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公开(公告)号：US07709285B2
公开(公告)日：2010-05-04
申请号：US10578026
申请日：2004-10-26
IPC分类号： H01L21/00
CPC分类号： H01G5/18 , B81B3/0078 , B81B2201/016 , B81B2201/038 , B81B2203/04 , B81B2203/053 , H01H59/0009 , H01H2057/006 , H01H2239/01
摘要： A method for manufacturing a micro-electromechanical systems (MEMS) device, comprising providing a base layer (10) and a mechanical layer (12) on a substrate (14), providing a sacrificial layer (16) between the base layer (10) and the mechanical layer (12), providing an etch stop layer (18) between the sacrificial layer (16) and the substrate (14), and removing the sacrificial layer (16) by means of dry chemical etching, wherein the dry chemical etching is performed using a fluorine-containing plasma, and the etch stop layer (18) comprises a substantially non-conducting, fluorine chemistry inert material, such as HfO2, ZrO2, Al2O3 or TiO2.
摘要翻译： 一种用于制造微机电系统（MEMS）装置的方法，包括在基底（14）上提供基底层（10）和机械层（12），在基底层（10）之间提供牺牲层（16） 和所述机械层（12），在所述牺牲层（16）和所述衬底（14）之间提供蚀刻停止层（18），以及通过干法化学蚀刻去除所述牺牲层（16），其中所述干化学蚀刻 使用含氟等离子体进行，并且蚀刻停止层（18）包括基本上不导电的氟化学惰性材料，例如HfO 2，ZrO 2，Al 2 O 3或TiO 2。
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公开(公告)号：US08629731B2
公开(公告)日：2014-01-14
申请号：US13128059
申请日：2009-11-10
IPC分类号： H03L1/00
CPC分类号： H03H9/02448 , H03H9/2426
摘要： A MEMS circuit comprises a MEMS device arrangement with temperature dependent output; a resistive heating circuit; and a feedback control system for controlling the resistive heating circuit to provide heating in order to maintain a MEMS device at a constant temperature. The heating is controlled in dependence on the ambient temperature, such that a MEMS device temperature is maintained at one of a plurality of temperatures in dependence on the ambient temperature. This provides power savings because the temperature to which the MEMS device is heated can be kept within a smaller margin of the ambient temperature.
摘要翻译： MEMS电路包括具有温度相关输出的MEMS器件布置; 电阻加热电路; 以及用于控制电阻加热电路以提供加热以便将MEMS器件保持在恒定温度的反馈控制系统。 根据环境温度控制加热，使得MEMS器件温度根据环境温度保持在多个温度中的一个温度。 这提供了功率节省，因为MEMS器件被加热的温度可以保持在环境温度的较小边界内。
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公开(公告)号：US08325143B2
公开(公告)日：2012-12-04
申请号：US10564920
申请日：2004-07-08
申请人： Galileo June Adeva Destura , Hjalmar Edzer Ayco Huitema , Martinus Hermanus Wilhelmus Maria Van Delden , Jozef Thomas Martinus Van Beek , Antonius Lucien Adrianus Maria Kemmeren
发明人： Galileo June Adeva Destura , Hjalmar Edzer Ayco Huitema , Martinus Hermanus Wilhelmus Maria Van Delden , Jozef Thomas Martinus Van Beek , Antonius Lucien Adrianus Maria Kemmeren
IPC分类号： G09G5/00
CPC分类号： G06F3/0412 , G02F1/13338 , G06F3/0414
摘要： A portable device is provided having a touch sensitive display (100) comprising an active matrix display element (101) and a touch sensitive element (103). The touch sensitive element (103) is disposed on the viewer distal side of the active matrix display element (101) thereby not affecting the display properties. The touch sensitive element (103) comprises a first and second conductive layer (113, 115) each having a plurality of conductors. The conductive layers (113, 115) sandwich a pressure sensitive layer (117) which modifies an electrical conductivity between two conductors of the two conductive layers (113, 115) in response to a pressure point resulting from an applied pressure. Thus, accurate position detection is achieved. The conductors may be aligned with the active matrix and the requirement for calibration may be obviated.
摘要翻译： 提供了具有触敏显示器（100）的便携式设备，该触敏显示器（100）包括有源矩阵显示元件（101）和触敏元件（103）。 触敏元件（103）设置在有源矩阵显示元件（101）的观看者远侧，从而不影响显示属性。 触敏元件（103）包括每个具有多个导体的第一和第二导电层（113,115）。 导电层（113,115）夹着压力敏感层（117），该压力敏感层（117）响应于由所施加的压力导致的压力点而改变两个导电层（113,115）的两个导体之间的导电性。 因此，实现了精确的位置检测。 导体可以与有源矩阵对准，并且可以避免校准的要求。
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公开(公告)号：US20090211885A1
公开(公告)日：2009-08-27
申请号：US11718137
申请日：2005-10-24
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H1/06 , H01H57/00 , H01H2057/006 , H01H2059/0072
摘要： The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate (14). The MEMS element comprises a first electrode (101) and a second electrode (11), that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode (11) is separated from the first electrode (101) by an air gap (110) in its first position. The movable element comprises a mechanical layer (12) and an intermediate layer, in which the second electrode (11) is defined. The second electrode (11) is constituted by a plurality of sections (131, 132, 133) in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect (121, 122, 123) to the mechanical layer (12).
摘要翻译： 该电子设备包括在基板（14）的第一侧的微机电系统（MEMS）元件。 MEMS元件包括第一电极（101）和第二电极（11），其是可移动元件的一部分并且可在第一和第二位置之间朝向和离开第一电极移动。 第二电极（11）在其第一位置通过气隙（110）与第一电极（101）分离。 可移动元件包括机械层（12）和中间层，其中限定了第二电极（11）。 第二电极（11）由中间层中的多个部分（131,132,133）构成，每个部分通过分开的垂直互连（121,122,123）与机械层（12）机械连接， 。
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公开(公告)号：US07554425B2
公开(公告)日：2009-06-30
申请号：US10570435
申请日：2004-08-23
CPC分类号： H03H9/2405 , H03H9/02448 , H03H9/2463 , H03H2009/02496 , H03L1/04
摘要： The electromechanical transducer (1) has a resonator element (20) and an actuator (30) for inducing an elastic deformation of the resonator element (20) dependent on the electrical input signal. For temperature stabilization, the electromechanical transducer (1) has a sensing element (40) for providing an electrical sensing signal has a function of a temperature of the resonator element (20), and a heating element (50) for heating the resonator element to reduce the temperature dependent frequency deviation to keep the resonance frequency equal to the nominal frequency at operating temperature. The heating element (50) is controlled by an electrical heating signal based on the electrical sensing signal. The resonator element may have the hating element or the sensing element; it may be part of a wheatstone bridge; it may consist of two longitudinally extendable parts (201, 202) extending in opposite directions, being attached in a support area (204) in a deformation free part (203).
摘要翻译： 机电换能器（1）具有谐振元件（20）和致动器（30），用于根据电输入信号引起谐振元件（20）的弹性变形。 为了温度稳定，机电换能器（1）具有用于提供具有谐振元件（20）的温度的功能的电感测信号的感测元件（40）和用于将谐振元件加热到 降低温度相关的频率偏差，以保持谐振频率等于工作温度下的额定频率。 加热元件（50）由基于电感测信号的电加热信号控制。 谐振器元件可以具有憎恨元件或感测元件; 它可能是惠斯通电桥的一部分; 它可以包括沿相反方向延伸的两个纵向延伸的部分（201,202），它们连接在无变形部分（203）中的支撑区域（204）中。
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公开(公告)号：US20090057792A1
公开(公告)日：2009-03-05
申请号：US11722634
申请日：2005-12-21
IPC分类号： B81B7/02
CPC分类号： H03H9/02409 , H03H9/02433 , H03H9/2405 , H03H9/2463 , H03H2009/02496
摘要： A resonator has a vibrating element (10) and at least a first (20) and a second (30) electrode, at least one of the electrodes storing an electric charge to make the device charge biased. A charge adjuster (C) can add to or reduce the stored charge. The charge adjuster can be a capacitor to reduce leakage, and or a power supply coupled by switch. It can reduce problems of stiction, and reduce power consumption, and reduce non linearity's, it enables the charge level to be adjusted before operation. A second switch can be used to ground the vibrating element.
摘要翻译： 谐振器具有振动元件（10）和至少第一（20）和第二（30）电极，至少一个电极存储电荷以使器件充电偏置。 电荷调节器（C）可以增加或减少存储的电荷。 电荷调节器可以是电容器来减少泄漏，或者电源由开关耦合。 它可以减少静噪问题，降低功耗，减少非线性度，使操作前调整充电水平。 可以使用第二开关来将振动元件接地。
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公开(公告)号：US20090026882A1
公开(公告)日：2009-01-29
申请号：US12159769
申请日：2006-09-08
IPC分类号： H01L41/04
CPC分类号： H03B5/32
摘要： An oscillator circuit is described comprising a piezoresistive resonator and a phase changing devices. Oscillator circuits with piezoresistive resonators do have the advantage that they can perform self-sustaining oscillation without additional active devices as e.g. transistors since they can be used as amplifiers. Phase changing devices as capacitors, coils and further piezoresistive resonator are used in order to compensate the π/2 phase shift of the piezoresistive resonator.
摘要翻译： 描述了包括压阻谐振器和相变装置的振荡器电路。 具有压阻谐振器的振荡器电路确实具有这样的优点：它们可以执行自维持振荡，而不需要额外的有源器件，例如， 晶体管，因为它们可以用作放大器。 使用相变装置作为电容器，线圈和其它压阻谐振器，以便补偿压阻谐振器的π/ 2相移。
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公开(公告)号：US20080231385A1
公开(公告)日：2008-09-25
申请号：US12088722
申请日：2006-09-21
IPC分类号： H03B1/00
CPC分类号： H03B5/30
摘要： An oscillator circuit has a first and a second piezoresistive resonator (1,2), each having a resonant frequency, each piezoresistive resonator having an input for driving the resonator, and each piezoresistive resonator having its input coupled directly to an output of the other of the resonators, to provide feedback according to a resistance of the respective resonator without amplification and without a phase shifter. This enables feedback without the need for another component to provide the phase shift. This means a simpler circuit can be used, which can facilitate greater integration and hence lower costs. By using piezoresistive resonators the need for an external crystal can be avoided, enabling greater integration and lower costs.
摘要翻译： 振荡器电路具有第一和第二压阻谐振器（1,2），每个具有谐振频率，每个压阻谐振器具有用于驱动谐振器的输入端，并且每个压阻谐振器的输入直接耦合到另一个的输出端 谐振器，以根据各个谐振器的电阻而无需放大而不使用移相器来提供反馈。 这使得反馈不需要另一个组件来提供相移。 这意味着可以使用更简单的电路，这可以促进更大的集成度，从而降低成本。 通过使用压阻谐振器，可以避免对外部晶体的需求，从而实现更高的集成度和更低的成本。
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公开(公告)号：US08803623B2
公开(公告)日：2014-08-12
申请号：US13446398
申请日：2012-04-13
IPC分类号： H03B5/32 , H01L41/047 , H03H9/13 , H03H9/52
CPC分类号： H03H9/02448 , H03H9/02259 , H03H9/2426 , H03H2009/02496
摘要： A MEMS resonator has a component which provides a capacitance associated with the transduction gap which has a temperature-dependent dielectric characteristic, which varies in the same direction (i.e. the slope has the same sign) as the Young's modulus of the material of the resonator versus temperature. This means that the resonant frequency is less dependent on temperature.
摘要翻译： MEMS谐振器具有提供与换能间隙相关联的电容的元件，该电容具有温度相关的介电特性，其在与谐振器材料的杨氏模量相同的方向（即斜率具有相同的符号）上变化， 温度。 这意味着谐振频率较少依赖于温度。
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公开(公告)号：US08203402B2
公开(公告)日：2012-06-19
申请号：US11718137
申请日：2005-10-24
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H1/06 , H01H57/00 , H01H2057/006 , H01H2059/0072
摘要： The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate. The MEMS element includes a first electrode and a second electrode, that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode is separated from the first electrode by an air gap in its first position. The movable element includes a mechanical layer and an intermediate layer, in which the second electrode is defined. The second electrode is constituted by a plurality of sections in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect to the mechanical layer.
摘要翻译： 该电子设备包括在基板的第一侧的微机电系统（MEMS）元件。 MEMS元件包括第一电极和第二电极，其是可移动元件的一部分并且可在第一和第二位置之间朝向和离开第一电极移动。 第二电极通过其第一位置的气隙与第一电极分离。 可移动元件包括机械层和中间层，其中限定第二电极。 第二电极由中间层中的多个部分构成，每个部分通过单独的垂直互连机械连接到机械层。
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