公开(公告)号：US20200272047A1

公开(公告)日：2020-08-27

申请号：US16405330

申请日：2019-05-07

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE ,  Yuriy MELNIK ,  Pravin K. NARWANKAR

IPC: G03F1/62 ,  C01B32/168 ,  C01B32/162 ,  C01B21/064 ,  B01J23/755 ,  B01J23/745

Abstract: Embodiments of the present disclosure generally relate to nanocomposite pellicles for extreme ultraviolet lithography systems. A pellicle comprises a plurality of carbon nanotubes arranged in a planar sheet formed from a plurality of metal catalyst droplets. The plurality of carbon nanotubes are coated in a first conformal layer of boron nitride. The pellicle may comprise a plurality of boron nitride nanotubes formed simultaneously as the first conformal layer of boron nitride. The pellicle may comprise a carbon nanotube coating disposed on the first conformal layer of boron nitride and a second conformal layer of boron nitride or boron nitride nanotubes disposed on the carbon nanotube coating. The pellicle is UV transparent and is non-reactive in hydrogen radical environments.

公开(公告)号：US20190284692A1

公开(公告)日：2019-09-19

申请号：US16356681

申请日：2019-03-18

Applicant: Applied Materials, Inc.

Inventor： Yuriy MELNIK ,  Sukti CHATTERJEE ,  Kaushal GANGAKHEDKAR ,  Jonathan FRANKEL ,  Lance A. SCUDDER ,  Pravin K. NARWANKAR ,  David Alexander BRITZ ,  David Masayuki ISHIKAWA

IPC: C23C16/455

Abstract: A gas distribution assembly for applying a coating on an interior of a plurality of components includes a support with a plurality of component cavities formed within the support. Each component cavity corresponds to a respective component to fluidly couple with an interior of the respective component. A first gas source flow line is fluidly coupled with each of the component cavities to provide a first gas from a first gas source to each of the component cavities, and a second gas source flow line is fluidly coupled with each of the component cavities to provide a second gas from a second gas source to each of the component cavities.

公开(公告)号：US20190093232A1

公开(公告)日：2019-03-28

申请号：US16043998

申请日：2018-07-24

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE

IPC: C23C16/56 ,  C23C16/22 ,  C23C16/455

Abstract: Apparatus and methods are disclosed to provide arrays of substantially oxide-free structures, such as titanium nanotubes or microwells. In one aspect, a hot wire chemical vapor deposition (HWCVD) chamber includes a metal chamber liner manufactured from one or more of aluminum (Al), lithium (Li), magnesium (Mg), calcium (Ca), zirconium (Zr), strontium (Sr), cerium (Ce), barium (Ba), beryllium (Be), lanthanum (La), thorium (Th), and alloys thereof. In one aspect, a method includes positioning a substrate having an array of titanium oxide structures with an oxide layer on surfaces thereof in the HWCVD chamber having the metal chamber liner, exposing the titanium oxide structures with the oxide layer on surfaces thereof to hydrogen (H) radicals, and removing the oxide layer to form well-ordered titanium structures.

公开(公告)号：US20190093214A1

公开(公告)日：2019-03-28

申请号：US16053083

申请日：2018-08-02

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE

IPC: C23C16/02 ,  C12Q1/6869 ,  C23C16/30

Abstract: Methods are disclosed to provide arrays of substantially oxide-free or uncontrolled oxide-free structures, such as titanium nanotubes or microwells. In one aspect, the method includes plasma treating the structure having an oxide layer thereon to weaken the bonds in the oxide layer and then bombarding the oxide layer having weakened bonds with hydrogen radicals to remove the oxide layer to form a titanium layer. The cyclic plasma treatment and hydrogen radical exposure processes are generally repeated until the oxide layer is removed from the structure. Arrays of titanium structures manufactured according to the described methods are well controlled and have improved device performance since the oxide layer has been removed and the signal-to-noise ratio of the device has been optimized for improved sensing.

公开(公告)号：US20230002897A1

公开(公告)日：2023-01-05

申请号：US17939655

申请日：2022-09-07

Applicant: Applied Materials, Inc.

Inventor： Kenichi OHNO ,  Eric H. LIU ,  Sukti CHATTERJEE ,  Yuriy MELNIK ,  Thomas KNISLEY ,  David Alexander BRITZ ,  Lance A. SCUDDER ,  Pravin K. NARWANKAR

IPC: C23C16/455 ,  C23C16/02 ,  C23C16/56 ,  C23C16/40

Abstract: Embodiments of the present disclosure generally relate to protective coatings on substrates and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on a substrate includes depositing a chromium oxide layer containing amorphous chromium oxide on a surface of the substrate during a first vapor deposition process and heating the substrate containing the chromium oxide layer comprising the amorphous chromium oxide to convert at least a portion of the amorphous chromium oxide to crystalline chromium oxide during a first annealing process. The method also includes depositing an aluminum oxide layer containing amorphous aluminum oxide on the chromium oxide layer during a second vapor deposition process and heating the substrate containing the aluminum oxide layer disposed on the chromium oxide layer to convert at least a portion of the amorphous aluminum oxide to crystalline aluminum oxide during a second annealing process.

公开(公告)号：US20220298920A1

公开(公告)日：2022-09-22

申请号：US17832568

申请日：2022-06-03

Applicant: Applied Materials, Inc.

Inventor： Yuriy MELNIK ,  Sukti CHATTERJEE ,  Kaushal GANGAKHEDKAR ,  Jonathan FRANKEL ,  Lance A. SCUDDER ,  Pravin K. NARWANKAR ,  David Alexander BRITZ ,  Thomas KNISLEY ,  Mark SALY ,  David THOMPSON

IPC: F01D5/28 ,  C23C16/455 ,  C23C16/34 ,  C23C16/40 ,  C23C16/30 ,  C23C16/56 ,  F01D9/02 ,  F01D25/12 ,  F01D25/28 ,  F23R3/28

Abstract: Methods for forming protective coatings on aerospace components are provided. In one or more embodiments, the method includes exposing an aerospace component to a first precursor and a first reactant to form a first deposited layer on a surface of the aerospace component by a first deposition process (e.g., CVD or ALD), and exposing the aerospace component to a second precursor and a second reactant to form a second deposited layer on the first deposited layer by a second deposition process. The first deposited layer and the second deposited layer have different compositions from each other. The method also includes repeating the first deposition process and the second deposition process to form a nanolaminate film stack having from 2 pairs to about 1,000 pairs of the first deposited layer and the second deposited layer consecutively deposited on each other.

公开(公告)号：US20220081763A1

公开(公告)日：2022-03-17

申请号：US17477430

申请日：2021-09-16

Applicant: Applied Materials, Inc.

Inventor： Nitin DEEPAK ,  Sarin Sundar JAINNAGAR KUPPUSWAMY ,  Sankalp PATIL ,  Sukti CHATTERJEE ,  David Masayuki ISHIKAWA ,  Prerna Sonthalia GORADIA ,  David Alexander BRITZ ,  Lance A. SCUDDER

IPC: C23C16/40 ,  C23C14/08 ,  C23C16/455 ,  F02C6/12

Abstract: Embodiments of the present disclosure generally relate to protective coatings on turbocharger components, such as turbine wheels and compressor wheels, and other rotary equipment components and methods for depositing the protective coatings on such components. In one or more embodiments, a coated turbocharger component is provided and includes a metallic substrate containing a nickel-based alloy or superalloy, a cobalt-based alloy or superalloy, a stainless steel, or a titanium-aluminum alloy and a protective coating disposed on the metallic substrate. The protective coating contains an aluminum oxide having a purity of greater than 99 atomic percent (at %). In some examples, the metallic substrate is a turbine wheel, a compressor wheel, an impeller, a fan blade, a disk, a heat shield, a pulley, or a shaft.

公开(公告)号：US20210381386A1

公开(公告)日：2021-12-09

申请号：US16897144

申请日：2020-06-09

Applicant: Applied Materials, Inc.

Inventor： Nitin DEEPAK ,  Sarin Sundar JAINNAGAR KUPPUSWAMY ,  Prerna Sonthalia GORADIA ,  Sukti CHATTERJEE ,  Lance A. SCUDDER ,  Kenichi OHNO ,  Yuriy MELNIK ,  David Alexander BRITZ ,  Sankalp PATIL ,  Ankur KADAM ,  Abhishek MANDAL

IPC: F01D5/28 ,  C23C16/40 ,  C23C16/06 ,  C23C16/455 ,  C23C14/08 ,  C23C14/14

Abstract: Embodiments of the present disclosure generally relate to oxide layer compositions for turbine engine components and methods for depositing the oxide layer compositions. In one or more embodiments, a turbine engine component includes a superalloy substrate and a bond coat disposed over the superalloy substrate. The turbine engine component includes an oxide layer disposed over the bond coat, where the oxide layer includes aluminum oxide and a metal dopant. The turbine engine component includes a thermal barrier coating disposed over the oxide layer.

公开(公告)号：US20210363630A1

公开(公告)日：2021-11-25

申请号：US16921577

申请日：2020-07-06

Applicant: Applied Materials, Inc.

Inventor： David Alexander BRITZ ,  Lance A. SCUDDER ,  Yuriy MELNIK ,  Sukti CHATTERJEE

IPC: C23C16/34 ,  C23C16/455 ,  C23C16/50 ,  C23C16/40 ,  C23C28/04

Abstract: Embodiments of the present disclosure generally relate to protective coatings on various substrates including aerospace components and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on an aerospace component includes forming an aluminum oxide layer on a surface of the aerospace component and depositing a boron nitride layer on or over the aluminum oxide layer during a vapor deposition process. In some examples, the method includes depositing a metal-containing catalytic layer on the aluminum oxide layer before depositing the boron nitride layer. The boron nitride layer can include hexagonal boron nitride (hBN).

公开(公告)号：US20210254223A1

公开(公告)日：2021-08-19

申请号：US17313863

申请日：2021-05-06

Applicant: Applied Materials, Inc.

Inventor： David BRITZ ,  Pravin K. NARWANKAR ,  David THOMPSON ,  Yuriy MELNIK ,  Sukti CHATTERJEE

IPC: C23C28/00 ,  F01D5/28 ,  F01D5/18 ,  C23C16/455

Abstract: Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component. The CMAS interception can occur while the engine is in operation in flight or in a testing or quality control environment. The metal oxide protective coating can be applied over other coatings, including Gd-zirconates (GZO) or yttria-stabilized zirconia (YSZ). The metal oxide protective coating is applied at original equipment manufacturers (OEM) and can also be applied in-situ using a gas injection system during engine use in-flight or during maintenance or quality testing. The metal oxide protective coating contains a rare earth element, aluminum, zirconium, chromium, or combinations thereof.