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公开(公告)号:US20210066592A1
公开(公告)日:2021-03-04
申请号:US17000457
申请日:2020-08-24
Applicant: Applied Materials, Inc.
Inventor: Feng Q. Liu , Nasrin Kazem , Jeffrey W. Anthis , Ghazal Saheli , David Thompson
Abstract: Methods of depositing a metal-organic oxide film by exposing a substrate surface to a metal-organic precursor and an oxidant are described. The metal-organic oxide film has the general formula MOxCy, wherein M comprises one or more of a transition metal, a lanthanide, or a boron group element, x is a whole number in a range of 1 to 6, and y is a number in a range of greater than 0 to 0.5.
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12.
公开(公告)号:US20180291052A1
公开(公告)日:2018-10-11
申请号:US15947695
申请日:2018-04-06
Applicant: Applied Materials, Inc.
Inventor: Jeffrey W. Anthis , Atashi Basu , David Thompson , Nasrin Kazem
CPC classification number: C07F15/065 , C23C16/18 , C23C16/45553
Abstract: Metal coordination complexes comprising at least one diazabutadiene based ligand having a structure represented by: where R1 and R4 are selected from the group consisting of C4-C10 alkyl groups; and R2 and R3 are each independently selected from the group consisting of H, C1-C6 alkyl, cycloalkyl, or aryl groups and the difference in the number of carbons in R2 and R3 is greater than or equal to 2. Processing methods using the metal coordination complexes are also described.
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