公开(公告)号：US20220055772A1

公开(公告)日：2022-02-24

申请号：US17404823

申请日：2021-08-17

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE ,  Lance A. SCUDDER ,  Yuriy MELNIK ,  Kenichi OHNO ,  Eric H. LIU ,  David Alexander BRITZ

IPC: B64F5/30 ,  B08B7/00

Abstract: Embodiments of the present disclosure generally relate to methods for cleaning aerospace components having oxidation, corrosion, contaminants, and/or other degradations. In one or more embodiments, a cleaning method includes positioning the aerospace component into a processing region of a processing chamber, introducing hydrogen gas into the processing region, maintaining the processing region at a pressure of about 100 mTorr to about 5,000 mTorr, and heating the aerospace component at a temperature of about 500° C. to about 1,200° C. for about 0.5 hours to about 24 hours to produce a cleaned surface on the aerospace component. In other embodiments, a cleaning method includes exposing the aerospace component to ozone while maintaining the aerospace component at a temperature of about 15° C. to about 500° C. for 0.25 hours to about 24 hours to produce a cleaned surface on the aerospace component.

公开(公告)号：US20210071299A1

公开(公告)日：2021-03-11

申请号：US16670555

申请日：2019-10-31

Applicant: Applied Materials, Inc.

Inventor： Kenichi OHNO ,  Eric H. LIU ,  Sukti CHATTERJEE ,  Yuriy MELNIK ,  Thomas KNISLEY ,  David Alexander BRITZ ,  Lance A. SCUDDER ,  Pravin K. NARWANKAR

IPC: C23C16/455 ,  C23C16/02 ,  C23C16/40 ,  C23C16/56

Abstract: Embodiments of the present disclosure generally relate to protective coatings on substrates and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on a substrate includes depositing a chromium oxide layer containing amorphous chromium oxide on a surface of the substrate during a first vapor deposition process and heating the substrate containing the chromium oxide layer comprising the amorphous chromium oxide to convert at least a portion of the amorphous chromium oxide to crystalline chromium oxide during a first annealing process. The method also includes depositing an aluminum oxide layer containing amorphous aluminum oxide on the chromium oxide layer during a second vapor deposition process and heating the substrate containing the aluminum oxide layer disposed on the chromium oxide layer to convert at least a portion of the amorphous aluminum oxide to crystalline aluminum oxide during a second annealing process.

公开(公告)号：US20200240018A1

公开(公告)日：2020-07-30

申请号：US16843358

申请日：2020-04-08

Applicant: Applied Materials, Inc.

Inventor： Yuriy MELNIK ,  Sukti CHATTERJEE ,  Kaushal GANGAKHEDKAR ,  Jonathan FRANKEL ,  Lance A. SCUDDER ,  Pravin K. NARWANKAR ,  David Alexander BRITZ ,  Thomas KNISLEY ,  Mark SALY ,  David THOMPSON

IPC: C23C16/455 ,  C23C16/34 ,  C23C16/40 ,  C23C16/30 ,  C23C16/56 ,  F01D5/28 ,  F01D9/02 ,  F01D25/12 ,  F01D25/14 ,  F01D25/28 ,  F23R3/28

Abstract: Protective coatings on an aerospace component are provided. An aerospace component includes a surface containing nickel, nickel superalloy, aluminum, chromium, iron, titanium, hafnium, alloys thereof, or any combination thereof, and a coating disposed on the surface, where the coating contains a nanolaminate film stack having two or more pairs of a first deposited layer and a second deposited layer. The first deposited layer contains chromium oxide, chromium nitride, aluminum oxide, aluminum nitride, or any combination thereof, the second deposited layer contains aluminum oxide, aluminum nitride, silicon oxide, silicon nitride, silicon carbide, yttrium oxide, yttrium nitride, yttrium silicon nitride, hafnium oxide, hafnium nitride, hafnium silicide, hafnium silicate, titanium oxide, titanium nitride, titanium silicide, titanium silicate, or any combination thereof, and the first deposited layer and the second deposited layer have different compositions from each other.

公开(公告)号：US20190119810A1

公开(公告)日：2019-04-25

申请号：US16137797

申请日：2018-09-21

Applicant: Applied Materials, Inc.

Inventor： Ranga Rao ARNEPALLI ,  Colin Costano NEIKIRK ,  Yuriy MELNIK ,  Suresh Chand SETH ,  Pravin K. NARWANKAR ,  Sukti CHATTERJEE ,  Lance A. SCUDDER

IPC: C23C16/02 ,  C23C16/455 ,  C23C16/50

Abstract: Methods of removing native oxide layers and depositing dielectric layers having a controlled number of active sites on MEMS devices for biological applications are disclosed. In one aspect, a method includes removing a native oxide layer from a surface of the substrate by exposing the substrate to one or more ligands in vapor phase to volatize the native oxide layer and then thermally desorbing or otherwise etching the volatized native oxide layer. In another aspect, a method includes depositing a dielectric layer selected to provide a controlled number of active sites on the surface of the substrate. In yet another aspect, a method includes both removing a native oxide layer from a surface of the substrate by exposing the substrate to one or more ligands and depositing a dielectric layer selected to provide a controlled number of active sites on the surface of the substrate.

公开(公告)号：US20230002897A1

公开(公告)日：2023-01-05

申请号：US17939655

申请日：2022-09-07

Applicant: Applied Materials, Inc.

Inventor： Kenichi OHNO ,  Eric H. LIU ,  Sukti CHATTERJEE ,  Yuriy MELNIK ,  Thomas KNISLEY ,  David Alexander BRITZ ,  Lance A. SCUDDER ,  Pravin K. NARWANKAR

IPC: C23C16/455 ,  C23C16/02 ,  C23C16/56 ,  C23C16/40

Abstract: Embodiments of the present disclosure generally relate to protective coatings on substrates and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on a substrate includes depositing a chromium oxide layer containing amorphous chromium oxide on a surface of the substrate during a first vapor deposition process and heating the substrate containing the chromium oxide layer comprising the amorphous chromium oxide to convert at least a portion of the amorphous chromium oxide to crystalline chromium oxide during a first annealing process. The method also includes depositing an aluminum oxide layer containing amorphous aluminum oxide on the chromium oxide layer during a second vapor deposition process and heating the substrate containing the aluminum oxide layer disposed on the chromium oxide layer to convert at least a portion of the amorphous aluminum oxide to crystalline aluminum oxide during a second annealing process.

公开(公告)号：US20220298920A1

公开(公告)日：2022-09-22

申请号：US17832568

申请日：2022-06-03

Applicant: Applied Materials, Inc.

Inventor： Yuriy MELNIK ,  Sukti CHATTERJEE ,  Kaushal GANGAKHEDKAR ,  Jonathan FRANKEL ,  Lance A. SCUDDER ,  Pravin K. NARWANKAR ,  David Alexander BRITZ ,  Thomas KNISLEY ,  Mark SALY ,  David THOMPSON

IPC: F01D5/28 ,  C23C16/455 ,  C23C16/34 ,  C23C16/40 ,  C23C16/30 ,  C23C16/56 ,  F01D9/02 ,  F01D25/12 ,  F01D25/28 ,  F23R3/28

Abstract: Methods for forming protective coatings on aerospace components are provided. In one or more embodiments, the method includes exposing an aerospace component to a first precursor and a first reactant to form a first deposited layer on a surface of the aerospace component by a first deposition process (e.g., CVD or ALD), and exposing the aerospace component to a second precursor and a second reactant to form a second deposited layer on the first deposited layer by a second deposition process. The first deposited layer and the second deposited layer have different compositions from each other. The method also includes repeating the first deposition process and the second deposition process to form a nanolaminate film stack having from 2 pairs to about 1,000 pairs of the first deposited layer and the second deposited layer consecutively deposited on each other.

公开(公告)号：US20220081763A1

公开(公告)日：2022-03-17

申请号：US17477430

申请日：2021-09-16

Applicant: Applied Materials, Inc.

Inventor： Nitin DEEPAK ,  Sarin Sundar JAINNAGAR KUPPUSWAMY ,  Sankalp PATIL ,  Sukti CHATTERJEE ,  David Masayuki ISHIKAWA ,  Prerna Sonthalia GORADIA ,  David Alexander BRITZ ,  Lance A. SCUDDER

IPC: C23C16/40 ,  C23C14/08 ,  C23C16/455 ,  F02C6/12

Abstract: Embodiments of the present disclosure generally relate to protective coatings on turbocharger components, such as turbine wheels and compressor wheels, and other rotary equipment components and methods for depositing the protective coatings on such components. In one or more embodiments, a coated turbocharger component is provided and includes a metallic substrate containing a nickel-based alloy or superalloy, a cobalt-based alloy or superalloy, a stainless steel, or a titanium-aluminum alloy and a protective coating disposed on the metallic substrate. The protective coating contains an aluminum oxide having a purity of greater than 99 atomic percent (at %). In some examples, the metallic substrate is a turbine wheel, a compressor wheel, an impeller, a fan blade, a disk, a heat shield, a pulley, or a shaft.

公开(公告)号：US20210381386A1

公开(公告)日：2021-12-09

申请号：US16897144

申请日：2020-06-09

Applicant: Applied Materials, Inc.

Inventor： Nitin DEEPAK ,  Sarin Sundar JAINNAGAR KUPPUSWAMY ,  Prerna Sonthalia GORADIA ,  Sukti CHATTERJEE ,  Lance A. SCUDDER ,  Kenichi OHNO ,  Yuriy MELNIK ,  David Alexander BRITZ ,  Sankalp PATIL ,  Ankur KADAM ,  Abhishek MANDAL

IPC: F01D5/28 ,  C23C16/40 ,  C23C16/06 ,  C23C16/455 ,  C23C14/08 ,  C23C14/14

Abstract: Embodiments of the present disclosure generally relate to oxide layer compositions for turbine engine components and methods for depositing the oxide layer compositions. In one or more embodiments, a turbine engine component includes a superalloy substrate and a bond coat disposed over the superalloy substrate. The turbine engine component includes an oxide layer disposed over the bond coat, where the oxide layer includes aluminum oxide and a metal dopant. The turbine engine component includes a thermal barrier coating disposed over the oxide layer.

公开(公告)号：US20210363630A1

公开(公告)日：2021-11-25

申请号：US16921577

申请日：2020-07-06

Applicant: Applied Materials, Inc.

Inventor： David Alexander BRITZ ,  Lance A. SCUDDER ,  Yuriy MELNIK ,  Sukti CHATTERJEE

IPC: C23C16/34 ,  C23C16/455 ,  C23C16/50 ,  C23C16/40 ,  C23C28/04

Abstract: Embodiments of the present disclosure generally relate to protective coatings on various substrates including aerospace components and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on an aerospace component includes forming an aluminum oxide layer on a surface of the aerospace component and depositing a boron nitride layer on or over the aluminum oxide layer during a vapor deposition process. In some examples, the method includes depositing a metal-containing catalytic layer on the aluminum oxide layer before depositing the boron nitride layer. The boron nitride layer can include hexagonal boron nitride (hBN).

公开(公告)号：US20170221751A1

公开(公告)日：2017-08-03

申请号：US15501148

申请日：2015-08-21

Applicant: Applied Materials, Inc.

Inventor： Brian H. BURROWS ,  Lance A. SCUDDER ,  David K. CARLSON ,  Kashif MAQSOOD

IPC: H01L21/687

CPC classification number: H01L21/68785 ,  C23C14/50 ,  C23C16/4585 ,  C30B25/12 ,  H01L21/68721 ,  H01L21/68771

Abstract: A substrate carrier for an epitaxy chamber is described that has an elongated base member supporting two substrate supports in an angled relationship and a center substrate support between the two substrate supports. The center substrate support has one or more openings at which a substrate is positioned for processing, enabling both sides of the substrate to be processed concurrently.