressure gas processing apparatus
    5.
    发明授权
    High-temperature high-pressure gas processing apparatus 失效
    高温高压气体处理设备

    公开(公告)号:US5898727A

    公开(公告)日:1999-04-27

    申请号:US845822

    申请日:1997-04-28

    摘要: The present invention provides a processing apparatus for eliminating pores in via holes of a silicon semiconductor. The apparatus includes a high-pressure vessel divided into at least two vessel component members in the axial direction thereof, at least one of which has a cooling unit, a frame for holding a load acting in the axial direction of the high-pressure vessel in processing a workpiece to be processed in the high-pressure vessel, an actuator for moving the vessel component members of the high-pressure vessel in the axial direction thereof so as to load and unload the workpiece, a sealing unit fitted to a portion for loading and unloading the workpiece, which is formed when the vessel component members are moved in the axial direction of the vessel, and a retractable cotter unit for transmitting a load acting in the axial direction of the high-pressure vessel to the frame.

    摘要翻译: 本发明提供一种用于消除硅半导体的通孔中的孔的处理装置。 该装置包括在其轴向方向上分成至少两个容器部件的高压容器,其中至少一个具有冷却单元,用于保持在高压容器的轴向方向上作用的负载的框架 在高压容器内加工待加工的工件,用于使高压容器的容器部件沿其轴向移动以便加载和卸载工件的致动器,安装到用于装载的部分的密封单元 以及卸载当容器部件沿容器的轴向移动时形成的工件,以及用于将在高压容器的轴向方向上作用的负载传递到框架的伸缩开口单元。

    Apparatus for preparing compound single crystals
    6.
    发明授权
    Apparatus for preparing compound single crystals 失效
    复合单晶制备装置

    公开(公告)号:US5685907A

    公开(公告)日:1997-11-11

    申请号:US586825

    申请日:1996-01-31

    IPC分类号: C30B11/00 C30B35/00

    摘要: A method and apparatus for the preparation of single crystals of group II-VI compounds such as ZnSe and CdTe and group III-V compounds such as InP and GaP or of ternary compounds thereof, from which some of their components are likely to be dissociated and evaporated during crystal growth at high temperatures. Single crystals are prepared which enable the preparation of high quality compound single crystals and prevent the contamination of furnace structures. The method includes melting a source material in a container by heating in a furnace body and solidifying the melt by cooling from the bottom to grow a single crystal. The container is enclosed by an airtight chamber communicating to the outside with a pressure equalizing passage. Heating is performed while the passage is held at a low temperature equal to or lower than the melting point of a high-dissociation-pressure component of the source material. The apparatus includes a container for holding the source material, a hermetical furnace body including a heater to heat the container, an airtight chamber inside the heater which encloses the container and a pressure equalizing passage communicating with the airtight chamber and forming a lower portion of the chamber.

    摘要翻译: PCT No.PCT / JP95 / 01069 Sec。 371日期1996年1月31日 102(e)日期1996年1月31日PCT归档1995年6月1日PCT公布。 WO95 / 33873 PCT出版物 日期:1995年12月14日一种用于制备诸如ZnSe和CdTe的II-VI族化合物的单晶和InP和GaP的III-V族化合物或其三元化合物的方法和装置,其一些组分为 在高温下晶体生长期间可能会被解离和蒸发。 制备单晶,其可制备高质量的复合单晶并防止炉结构的污染。 该方法包括通过在炉体中加热熔化容器中的源材料并通过从底部冷却来固化熔体以生长单晶。 容器由与压力平衡通道连通的气密室封闭。 当通道保持在等于或低于源材料的高解离压分量的熔点的低温时进行加热。 该装置包括用于保持源材料的容器,包括用于加热容器的加热器的密封炉体,包围容器的加热器内的气密室和与气密室连通的压力平衡通道,并形成 房间。

    Sintered body of calcium carbonate and process for producing same
    7.
    发明授权
    Sintered body of calcium carbonate and process for producing same 失效
    碳酸钙烧结体及其制造方法

    公开(公告)号:US5187125A

    公开(公告)日:1993-02-16

    申请号:US766263

    申请日:1991-09-27

    CPC分类号: C04B35/6455 C04B35/03

    摘要: The invention relates to a process for producing a sintered body of calcium carbonate without permitting thermal decomposition of calcium carbonate during sintering, and to the sintered body. A powder material primarily comprising calcium carbonate is subjected to a cold powder pressing process to prepare a green compact, which is then heated in a high-pressure gas atmosphere consisting essentially of an inert gas at a temperature t.degree. C. of900.ltoreq.t

    摘要翻译: 本发明涉及一种碳酸钙烧结体的制造方法,其不使碳酸钙在烧结时发生热分解,而且涉及烧结体。 主要包含碳酸钙的粉末材料进行冷粉压制,制备生坯,然后在基本上由惰性气体组成的高压气体气氛中加热,温度t℃为900℃, t <1200,高气压Pkgf / cm2的

    Preparation of capsule for use in isostatic pressing treatment
    8.
    发明授权
    Preparation of capsule for use in isostatic pressing treatment 失效
    用于静脉压治疗的胶囊的制备

    公开(公告)号:US5147086A

    公开(公告)日:1992-09-15

    申请号:US683732

    申请日:1991-04-11

    摘要: A process for preparation of capsule for use in isostatic pressing treatment, the process comprising a first step of enclosing a material to be treated, such as ceramic, metal, resin, etc. with metallic foil having a thickness of from 30 to 300 .mu.m, and a second step of welding the metallic foil so as to seal the material to be treated in the metallic foil thus welded, thereby preparing a capsule, wherein the welding is carried out by means of TIG welding. Alternatively, the welding may be carried out by means of seam resistance welding. It is posible, by the process, to seal the material to be treated in a capsule easily and economically. The capsule thus obtained is in a good sealed condition, permits effective isostatic pressing treatment, and enables the treated material to be taken out easily. A ceramic or metal layer covers the material to be treated to prevent adhesion between the material and the metallic foil.

    摘要翻译: 一种制备用于等压压制处理的胶囊的方法,该方法包括用金属箔包覆陶瓷,金属,树脂等被处理材料的第一步骤,其厚度为30-300μm 以及焊接金属箔以便将如此焊接的金属箔密封待处理材料的第二步骤,由此制备胶囊,其中通过TIG焊接进行焊接。 或者,可以通过接缝电阻焊接进行焊接。 通过该过程,可以容易且经济地将待处理的材料密封在胶囊中。 由此得到的胶囊处于良好的密封状态,能够进行有效的等静压处理,能够容易地取出被处理材料。 陶瓷或金属层覆盖待处理的材料以防止材料和金属箔之间的粘合。

    Method and apparatus for hot isostatic pressing
    9.
    发明授权
    Method and apparatus for hot isostatic pressing 失效
    热等静压的方法和装置

    公开(公告)号:US4582681A

    公开(公告)日:1986-04-15

    申请号:US435662

    申请日:1982-10-21

    CPC分类号: B30B11/002 B22F3/15 B28B3/006

    摘要: A hot isostatic pressing system including a hot isostatic pressing station having a high pressure container constituted by a vertical pressure-resistant cylinder closed at the top end thereof and a lower lid detachably fitted to the bottom of the pressure resistant cylinder and a treating chamber internally provided with a heater and enclosed by a heat insulating wall, and a mechanism for adjusting an atmospheric gas pressure and temperature of the pressing station into a condition suitable for the hot isostatic pressing of a work item accommodated in the treating chamber; a plurality of auxiliary stations each provided with an opening for receiving from beneath thereof the heat insulating wall of the treating chamber accommodating the internal heater and a work item, a support structure for supporting the heat insulating wall, and a mechanism for cooling the work item and internal heater in an inert gas atmosphere; a carriage for transferring the lower lid and work item or the lower lid, work item, heat insulating wall and internal heater between the hot isostatic pressing station and one of the auxiliary stations; and a lift mechanism for lifting up and down the lower lid and work item or the lower lid, work item, heat insulating wall and heater at the hot isostatic pressing station and each one of the auxiliary stations.

    摘要翻译: 一种热等静压按压系统,包括具有高压容器的热等静压按压站,所述高压容器由其顶端封闭的垂直耐压圆筒和可拆卸地装配到耐压圆筒底部的下盖以及内部设置的处理室 具有加热器并由绝热壁包围的机构,以及用于将加压站的气氛气体压力和温度调节到适于对容纳在处理室中的工件进行热等静压的状态的机构; 多个辅助站各自具有开口,用于从其下方接收容纳内部加热器的处理室的隔热壁和工件,用于支撑隔热壁的支撑结构和用于冷却工件的机构 和内部加热器在惰性气体气氛中; 用于在热等静压按压站和辅助站之间传送下盖和工作物品或下盖,工件,隔热墙和内部加热器的托架; 以及一个提升机构,用于在热等静压站和每个辅助站上下下盖和工作物品或下盖,工件,隔热墙和加热器。

    High density sintering method for powder molded products
    10.
    发明授权
    High density sintering method for powder molded products 失效
    粉末成型制品的高密度烧结方法

    公开(公告)号:US4448747A

    公开(公告)日:1984-05-15

    申请号:US413836

    申请日:1982-09-01

    摘要: A high density sintering method for powder molded products by applying preliminary sintering to powder molded products previously molded into a predetermined shape and then applying hot isostatic press process to the sintered products thereby producing high density sintered product which includes the steps of loading the powder molded products into a movable heating furnace equipped with at least one heating means and having a heat insulating structure, introducing the heating furnace into an atmosphere chamber, applying preliminary sintering to the powder molded products in the heating furnace by the heating means while conditioning the inside of the atmosphere chamber to a vacuum or predetermined gas atmosphere, subsequently removing the heating furnace while maintaining the inside thereof at a high temperature from the atmosphere chamber and directly introducing the furnace into a high pressure vessel, thereafter, applying the hot isostatic press process to the sintered products in the furnace while charging a gas as a pressure medium under pressure into the high pressure vessel and elevating the temperature in the heating furnace by the heating means, thereby producing high density sintered products, and then removing the heating furnace together with the high density sintered products loaded therein out of the high pressure vessel after completion of the hot isostatic press process.

    摘要翻译: 一种粉末成型品的高密度烧结方法,其特征在于,将预先烧成的粉末成型体预先成型为规定形状,然后对烧结体进行热等静压加工,制造高密度烧结体,其特征在于, 进入配备有至少一个加热装置并具有隔热结构的可移动加热炉,将加热炉引入气氛室中,通过加热装置对加热炉中的粉末成型产品进行预烧结,同时调节 气氛室进入真空或预定的气体气氛,随后从大气室中保持其内部的高温,同时将加热炉取出并直接将炉子引入高压容器中,然后将热等静压机加工到烧结 产品在 在将加压介质的气体作为压力介质在高压容器内进行加热的同时,通过加热装置升高加热炉内的温度,由此制造高密度烧结产品,然后与高密度烧结产品一起除去加热炉 在热等静压机加工完成后,将其从高压容器中装载出来。