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公开(公告)号：US20190299357A1
公开(公告)日：2019-10-03
申请号：US16442687
申请日：2019-06-17
Applicant: Applied Materials, Inc.
Inventor： Mahendra Christopher ORILALL , Timothy MICHAELSON , Kasiraman KRISHNAN , Rajeev BAJAJ , Nag B. PATIBANDLA , Daniel REDFIELD , Fred C. REDEKER , Gregory E. MENK
Abstract: A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a base material from a first nozzle and an additive material from a second nozzle and solidifying the base and additive material to form a solidified pad material.
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12.发明申请公开(公告)号：US20180161954A1
公开(公告)日：2018-06-14
申请号：US15876436
申请日：2018-01-22
Applicant: Applied Materials, Inc.
Inventor： Rajeev BAJAJ , Kasiraman KRISHNAN , Mahendra C. ORILALL , Daniel REDFIELD , Fred C. REDEKER , Nag B. PATIBANDLA , Gregory E. MENK , Jason G. FUNG , Russell Edward PERRY , Robert E. DAVENPORT
Abstract: Embodiments of the disclosure generally provide polishing pads includes a composite pad body and methods for forming the polishing pads. One embodiment provides a polishing pad including a composite pad body. The composite pad body includes one or more first features formed from a first material or a first composition of materials, and one or more second features formed from a second material or a second composition of materials, wherein the one or more first features and the one or more second features are formed by depositing a plurality of layers comprising the first material or first composition of materials and second material or second composition of materials.
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13.发明申请CMP PAD CONSTRUCTION WITH COMPOSITE MATERIAL PROPERTIES USING ADDITIVE MANUFACTURING PROCESSES 有权使用添加剂制造工艺的具有复合材料特性的CMP PAD结构公开(公告)号：US20160107290A1
公开(公告)日：2016-04-21
申请号：US14695299
申请日：2015-04-24
Applicant: Applied Materials, Inc.
Inventor： Rajeev BAJAJ , Kasiraman KRISHNAN , Mahendra C. ORILALL , Daniel REDFIELD , Fred C. REDEKER , Nag B. PATIBANDLA , Gregory E. MENK , Jason G. FUNG , Russell Edward PERRY , Robert E. DAVENPORT
CPC classification number: B24B37/26 , B24B37/205 , B24B37/22 , B24B37/24 , B24D18/0045 , B29C64/112 , B33Y80/00
Abstract: Embodiments of the disclosure generally provide polishing pads includes a composite pad body and methods for forming the polishing pads. One embodiment provides a polishing pad including a composite pad body. The composite pad body includes one or more first features formed from a first material or a first composition of materials, and one or more second features formed from a second material or a second composition of materials, wherein the one or more first features and the one or more second features are formed by depositing a plurality of layers comprising the first material or first composition of materials and second material or second composition of materials.
Abstract translation: 本公开的实施例通常提供抛光垫，其包括复合衬垫本体和用于形成抛光垫的方法。 一个实施例提供了一种包括复合衬垫本体的抛光垫。 复合衬垫本体包括由第一材料或第一组合材料形成的一个或多个第一特征以及由第二材料或第二材料组合物形成的一个或多个第二特征，其中所述一个或多个第一特征和一个 或更多的第二特征通过沉积多个层而形成，所述多个层包括第一材料或第一材料组合物和第二材料或第二材料组合物。
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公开(公告)号：US20160107288A1
公开(公告)日：2016-04-21
申请号：US14885955
申请日：2015-10-16
Applicant: Applied Materials, Inc.
Inventor： Mahendra Christopher ORILALL , Timothy MICHAELSON , Kasiraman KRISHNAN , Rajeev BAJAJ , Nag B. PATIBANDLA , Daniel REDFIELD , Fred C. REDEKER , Gregory E. MENK
Abstract: A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a base material from a first nozzle and an additive material from a second nozzle and solidifying the base and additive material to form a solidified pad material.
Abstract translation: 制造抛光垫的抛光层的方法包括用3D打印机连续沉积多个层，通过从第一喷嘴喷射基材并从第二喷嘴排出添加剂材料沉积多个抛光层的每一层，以及 固化基材和添加剂材料以形成固化的垫材料。
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