公开(公告)号：US10381252B2

公开(公告)日：2019-08-13

申请号：US16011978

申请日：2018-06-19

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Aaron Gawlik ,  Reza Saeidpourazar

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68 ,  H01L21/687

Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.

公开(公告)号：US10134623B2

公开(公告)日：2018-11-20

申请号：US15209497

申请日：2016-07-13

Applicant: BROOKS AUTOMATION, INC.

Inventor： Bing Yin ,  Jairo T. Moura ,  Vincent Tsang ,  Aaron Gawlik ,  Nathan Spiker

IPC: G06F19/00 ,  H01L21/68 ,  H01L21/687

Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.