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公开(公告)号：US11972965B2
公开(公告)日：2024-04-30
申请号：US17651183
申请日：2022-02-15
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Robert T. Caveney , Bing Yin , Nathan Spiker , Vincent W. Tsang
IPC: H01L21/677 , B25J9/00 , B25J9/10 , B25J9/12 , B25J9/16 , B25J11/00 , G05B19/418 , H01L21/67 , H01L21/68
CPC classification number: H01L21/67742 , B25J9/0027 , B25J9/107 , B25J9/126 , B25J9/1605 , B25J11/0095 , G05B19/4189 , H01L21/67161 , H01L21/67196 , H01L21/681
Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
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公开(公告)号：US11338437B2
公开(公告)日：2022-05-24
申请号：US17103243
申请日：2020-11-24
Applicant: BROOKS AUTOMATION, INC.
Inventor： Aaron Gawlik , Jairo T. Moura
Abstract: A method for health assessment of a system including a transport apparatus including registering predetermined operating data embodying at least one dynamic performance variable output by the transport apparatus, determining a base value (CpkBase) characterized by a probability density function of each of the dynamic performance variable output, resolving from the transport apparatus in situ process motion commands of the apparatus controller and defining another predetermined motion set of the transport apparatus, registering predetermined operating data embodying the at least one dynamic performance variable output by the transport apparatus and determining with the processor another value (CpkOther) characterized by the probability density function of each of the dynamic performance variable output by the transport apparatus, and comparing the other value and the base value (CpkBase) for each of the dynamic performance variable output by the transport apparatus respectively corresponding to the predetermined motion base set and the other predetermined motion set.
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公开(公告)号：US20220155372A1
公开(公告)日：2022-05-19
申请号：US17534179
申请日：2021-11-23
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Nathan SPIKER , Aaron GAWLIK , Jayaraman KRISHNASAMY
Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
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公开(公告)号：US10651067B2
公开(公告)日：2020-05-12
申请号：US15880387
申请日：2018-01-25
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Robert T. Caveney , Bing Yin , Nathan Spiker , Vincent W. Tsang
IPC: H01L21/677 , H01L21/68 , B25J9/00 , B25J11/00 , B25J9/10 , H01L21/67 , B25J9/12 , B25J9/16 , G05B19/418
Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
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公开(公告)号：US10325795B2
公开(公告)日：2019-06-18
申请号：US15849002
申请日：2017-12-20
Applicant: BROOKS AUTOMATION, INC.
Inventor： Robert T. Caveney , Jayaraman Krishnasamy , Ulysses Gilchrist , Mitchell Drew , Jairo T. Moura
IPC: H01L21/677 , B25J9/04 , B25J11/00 , B25J18/04
Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
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Patent Agency Ranking
公开(公告)号：US10770325B2
公开(公告)日：2020-09-08
申请号：US16539819
申请日：2019-08-13
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Aaron Gawlik , Reza Saeidpourazar
IPC: H01L21/06 , H01L21/677 , H01L21/67 , H01L21/68 , H01L21/687
Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
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公开(公告)号：US10742092B2
公开(公告)日：2020-08-11
申请号：US14540058
申请日：2014-11-13
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Reza Saeidpourazar , Branden Gunn , Matthew W. Coady , Ulysses Gilchrist
IPC: H02K11/215 , H01L21/687 , H02K1/14 , H01L21/677 , H02K5/128 , H02K1/24 , H01L21/67
Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive, where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, at least one seal partition configured to isolate the isolated environment, and at least one sensor including a magnetic sensor member connected to the housing, at least one sensor track connected to the at least one rotor where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment.
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公开(公告)号：US10564221B2
公开(公告)日：2020-02-18
申请号：US14540077
申请日：2014-11-13
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Nathan Spiker , Aaron Gawlik , Jayaraman Krishnasamy
Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
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公开(公告)号：US10468936B2
公开(公告)日：2019-11-05
申请号：US15952595
申请日：2018-04-13
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Ulysses Gilchrist , Robert T. Caveney
Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.
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公开(公告)号：US11469126B2
公开(公告)日：2022-10-11
申请号：US17014575
申请日：2020-09-08
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Aaron Gawlik , Reza Saeidpourazar
IPC: H01L21/677 , H01L21/67 , H01L21/68 , H01L21/687
Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
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