Plasma apparatus and plasma processing method
    2.
    发明授权
    Plasma apparatus and plasma processing method 有权
    等离子体装置和等离子体处理方法

    公开(公告)号:US08092600B2

    公开(公告)日:2012-01-10

    申请号:US11933658

    申请日:2007-11-01

    IPC分类号: C23C16/00 H01L21/306

    摘要: The plasma apparatus includes a conveying unit for conveying a substrate in a conveying direction while being situated at a processing position, an elongated electric field forming unit for forming an induction electric field by a coil, opposed to the processing position, a power supply for supplying high frequency power to the coil, an elongated gas introducing unit and a separating unit for separating a region where the forming unit is arranged and a region where the introducing unit is arranged from each other in an airtight fashion, having an elongated dielectric window arranged between the processing position and the forming unit. The forming unit, the introducing unit and the dielectric window are arranged in such a way that there longitudinal directions are matched with a width direction of the substrate being conveyed, and orthogonal to the conveying direction.

    摘要翻译: 等离子体装置包括:输送单元,用于在位于处理位置的输送方向上输送基板;细长电场形成单元,用于通过与处理位置相对的线圈形成感应电场;电源,用于供应 线圈的高频功率,细长气体导入单元和分离单元,用于将形成单元布置的区域和导入单元以气密方式彼此排列的区域分离,所述区域具有布置在 处理位置和成形单元。 形成单元,引入单元和电介质窗口被布置成使得纵向方向与被输送的基板的宽度方向并且与输送方向正交地配合。

    PLASMA APPARATUS AND PLASMA PROCESSING METHOD
    3.
    发明申请
    PLASMA APPARATUS AND PLASMA PROCESSING METHOD 有权
    等离子体装置和等离子体处理方法

    公开(公告)号:US20080102222A1

    公开(公告)日:2008-05-01

    申请号:US11933658

    申请日:2007-11-01

    IPC分类号: C23C16/50 H05H1/24

    摘要: The plasma apparatus includes a conveying unit for conveying a substrate in a conveying direction while being situated at a processing position, an elongated electric field forming unit for forming an induction electric field by a coil, opposed to the processing position, a power supply for supplying high frequency power to the coil, an elongated gas introducing unit and a separating unit for separating a region where the forming unit is arranged and a region where the introducing unit is arranged from each other in an airtight fashion, having an elongated dielectric window arranged between the processing position and the forming unit. The forming unit, the introducing unit and the dielectric window are arranged in such a way that there longitudinal directions are matched with a width direction of the substrate being conveyed, and orthogonal to the conveying direction.

    摘要翻译: 等离子体装置包括:输送单元,用于在位于处理位置的输送方向上输送基板;细长电场形成单元,用于通过与处理位置相对的线圈形成感应电场;电源,用于供应 线圈的高频功率,细长气体导入单元和分离单元,用于将形成单元布置的区域和导入单元以气密方式彼此排列的区域分离,所述区域具有布置在 处理位置和成形单元。 形成单元,引入单元和电介质窗口被布置成使得纵向方向与被输送的基板的宽度方向并且与输送方向正交地配合。

    Web winding method
    7.
    发明授权
    Web winding method 有权
    Web卷绕方法

    公开(公告)号:US08418949B2

    公开(公告)日:2013-04-16

    申请号:US13017653

    申请日:2011-01-31

    申请人: Norihiro Kadota

    发明人: Norihiro Kadota

    IPC分类号: B65H18/08

    摘要: In a web winding method for winding a plurality of cut webs in rolls while pressure is applied thereto from rider rollers, among a web grouping, which is constructed by aligning the plurality of webs in a sideways direction, two or more first divided rider rollers are disposed in a widthwise direction with respect to left end and right end webs, and together therewith, individual second divided rider rollers are disposed with respect to webs apart from the left end web and the right end web, and the plurality of webs are wound.

    摘要翻译: 在卷绕卷绕方法中,在从辊子辊施加压力的同时卷绕多个切割的卷筒纸的卷绕方法中,在沿着横向方向对齐多个卷筒纸的卷筒纸组中,两个或更多个第一分割的滚轮是 相对于左端和右端腹板在宽度方向上布置,并且与此同时,单独的第二分开的骑手辊相对于远离左端腹板和右端腹板的腹板设置,并且多个腹板被卷绕。