公开(公告)号：US20230239970A1

公开(公告)日：2023-07-27

申请号：US17583755

申请日：2022-01-25

Applicant: Applied Materials, Inc.

Inventor： Dursun Moore ,  Julian G. Blake ,  Hillman Bailey ,  James D. Strassner ,  Paul Forderhase

IPC: H05B3/00 ,  H05B3/44 ,  H01J37/317

CPC classification number: H05B3/0033 ,  H05B3/44 ,  H01J37/3171 ,  H01J2237/31701 ,  H01J2237/002

Abstract: A heater assembly that that is effective at maintaining heating lamps at acceptable temperatures is disclosed. The heater assembly utilizes radiative heat transfer to transfer unwanted heat buildup in the heating lamps to a cooling base. One or more high emissivity films are disposed between the heating lamps and the cooling base to facilitate heat transfer. Further, a reflective coating is applied to a portion of the heating lamps to reflect heat away from the cooling base. The heater assembly may be utilized in a high vacuum environment as it does not rely on convective cooling.

公开(公告)号：US11524392B2

公开(公告)日：2022-12-13

申请号：US17237533

申请日：2021-04-22

Applicant: Applied Materials, Inc.

Inventor： Yaseer Arafath Ahamed ,  Kangkang Wang ,  Benjamin B. Riordon ,  James D. Strassner ,  Ludovic Godet

IPC: B25B11/00 ,  G02B6/10 ,  G02B1/00

Abstract: Embodiments described herein provide for devices and methods for retaining optical devices. The devices and methods described herein provide for retention of the substrate without contacting sensitive portions of the substrate. The devices and methods utilize retention pads or vacuum pins to contact the exclusion zones i.e., inactive areas of the substrate to retain the substrate and prevent the substrate from moving laterally. Additionally, a holding force retains the substrate in the vertical direction, without contacting the substrate. The methods provide for adjusting the devices to account for multiple geometries of the substrate. The methods further provide for adjusting the devices, such as adjusting a gap between the optical device and a suction pad, to alter the holding force of the devices on the optical devices.

公开(公告)号：US11545375B2

公开(公告)日：2023-01-03

申请号：US16443043

申请日：2019-06-17

Applicant: Applied Materials, Inc.

Inventor： James D. Strassner ,  Bradley M. Pomerleau ,  D. Jeffrey Lischer ,  Dawei Sun ,  Michael Paul Rohrer

IPC: H01L21/67 ,  H01L21/02 ,  G05D23/02 ,  G05D23/19

Abstract: A system and method of heating a workpiece to a desired temperature is disclosed. This system and method consider the physical limitations of the temperature device, such as time lag, temperature offset, and calibration, in creating a hybrid approach that heats the workpiece more efficiently. First, the workpiece is heated using open loop control to heat the workpiece to a threshold temperature. After the threshold temperature is reach, a closed loop maintenance mode is utilized. In certain embodiments, an open loop maintenance mode is employed between the open loop warmup mode and the closed loop maintenance mode. Additionally, a method of calibrating a pyrometer using a contact thermocouple is also disclosed.