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公开(公告)号：US11662324B1
公开(公告)日：2023-05-30
申请号：US17698393
申请日：2022-03-18
Applicant: Applied Materials Israel Ltd.
Inventor： Ido Almog , Ron Bar-Or , Lior Yaron
IPC: G01N23/22 , G01Q60/24 , G01N23/2251
CPC classification number: G01N23/2251 , G01Q60/24 , G01N2223/07 , G01N2223/418 , G01N2223/507 , G01N2223/6116
Abstract: A computer-based method for three-dimensional surface metrology of samples based on scanning electron microscopy and atomic force microscopy. The method includes: (i) using a scanning electron microscope (SEM) to obtain SEM data of a set of sites on a surface of a sample; (ii) using an atomic force microscope (AFM) to measure vertical parameters of sites in a calibration subset of the set; (iii) calibrating an algorithm, configured to estimate a vertical parameter of a site when SEM data of the site are fed as inputs, by determining free parameters of the algorithm, such that residuals between the algorithm-estimated vertical parameters and the AFM-measured vertical parameters are about minimized; and (iv) using the calibrated algorithm to estimate vertical parameters of the sites in the complement to the calibration subset.
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公开(公告)号：US20220012862A1
公开(公告)日：2022-01-13
申请号：US16923882
申请日：2020-07-08
Applicant: Applied Materials Israel Ltd.
Inventor： Doron Korngut , Ido Almog
Abstract: Disclosed herein is method for multi-perspective-based wafer analysis. The method includes (i) scanning a plurality of pages, or portions thereof, one after the other, wherein each page, or a portion thereof, is successively scanned, in each of a multiplicity of perspectives, and (ii) analyzing scan data of a last scanned page while scanning a next page from the plurality of pages. At least some of the pages include multiple slices of the wafer. The analysis of the scan data includes identifying defects in the scanned pages, based on an integrated analysis combining scan data from each of the multiplicity of perspectives. Further disclosed is a computerized system configured to implement the method.
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公开(公告)号：US10902582B2
公开(公告)日：2021-01-26
申请号：US16250980
申请日：2019-01-17
Applicant: Applied Materials Israel, Ltd.
Inventor： Haim Feldman , Eyal Neistein , Harel Ilan , Shahar Arad , Ido Almog
Abstract: A method, system and computer readable medium for providing information about a region of a sample. The method includes (i) obtaining, by an imager, multiple images of the region; wherein the multiple images differ from each other by at least one parameter (ii) receiving or generating multiple reference images; (iii) generating multiple difference images that represent differences between the multiple images and the multiple reference images; (iv) calculating a set of region pixel attributes, (v) calculating a set of noise attributes, based on multiple sets of region pixels attributes of the multiple region pixels; and (vi) determining for each region pixel, whether the region pixel represents a defect based on a relationship between the set of noise attributes and the set of region pixel attributes of the pixel.
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公开(公告)号：US09535014B1
公开(公告)日：2017-01-03
申请号：US14800625
申请日：2015-07-15
Applicant: Applied Materials Israel, Ltd.
Inventor： Haim Feldman , Ido Dolev , Ido Almog
CPC classification number: G01N21/9501 , G01N21/956 , G01N2021/95676 , G02B26/123 , G02B26/124 , G03F1/84
Abstract: A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.
Abstract translation: 一种系统，包括照明模块，该照明模块包括：（a）第一行进透镜声光装置; （b）用于照亮第一移动透镜以提供沿着第一方向传播的输入光束的光源; （c）用于输出在第二方向扫描物体的输出光束的照明光学器件; 检测单元; 以及收集模块，用于从所述物体收集收集的光束，其中所述收集的光束沿着第三方向传播; 并且将所收集的光束光学操纵以提供反向扫描光束指向检测单元，并且具有位于相同位置的焦点，而不管收集的光束沿着第三方向的传播。
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Patent Agency Ranking
公开(公告)号：US11815470B2
公开(公告)日：2023-11-14
申请号：US17010746
申请日：2020-09-02
Applicant: Applied Materials Israel, Ltd.
Inventor： Haim Feldman , Eyal Neistein , Harel Ilan , Shahar Arad , Ido Almog , Ori Golani
CPC classification number: G01N21/9505 , G06T7/001 , G06T7/0008 , G06T2207/30148
Abstract: Disclosed herein is a method for detecting defects on a sample. The method includes obtaining scan data of a region of a sample in a multiplicity of perspectives, and performing an integrated analysis of the obtained scan data. The integrated analysis includes computing, based on the obtained scan data, and/or estimating cross-perspective covariances, and determining presence of defects in the region, taking into account the cross-perspective covariances.
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公开(公告)号：US20230326713A1
公开(公告)日：2023-10-12
申请号：US17714908
申请日：2022-04-06
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Guy Shwartz , Ori Golani , Itamar Shani , Ido Almog
IPC: H01J37/28 , H01J37/22 , H01J37/244 , G01N23/2251
CPC classification number: H01J37/28 , H01J37/222 , H01J37/244 , H01J2237/24475 , H01J2237/226 , H01J2237/2448 , G01N23/2251
Abstract: Disclosed herein is a method for non-destructive hybrid acousto-optic and scanning electron microscopy-based metrology. The method includes: (i) obtaining acousto-optic and scanning electron microscopy measurement data of an inspected structure on a sample; (ii) processing the measurement data to extract values of key measurement parameters corresponding to the acousto-optic measurement data and the scanning electron microscopy measurement data, respectively; and (iii) obtaining estimated values of one or more structural parameters of the inspected structure by inputting the extracted values into an algorithm, which is configured to jointly process the extracted values to output estimated values of the one or more structural parameters.
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公开(公告)号：US20230040995A1
公开(公告)日：2023-02-09
申请号：US17970054
申请日：2022-10-20
Applicant: Applied Materials Israel Ltd.
Inventor： Ori Golani , Ido Almog
Abstract: Disclosed herein is a method for depth-profiling of samples including a target region including a lateral structural feature. The method includes projecting an optical pump pulse on a semiconductor device comprising a target region, such as to produce an acoustic pulse which propagates within the target region of the semiconductor device, wherein a wavelength of the pump pulse is at least two times greater than a lateral extent of a lateral structural feature of the semiconductor device along at least one lateral direction, projecting an optical probe pulse on the semiconductor device, such that the probe pulse undergoes Brillouin scattering off the acoustic pulse within the target region, detecting a scattered component of the probe pulse to obtain a measured signal, and analyzing the measured signal to obtain a depth-dependence of at least one parameter characterizing the lateral structural feature.
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公开(公告)号：US11519720B2
公开(公告)日：2022-12-06
申请号：US17068693
申请日：2020-10-12
Applicant: Applied Materials Israel, Ltd.
Inventor： Ori Golani , Ido Almog
Abstract: Disclosed herein is a method for depth-profiling of samples including a target region including a lateral structural feature. The method includes obtaining measured signals of the sample and analyzing thereof to obtain a depth-dependence of at least one parameter characterizing the lateral structural feature. The measured signals are obtained by repeatedly: projecting a pump pulse on the sample, thereby producing an acoustic pulse propagating within the target region; Brillouin-scattering a probe pulse off the acoustic pulse within the target region; and detecting a scattered component of the probe pulse to obtain a measured signal. In each repetition the respective probe pulse is scattered off the acoustic pulse at a respective depth within the target region, thereby probing the target region at a plurality of depths. A wavelength of the pump pulse is at least about two times greater than a lateral extent of the lateral structural feature.
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公开(公告)号：US11195267B1
公开(公告)日：2021-12-07
申请号：US16926395
申请日：2020-07-10
Applicant: Applied Materials Israel Ltd.
Inventor： Harel Ilan , Doron Korngut , Ori Golani , Ido Almog
Abstract: Disclosed herein is a computerized system including scanning equipment configured to obtain multi-perspective scan data of a slice on a sample. The scanning equipment includes: (i) a light source configured to generate a light beam; (ii) an acousto-optic deflector (AOD) configured to focus the light beam such as to generate a beam train scanned along consecutive lines on the slice, in groups of n≥2 successively scanned lines, along each of which the beam train forms at least one illumination spot, respectively; and (iii) one or more detectors configured to sense light returned from the slice. The n≥2 lines are scanned different perspectives, respectively. The consecutive lines may be longitudinally displaced relative to one another, such as to overlap in 100·(n−1)/n % of widths thereof, so that the slice may be fully scanned in each of the perspectives.
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