System for analyzing optical properties of an object

    公开(公告)号:US10330462B2

    公开(公告)日:2019-06-25

    申请号:US16013664

    申请日:2018-06-20

    Abstract: Apparatus and methods are described including a line spectrometer that receives a point of light. The line spectrometer includes a first optical element, and a second optical element configured to convert the point of light to a line of light and to direct the line of light toward the first optical element. The first optical element defines first and second surfaces, a distance between the first and second surface varying as a function of distance along the first optical element, the first optical element thereby being configured to generate first and second reflected lines of light that reflect respectively from the first and second surfaces. A detector array receives the first and second lines of light, and generates an interferogram in response thereto. A computer processor determines a spectrum of the point of light, by analyzing the interferogram. Other applications are also described.

    Apparatus and Methods for Performing Tomography and/or Topography Measurements on an Object

    公开(公告)号:US20180340770A1

    公开(公告)日:2018-11-29

    申请号:US16037738

    申请日:2018-07-17

    Abstract: Apparatus and methods are described for determining the tomography and/or topography of an object. A light source generates light, and an optical element generates a 2D pattern from the light and directs the 2D pattern toward the object. An objective lens focuses the 2D pattern at an image plane, and a 2D imager acquires at least one image of the 2D pattern. The image has variable image contrast that varies according to displacement of a surface of the object from the image plane, such that maximal image contrast of the 2D pattern is achieved when the surface of the object and the image plane are coincident. A processing unit, operatively coupled to the 2D imager, derives the object's tomography and/or topography at least partially responsively to the variable image contrast of the image. Other applications are also described.

    Interferometric ellipsometry and method using conical refraction

    公开(公告)号:US10119903B2

    公开(公告)日:2018-11-06

    申请号:US15991197

    申请日:2018-05-29

    Abstract: An apparatus and method for determining optical properties of an object includes a tunable monochromatic light source and an optical system for illuminating at least one point of the object with light from the light source, and collecting light reflected from the object. A biaxial birefringent crystal intercepts a beam of light reflected from the object and propagates the beam along an optical axis of the crystal and transforms the beam of reflected light to a ring of light having a periphery, each point of which has a different polarization plane. A detector array detects respective points along the periphery of the ring and a processing unit is coupled to the detector and is responsive to signals thereby for determining optical properties of the object.

    SYSTEM FOR ANALYZING OPTICAL PROPERTIES OF AN OBJECT

    公开(公告)号:US20180299252A1

    公开(公告)日:2018-10-18

    申请号:US16013664

    申请日:2018-06-20

    Abstract: Apparatus and methods are described including a line spectrometer that receives a point of light. The line spectrometer includes a first optical element, and a second optical element configured to convert the point of light to a line of light and to direct the line of light toward the first optical element. The first optical element defines first and second surfaces, a distance between the first and second surface varying as a function of distance along the first optical element, the first optical element thereby being configured to generate first and second reflected lines of light that reflect respectively from the first and second surfaces. A detector array receives the first and second lines of light, and generates an interferogram in response thereto. A computer processor determines a spectrum of the point of light, by analyzing the interferogram. Other applications are also described.

    Interferometric ellipsometry and method using conical refraction

    公开(公告)号:US10024783B2

    公开(公告)日:2018-07-17

    申请号:US15113161

    申请日:2015-01-22

    Abstract: An apparatus and method for determining optical properties of an object (50) includes a light source (10) and an optical system for illuminating at least one point of the object with light from the light source, and collecting light reflected from the object. A biaxial birefringent crystal (30) intercepts a beam of light reflected from the object and propagates the beam along an optical axis of the crystal and transforms the beam of reflected light to a ring of light having a periphery, each point of which has a different polarization plane. A detector array (40) detects respective points along the periphery of the ring and a processing unit (45) is coupled to the detector and is responsive to signals thereby for determining optical properties of the object.

    System for analyzing optical properties of an object

    公开(公告)号:US10024650B2

    公开(公告)日:2018-07-17

    申请号:US15502147

    申请日:2015-08-07

    Abstract: In a system for analyzing optical properties of an object (350) a point source of light (100) composed of multiple spectral bands each having a respective amplitude, phase and polarization is converted by first optics (120, 150) into a line light source to illuminate an object line on the object. A beam splitter (200) splits the light exiting the first optics and directs a first portion of light on to the object (350) as an illuminated line and a second portion of the light on to a reference mirror (450). Second optics (500) collects respective first and second lines of light reflected by the object and mirror of and collinearly images the reflected lines of light as an image line on to an imaging spectrometer (550) wherein mutual interference allows determination of the optical properties of the object at each point along the object line.

    System for Tomography and/or Topography Measurements of a Layered Objects
    18.
    发明申请
    System for Tomography and/or Topography Measurements of a Layered Objects 审中-公开
    分层对象的层析成像和/或地形测量系统

    公开(公告)号:US20170074644A1

    公开(公告)日:2017-03-16

    申请号:US15311280

    申请日:2015-05-14

    Abstract: A system (10) for analyzing an object (11) includes a light source (12) producing multiple light components, each of different wavelength and a respective amplitude, phase and polarization. An optical element (13) directs the light components on to the object to create known 2D patterns at different image planes displaced from the optical element by distances that are known functions of the wavelength of the light component. A 2D imager (20) images the 2D patterns and produces a plurality of full view 2D wavelength dependent patterns each corresponding to a known distance from the optical element and each having variable image contrast dependent on displacement of a surface of the object from the image plane, maximal image contrast being achieved when the surface of the object and image plane are coincident. A processing unit (25) determines the object surface based on the variable image contrast of each image.

    Abstract translation: 用于分析物体(11)的系统(10)包括产生多个光分量的光源(12),每个光分量具有不同的波长和相应的振幅,相位和极化。 光学元件(13)将光分量引导到物体上,以在与光学元件偏移的不同图像平面上产生已知的2D图案,该距离是光分量的波长的已知功能。 2D成像器(20)对2D图案进行成像,并且产生多个全视图2D波长相关图案,每个图案对应于从光学元件的已知距离,并且每个具有可变图像对比度,取决于物体表面与图像平面的位移 当物体和图像平面的表面一致时,实现最大图像对比度。 处理单元(25)基于每个图像的可变图像对比度确定对象表面。

    Method for Analyzing an Object Using a Combination of Long and Short Coherence Interferometry
    19.
    发明申请
    Method for Analyzing an Object Using a Combination of Long and Short Coherence Interferometry 审中-公开
    使用长和短相干干涉测量的组合分析对象的方法

    公开(公告)号:US20170038191A1

    公开(公告)日:2017-02-09

    申请号:US15304816

    申请日:2015-04-29

    CPC classification number: G01B9/02047 G01B9/0209 G01B9/02091

    Abstract: A method for high dynamic range and high accuracy interferometry measurements is described. The method uses a broadband light source for generating light, an interferometer, a phase shifting device, an imaging optical system and a detector array for collecting and measuring the reflected light from an object. The detected light is processed by a processor unit to obtain the object's surface.

    Abstract translation: 描述了用于高动态范围和高精度干涉测量的方法。 该方法使用用于产生光的宽带光源,干涉仪,相移装置,成像光学系统和用于收集和测量来自物体的反射光的检测器阵列。 检测到的光被处理器单元处理以获得物体的表面。

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