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公开(公告)号：US08980374B2
公开(公告)日：2015-03-17
申请号：US12363348
申请日：2009-01-30
CPC分类号： C23C16/545 , B05D1/28 , B05D3/067 , B05D7/04 , B05D7/54 , B05D2252/02 , C23C14/562
摘要： A functional film having a particular organic film and a particular inorganic film is produced. The functional film is consistently produced and exhibits the intended performance. The functional film production method includes forming an organic film on a surface of a substrate, handling the substrate having the organic film formed thereon so that no member comes in contact with an organic film surface in vacuum until formation of an inorganic film, and forming the inorganic film by vacuum deposition on the organic film surface.
摘要翻译： 制备具有特定有机膜和特定无机膜的功能膜。 功能薄膜始终如一地产生并表现出预期的性能。 功能性膜制造方法包括在基板的表面上形成有机膜，处理其上形成有机膜的基板，使得在真空中没有成分与有机膜表面直接接触形成无机膜，并形成 无机膜通过真空沉积在有机膜表面上。
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公开(公告)号：US08133533B2
公开(公告)日：2012-03-13
申请号：US12363435
申请日：2009-01-30
IPC分类号： B05D3/12
CPC分类号： C23C16/545 , B05D1/28 , B05D3/067 , B05D7/04 , B05D7/52 , B05D2252/02 , B65H2406/31 , C23C14/562
摘要： The method for producing a functional film includes a step of forming an organic film on a surface of a substrate and a step of forming an inorganic film by vacuum deposition on a surface of the organic film to produce the functional film. Prior to forming the inorganic film, a member contacts the surface of the organic film in a vacuum chamber at portions where the organic film does not exhibit its functions.
摘要翻译： 功能膜的制造方法包括在基板的表面上形成有机膜的工序和通过真空蒸镀在有机膜的表面上形成无机膜的工序来制造功能膜。 在形成无机膜之前，在有机膜不具有其功能的部分，构件在真空室中接触有机膜的表面。
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公开(公告)号：US20090272322A1
公开(公告)日：2009-11-05
申请号：US12430555
申请日：2009-04-27
CPC分类号： C23C14/541 , B05D1/60 , B05D7/54 , B05D2252/02 , C23C14/562
摘要： A film depositing apparatus comprises: a transport unit that transports a substrate along a predetermined transport path; a first film deposition compartment that is provided with a first film depositing unit for forming an organic layer on a surface of the substrate; a second film deposition compartment that is disposed downstream of the first film deposition compartment in the transport path and which is provided with a second film depositing unit for forming an inorganic layer on top of the organic layer; and an evacuating unit that reduces the pressures within the first film deposition compartment and the second film deposition compartment.
摘要翻译： 一种胶片沉积装置，包括：沿着预定传送路径传送基板的传送单元; 第一膜沉积室，其设置有用于在所述基板的表面上形成有机层的第一膜沉积单元; 第二膜沉积室，其设置在所述输送路径中的所述第一膜沉积室的下游，并且设置有用于在所述有机层的顶部上形成无机层的第二膜沉积单元; 以及减少第一膜沉积室和第二膜沉积室内的压力的抽空单元。
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公开(公告)号：US08092600B2
公开(公告)日：2012-01-10
申请号：US11933658
申请日：2007-11-01
申请人： Jun Fujinawa , Norihiro Kadota
发明人： Jun Fujinawa , Norihiro Kadota
IPC分类号： C23C16/00 , H01L21/306
CPC分类号： C23C16/545 , C23C16/45578 , C23C16/507 , H01J37/321 , H01J37/3244 , H01J37/3277
摘要： The plasma apparatus includes a conveying unit for conveying a substrate in a conveying direction while being situated at a processing position, an elongated electric field forming unit for forming an induction electric field by a coil, opposed to the processing position, a power supply for supplying high frequency power to the coil, an elongated gas introducing unit and a separating unit for separating a region where the forming unit is arranged and a region where the introducing unit is arranged from each other in an airtight fashion, having an elongated dielectric window arranged between the processing position and the forming unit. The forming unit, the introducing unit and the dielectric window are arranged in such a way that there longitudinal directions are matched with a width direction of the substrate being conveyed, and orthogonal to the conveying direction.
摘要翻译： 等离子体装置包括：输送单元，用于在位于处理位置的输送方向上输送基板;细长电场形成单元，用于通过与处理位置相对的线圈形成感应电场;电源，用于供应 线圈的高频功率，细长气体导入单元和分离单元，用于将形成单元布置的区域和导入单元以气密方式彼此排列的区域分离，所述区域具有布置在 处理位置和成形单元。 形成单元，引入单元和电介质窗口被布置成使得纵向方向与被输送的基板的宽度方向并且与输送方向正交地配合。
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公开(公告)号：US20080102222A1
公开(公告)日：2008-05-01
申请号：US11933658
申请日：2007-11-01
申请人： Jun Fujinawa , Norihiro Kadota
发明人： Jun Fujinawa , Norihiro Kadota
CPC分类号： C23C16/545 , C23C16/45578 , C23C16/507 , H01J37/321 , H01J37/3244 , H01J37/3277
摘要： The plasma apparatus includes a conveying unit for conveying a substrate in a conveying direction while being situated at a processing position, an elongated electric field forming unit for forming an induction electric field by a coil, opposed to the processing position, a power supply for supplying high frequency power to the coil, an elongated gas introducing unit and a separating unit for separating a region where the forming unit is arranged and a region where the introducing unit is arranged from each other in an airtight fashion, having an elongated dielectric window arranged between the processing position and the forming unit. The forming unit, the introducing unit and the dielectric window are arranged in such a way that there longitudinal directions are matched with a width direction of the substrate being conveyed, and orthogonal to the conveying direction.
摘要翻译： 等离子体装置包括：输送单元，用于在位于处理位置的输送方向上输送基板;细长电场形成单元，用于通过与处理位置相对的线圈形成感应电场;电源，用于供应 线圈的高频功率，细长气体导入单元和分离单元，用于将形成单元布置的区域和导入单元以气密方式彼此排列的区域分离，所述区域具有布置在 处理位置和成形单元。 形成单元，引入单元和电介质窗口被布置成使得纵向方向与被输送的基板的宽度方向并且与输送方向正交地配合。
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公开(公告)号：US5899129A
公开(公告)日：1999-05-04
申请号：US620249
申请日：1996-03-22
申请人： Kunihiro Sumida , Norihiro Kadota , Masashi Aoki
发明人： Kunihiro Sumida , Norihiro Kadota , Masashi Aoki
CPC分类号： B26D7/18 , B26D7/1863 , B26D2007/0068 , B65H2301/41487 , Y10T83/18 , Y10T83/207 , Y10T83/2074 , Y10T83/2196 , Y10T83/6491 , Y10T83/659
摘要： A trimming processing device automatically processes trimmings generated when a running wide web is slit in the running direction of the web into a plurality of strips having desired widths. A trimming cutting unit movable in the transverse direction of the web cuts the trimmings in the transverse direction of the trimmings, and a trimming conveyor unit movable in the transverse direction of the web conveys the trimmings away from the web. The positions of the trimming cutting unit and the trimming conveyor unit are controlled according to the position of the trimmings which varies according to the width of the web and the width and the number of the strips to be slit from the web.
摘要翻译： 修剪加工装置自动地处理当运行的宽幅材在幅材的运行方向上被切割成具有期望宽度的多个条带时产生的裁剪。 可沿着幅材的横向方向移动的修剪切割单元沿着装饰件的横向方向切割饰边，并且可沿着幅材的横向方向移动的修剪输送单元将幅材远离纸幅传送。 修剪切割单元和修剪输送单元的位置根据根据幅材的宽度和宽度以及从幅材切割的条的数量而变化的装饰的位置被控制。
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