公开(公告)号：US20250098541A1

公开(公告)日：2025-03-20

申请号：US18883312

申请日：2024-09-12

Applicant: Applied Materials, Inc.

Inventor： Jia Pelpa ,  Mehran Moalem ,  Mehdi Balooch ,  Damodar Shanbhag

IPC: H10N30/30 ,  G10K11/04 ,  H10N30/03 ,  H10N30/067 ,  H10N30/082 ,  H10N30/85 ,  H10N30/87

Abstract: A device can include a radical sensor including a piezoelectric resonator. The radical sensor includes a base structure including a piezoelectric material, and a filter formed on the base structure to selectively react with a radical species. A resonant frequency of the radical sensor changes in response to reaction of the radical species to the filter. The filter includes at least one of: a crystalline material, a doped coating, or a coating having a thickness that ranges from about 5 micrometers to about 50 micrometers.

公开(公告)号：US20250093299A1

公开(公告)日：2025-03-20

申请号：US18883308

申请日：2024-09-12

Applicant: Applied Materials, Inc.

Inventor： Jia Pelpa ,  Mehran Moalem ,  Mehdi Balooch ,  Damodar Shanbhag

IPC: G01N29/02 ,  G01N29/036 ,  G01N29/22 ,  G01N29/24 ,  H01J37/32

Abstract: A device can include a holder, a radical sensor holder, a radical sensor disposed within the radical sensor holder, an electrical transmission line that is electrically coupled with the radical sensor, a flange that is spaced apart from the radical sensor holder, and a connector extending from the flange in a direction opposite the radical sensor holder. The connector includes a housing, an electrical connection disposed within the housing, the electrical connection being electrically coupled with the electrical transmission line, an isolator that couples the housing with the electrical connection to electrically insulate the housing from the electrical connection, a first sealing member disposed between the isolator and the housing, and a second sealing member disposed between the isolator and the electrical connection.

公开(公告)号：US20230375506A1

公开(公告)日：2023-11-23

申请号：US18198123

申请日：2023-05-16

Applicant: Applied Materials, Inc.

Inventor： Mehran Moalem ,  Mehdi Balooch

IPC: G01N29/02 ,  G01N33/00 ,  H01J37/32

CPC classification number: G01N29/022 ,  G01N33/0027 ,  H01J37/32981 ,  G01N2291/014 ,  G01N2291/021 ,  H01J37/32357 ,  H01J2237/334

Abstract: A sensor device comprises a quartz crystal microbalance (QCM) and a coating on at least a portion of a surface of the QCM, wherein the coating selectively reacts with radicals of a target gas and does not react with stable molecules of the target gas. The QCM is configured such that a resonant frequency of the QCM changes in response to reaction of the radicals of the target gas with the coating, wherein the change in the resonant frequency of the QCM correlates to an amount of the radicals of the target gas that have reacted with the coating.