公开(公告)号：US11664183B2

公开(公告)日：2023-05-30

申请号：US17308732

申请日：2021-05-05

Applicant: Applied Materials, Inc.

Inventor： Graham Wright ,  Daniel Alvarado ,  Eric Donald Wilson ,  Robert Lindberg

IPC: H01J37/08 ,  H01J27/08 ,  H01J27/02 ,  H01J37/30

CPC classification number: H01J27/08 ,  H01J27/022 ,  H01J37/08 ,  H01J37/3002

Abstract: A system and method for extending the life of a cathode and repeller in an IHC ion source is disclosed. The system monitors the health of the cathode by operating using a known set of parameters and measuring the bias power used to generate the desired extracted beam current or the desired current from the arc voltage power supply. Based on the measured bias power, the system may determine whether the cathode is becoming too thin, and may take a corrective action. This corrective action may be to alert the operator; to operate the IHC ion source using a predetermined set of parameters; or to change the dilution used within the IHC source. By performing these actions, the life of the cathode may be more than doubled.

公开(公告)号：US20220406554A1

公开(公告)日：2022-12-22

申请号：US17353171

申请日：2021-06-21

Applicant: Applied Materials, Inc.

Inventor： Graham Wright ,  Eric Donald Wilson ,  Daniel Alvarado ,  Robert C. Lindberg ,  Jacob Mullin

IPC: H01J27/02 ,  H01J27/14

Abstract: A crucible that exploits the observation that molten metal tends to flow toward the hottest regions is disclosed. The crucible includes an interior in which dopant material may be disposed. The crucible has a pathway leading from the interior toward an aperture, wherein the temperature is continuously increasing along the pathway. The aperture may be disposed in or near the interior of the arc chamber of an ion source. The liquid metal flows along the pathway toward the arc chamber, where it is vaporized and then ionized. By controlling the flow rate of the pathway, spillage may be reduced. In another embodiment, an inverted crucible is disclosed. The inverted crucible comprises a closed end in communication with the interior of the ion source, so that the closed end is the hottest region of the crucible. An opening is disposed on a different wall to allow vapor to exit the crucible.

公开(公告)号：US20220359147A1

公开(公告)日：2022-11-10

申请号：US17308732

申请日：2021-05-05

Applicant: Applied Materials, Inc.

Inventor： Graham Wright ,  Daniel Alvarado ,  Eric Donald Wilson ,  Robert Lindberg

IPC: H01J27/08 ,  H01J37/30 ,  H01J27/02 ,  H01J37/08

Abstract: A system and method for extending the life of a cathode and repeller in an IHC ion source is disclosed. The system monitors the health of the cathode by operating using a known set of parameters and measuring the bias power used to generate the desired extracted beam current or the desired current from the arc voltage power supply. Based on the measured bias power, the system may determine whether the cathode is becoming too thin, and may take a corrective action. This corrective action may be to alert the operator; to operate the IHC ion source using a predetermined set of parameters; or to change the dilution used within the IHC source. By performing these actions, the life of the cathode may be more than doubled.