公开(公告)号：US20250093299A1

公开(公告)日：2025-03-20

申请号：US18883308

申请日：2024-09-12

Applicant: Applied Materials, Inc.

Inventor： Jia Pelpa ,  Mehran Moalem ,  Mehdi Balooch ,  Damodar Shanbhag

IPC: G01N29/02 ,  G01N29/036 ,  G01N29/22 ,  G01N29/24 ,  H01J37/32

Abstract: A device can include a holder, a radical sensor holder, a radical sensor disposed within the radical sensor holder, an electrical transmission line that is electrically coupled with the radical sensor, a flange that is spaced apart from the radical sensor holder, and a connector extending from the flange in a direction opposite the radical sensor holder. The connector includes a housing, an electrical connection disposed within the housing, the electrical connection being electrically coupled with the electrical transmission line, an isolator that couples the housing with the electrical connection to electrically insulate the housing from the electrical connection, a first sealing member disposed between the isolator and the housing, and a second sealing member disposed between the isolator and the electrical connection.

公开(公告)号：US20230145789A1

公开(公告)日：2023-05-11

申请号：US17953630

申请日：2022-09-27

Applicant: Applied Materials, Inc.

Inventor： Mehran Moalem

IPC: H01L21/67 ,  C08L27/12 ,  C08L49/00

CPC classification number: H01L21/67115 ,  C08L27/12 ,  C08L49/00 ,  H01L21/67126

Abstract: In an additional embodiment, a semiconductor processing tool is provided. In an embodiment, the semiconductor processing tool, comprises a chamber, and a lid sealing the chamber. In an embodiment, with an elastomer seal is between the chamber and the lid. In an embodiment, the elastomer seal comprises a polymer with carbon chains, where an average number of bonds between carbons in the carbon chains is greater than 1.00. In an embodiment a portion of the processing tool is transparent to ultraviolet radiation so that the elastomer seal is exposed to the ultraviolet radiation.