公开(公告)号：US07714999B2

公开(公告)日：2010-05-11

申请号：US11952010

申请日：2007-12-06

申请人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

发明人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

IPC分类号： G01N21/00

CPC分类号： G01N21/17 ,  G01N21/1717 ,  G01N21/9501 ,  G01N2021/1719

摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region.

摘要翻译： 一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。 探测波长的探测光束照射该区域，以产生从该区域返回的探测光束辐射。 以扫描速率跨越该区域扫描光束。 检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。 泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。 从探测信号中提取的信息也可以区分该区域上的不同材料。

公开(公告)号：US07576348B2

公开(公告)日：2009-08-18

申请号：US11853329

申请日：2007-09-11

申请人： Haim Feldman ,  Doron Meshulach ,  Eyal Angel

发明人： Haim Feldman ,  Doron Meshulach ,  Eyal Angel

IPC分类号： G01N21/88

CPC分类号： G01D5/38

摘要： A method for imaging a surface includes generating a traveling lens in an acousto-optic material and incorporating a traveling mask into a portion of the traveling lens so as to produce a composite traveling lens. The method further includes irradiating the composite traveling lens so as to produce a composite focused beam having a spatial variation across the composite focused beam. The composite focused beam is directed onto a region of the surface so as to generate radiation characteristic of the region from the region. The radiation is imaged onto a detector so as to generate a signal characteristic of the region, responsively to the spatial variation.

摘要翻译： 一种用于对表面进行成像的方法包括在声光材料中生成行进透镜并将行进掩模结合到移动透镜的一部分中以产生复合行进透镜。 该方法还包括照射复合移动透镜，以便产生具有横跨复合聚焦光束的空间变化的复合聚焦光束。 复合聚焦光束被引导到表面的一个区域上，以便从该区域产生该区域的辐射特性。 辐射被成像到检测器上，以响应于空间变化产生该区域的信号特征。

公开(公告)号：US07002695B2

公开(公告)日：2006-02-21

申请号：US10141632

申请日：2002-05-07

申请人： Haim Feldman

发明人： Haim Feldman

IPC分类号： G01B9/02

CPC分类号： G01N21/95607 ,  G02B21/14 ,  H01L22/00

摘要： Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate a pattern of interference fringes. A detector detects a change in the pattern of the interference fringes as the spots are scanned over the surface.

公开(公告)号：US06930770B2

公开(公告)日：2005-08-16

申请号：US10215972

申请日：2002-08-08

申请人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

发明人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

IPC分类号： G01N21/88 ,  G01N21/956

CPC分类号： G01N21/8806 ,  G01N21/956

摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.

摘要翻译： 用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。 根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。 反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。 根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

公开(公告)号：US06794625B2

公开(公告)日：2004-09-21

申请号：US09855253

申请日：2001-05-15

申请人： Haim Feldman

发明人： Haim Feldman

IPC分类号： G02B2740

CPC分类号： G03F7/70616 ,  G02B21/241 ,  G03F9/7026 ,  G11B7/0908 ,  G11B7/0917

摘要： Method and apparatus to enable detection of a position of an article, and thereby enable maintenance of a desired position thereof. The apparatus includes an illumination unit, focusing optics and a focus detection unit, the focusing optics serving to direct incident light toward the article and directing light returned from an illuminated elongated region on the article toward the focus detection unit. The focus detection unit includes an optical system that collects the returned light passed through the focusing optics and creates at least two images in the form of at least two interference patterns, respectively, on the sensing surface of a detector. The first interference pattern is created by interference of light components of the collected light that propagated within a first periphery region of an optical axis of the focusing optics and light components of the collected light that propagated within a paraxial region of the optical axis. The second interference pattern is created by interference between light components of the collected light that propagated with a second periphery region of the optical axis, symmetrical to the first periphery region with respect to the optical axis. and light components of the collected light that propagated within the paraxial region. Data indicative of a relation between intensity profiles in the two interference patterns is utilized to determine the location of the article relative to the focal plane.

摘要翻译： 能够检测制品位置的方法和装置，从而能够维持其所需的位置。 该装置包括照明单元，聚焦光学元件和焦点检测单元，聚焦光学器件用于将入射光引向物品并将从物体上的照明细长区域返回的光导向焦点检测单元。 焦点检测单元包括光学系统，其收集通过聚焦光学器件的返回光，并且分别在检测器的感测表面上产生至少两个干涉图案形式的至少两个图像。 第一干涉图案是通过在聚焦光学器件的光轴的第一周边区域内传播的收集的光的光分量的干涉和在光轴的近轴区域内传播的所收集的光的光分量的干涉而产生的。 第二干涉图案是通过与光轴的第二周边区域相对于光轴对称的与第一周边区域对称的收集的光的光分量之间的干涉而产生的。 以及在近轴区域内传播的收集的光的光分量。 利用表示两个干涉图案中的强度分布之间的关系的数据来确定物品相对于焦平面的位置。

公开(公告)号：US20120086937A1

公开(公告)日：2012-04-12

申请号：US13224096

申请日：2011-09-01

申请人： Haim Feldman ,  Boris Morgenstein ,  Roman Naidis ,  Adam Baer

发明人： Haim Feldman ,  Boris Morgenstein ,  Roman Naidis ,  Adam Baer

IPC分类号： G01N21/88 ,  G02F1/33 ,  G02F1/29

CPC分类号： G02F1/29 ,  G01N21/8806 ,  G01N21/9501 ,  G02F1/11 ,  G02F2001/294

摘要： An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.

摘要翻译： 检查系统包括被配置为对应用于入射光束的第一聚焦功能执行快速聚焦改变的第一聚焦单元。 移动透镜声光装置被布置成接收由第一聚焦功能聚焦的光束，并且使用响应于射频信号产生的多个行进透镜产生聚焦点。 行进透镜应用第二聚焦功能，并且行进透镜声光装置被布置成以快速的速度改变第二聚焦功能。 检查系统还包括被布置成将聚焦点引导到被检查对象并将来自被检查对象的辐射引导到传感器的光学系统。

公开(公告)号：US07924419B2

公开(公告)日：2011-04-12

申请号：US12626592

申请日：2009-11-25

申请人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

发明人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

IPC分类号： G01N21/00

CPC分类号： G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.

摘要翻译： 用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。 输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

公开(公告)号：US07518718B2

公开(公告)日：2009-04-14

申请号：US11425101

申请日：2006-06-19

申请人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

发明人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/956

摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.

摘要翻译： 用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。 根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。 反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。 根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

公开(公告)号：US20080231845A1

公开(公告)日：2008-09-25

申请号：US11952010

申请日：2007-12-06

申请人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

发明人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

IPC分类号： G01N21/95

CPC分类号： G01N21/17 ,  G01N21/1717 ,  G01N21/9501 ,  G01N2021/1719

摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region

摘要翻译： 一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。 探测波长的探测光束照射该区域，以产生从该区域返回的探测光束辐射。 以扫描速率跨越该区域扫描光束。 检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。 泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。 从探测信号中提取的信息也可以区分该区域上的不同材料

公开(公告)号：US20080152234A1

公开(公告)日：2008-06-26

申请号：US11967511

申请日：2007-12-31

申请人： Haim Feldman

发明人： Haim Feldman

IPC分类号： G06K9/74

CPC分类号： G03F1/84 ,  G03F1/36 ,  G03F7/705 ,  G03F7/706

摘要： A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.

摘要翻译： 用于产生由光学系统投影的掩模的模拟空间图像的方法包括确定光学系统的相干特性。 基于相干特性计算光学系统的相干分解。 分解包括一系列扩展函数，其具有表示为显式函数的角度和径向分量。 扩展功能与掩模的传输功能一起卷积，以便产生模拟的航空图像。