-
公开(公告)号：US10564221B2
公开(公告)日：2020-02-18
申请号：US14540077
申请日：2014-11-13
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Nathan Spiker , Aaron Gawlik , Jayaraman Krishnasamy
Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
-
公开(公告)号：US11251059B2
公开(公告)日：2022-02-15
申请号：US16872864
申请日：2020-05-12
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Robert T. Caveney , Bing Yin , Nathan Spiker , Vincent W. Tsang
IPC: H01L21/677 , H01L21/68 , B25J9/00 , B25J11/00 , B25J9/10 , H01L21/67 , B25J9/12 , B25J9/16 , G05B19/418
Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
-
公开(公告)号：US11972965B2
公开(公告)日：2024-04-30
申请号：US17651183
申请日：2022-02-15
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Robert T. Caveney , Bing Yin , Nathan Spiker , Vincent W. Tsang
IPC: H01L21/677 , B25J9/00 , B25J9/10 , B25J9/12 , B25J9/16 , B25J11/00 , G05B19/418 , H01L21/67 , H01L21/68
CPC classification number: H01L21/67742 , B25J9/0027 , B25J9/107 , B25J9/126 , B25J9/1605 , B25J11/0095 , G05B19/4189 , H01L21/67161 , H01L21/67196 , H01L21/681
Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
-
公开(公告)号：US10651067B2
公开(公告)日：2020-05-12
申请号：US15880387
申请日：2018-01-25
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Robert T. Caveney , Bing Yin , Nathan Spiker , Vincent W. Tsang
IPC: H01L21/677 , H01L21/68 , B25J9/00 , B25J11/00 , B25J9/10 , H01L21/67 , B25J9/12 , B25J9/16 , G05B19/418
Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
-
Patent Agency Ranking
公开(公告)号：US11181582B2
公开(公告)日：2021-11-23
申请号：US16793623
申请日：2020-02-18
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Nathan Spiker , Aaron Gawlik , Jayaraman Krishnasamy
Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
-
公开(公告)号：US10978330B2
公开(公告)日：2021-04-13
申请号：US16197087
申请日：2018-11-20
Applicant: BROOKS AUTOMATION, INC.
Inventor： Bing Yin , Jairo T. Moura , Vincent Tsang , Aaron Gawlik , Nathan Spiker
IPC: G06F17/00 , H01L21/68 , H01L21/687
Abstract: A Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.
-
公开(公告)号：US11821953B2
公开(公告)日：2023-11-21
申请号：US17534179
申请日：2021-11-23
Applicant: Brooks Automation, Inc.
Inventor： Jairo T Moura , Nathan Spiker , Aaron Gawlik , Jayaraman Krishnasamy
CPC classification number: G01R31/34 , G01L3/22 , H02P6/10 , H02P23/0031 , H02P23/12 , H02P25/098
Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
-
公开(公告)号：US11776834B2
公开(公告)日：2023-10-03
申请号：US17229495
申请日：2021-04-13
Applicant: BROOKS AUTOMATION, INC.
Inventor： Bing Yin , Jairo Moura , Vincent Tsang , Aaron Gawlik , Nathan Spiker
IPC: G06F17/00 , H01L21/68 , H01L21/687
CPC classification number: H01L21/68 , H01L21/68707
Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.
-
公开(公告)号：US10134623B2
公开(公告)日：2018-11-20
申请号：US15209497
申请日：2016-07-13
Applicant: BROOKS AUTOMATION, INC.
Inventor： Bing Yin , Jairo T. Moura , Vincent Tsang , Aaron Gawlik , Nathan Spiker
IPC: G06F19/00 , H01L21/68 , H01L21/687
Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.
-
-
-
-
-
-
-
-
Search Results
9
records
(took 0.017 seconds)
