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    Method for Analyzing an Object
    1.
    发明申请
    Method for Analyzing an Object 审中-公开

    公开(公告)号：US20190017804A1

    公开(公告)日：2019-01-17

    申请号：US16037680

    申请日：2018-07-17

    Applicant: Adom, Advanced Optical Technologies Ltd.

    Inventor： Yoel Arieli ,  Yoel Cohen

    IPC: G01B9/02

    CPC classification number: G01B9/02047 ,  G01B9/0209 ,  G01B9/02091

    Abstract: Apparatus and methods are described for determining tomographic and/or topographic data relating to an object. The object is illuminated with at least one wave packet from light generated by a multi-spectral light source. The wave packet is split into two split wave packets, and an optical path difference (OPD) is introduced between the two split wave packets, that is smaller than the coherence length of the wave packet. The two split wave packets are combined to generate a 2D image of the illuminated object, and the data relating to the object is determined by processing the 2D image using long coherence phase shift interferometry algorithms, by analyzing the 2D image as if the 2D image was generated using monochromatic light having a wavelength that is equal to a mean wavelength of the wave packet. Other applications are also described.

    System for tomography and/or topography measurements of a layered objects
    2.
    发明授权
    System for tomography and/or topography measurements of a layered objects 有权

    公开(公告)号：US10054429B2

    公开(公告)日：2018-08-21

    申请号：US15311280

    申请日：2015-05-14

    Applicant: ADOM, Advanced Optical Technologies Ltd.

    Inventor： Yoel Arieli ,  Yoel Cohen

    IPC: G01B11/25 ,  G01N21/47 ,  H04N5/225 ,  G01N21/39 ,  G01N21/17

    CPC classification number: G01B11/25 ,  G01B2210/50 ,  G01N21/39 ,  G01N21/4795 ,  G01N2021/1787 ,  H04N5/2254 ,  H04N5/2256

    Abstract: A system (10) for analyzing an object (11) includes a light source (12) producing multiple light components, each of different wavelength and a respective amplitude, phase and polarization. An optical element (13) directs the light components on to the object to create known 2D patterns at different image planes displaced from the optical element by distances that are known functions of the wavelength of the light component. A 2D imager (20) images the 2D patterns and produces a plurality of full view 2D wavelength dependent patterns each corresponding to a known distance from the optical element and each having variable image contrast dependent on displacement of a surface of the object from the image plane, maximal image contrast being achieved when the surface of the object and image plane are coincident. A processing unit (25) determines the object surface based on the variable image contrast of each image.

    Interferometric Ellipsometry and Method using Conical Refraction
    5.
    发明申请
    Interferometric Ellipsometry and Method using Conical Refraction 有权
    干涉椭偏仪和使用锥形折射的方法

    公开(公告)号：US20170023464A1

    公开(公告)日：2017-01-26

    申请号：US15113161

    申请日：2015-01-22

    Applicant: ADOM, Advanced Optical Technologies Ltd

    Inventor： Yoel Arieli ,  Yoel Cohen

    IPC: G01N21/21 ,  G01N21/45 ,  G01B9/02

    CPC classification number: G01N21/211 ,  G01B9/02091 ,  G01B2290/70 ,  G01N21/45 ,  G01N2021/213 ,  G01N2021/458 ,  G01N2201/06113

    Abstract: An apparatus and method for determining optical properties of an object (50) includes a light source (10) and an optical system for illuminating at least one point of the object with light from the light source, and collecting light reflected from the object. A biaxial birefringent crystal (30) intercepts a beam of light reflected from the object and propagates the beam along an optical axis of the crystal and transforms the beam of reflected light to a ring of light having a periphery, each point of which has a different polarization plane. A detector array (40) detects respective points along the periphery of the ring and a processing unit (45) is coupled to the detector and is responsive to signals thereby for determining optical properties of the object.

    Abstract translation: 一种用于确定物体（50）的光学特性的装置和方法包括光源（10）和用于利用来自光源的光照射物体的至少一个点的光学系统，以及收集从物体反射的光。 双轴双折射晶体（30）截取从物体反射的光束并沿着晶体的光轴传播光束，并将反射光束转换成具有周边的光环，每个点具有不同的边缘 极化平面。 检测器阵列（40）检测沿着环的周边的各个点，并且处理单元（45）耦合到检测器，并响应信号从而确定物体的光学特性。

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