公开(公告)号：US10964505B2

公开(公告)日：2021-03-30

申请号：US15772132

申请日：2016-11-15

Applicant: CAVENDISH KINETICS, INC.

Inventor： Robertus Petrus Van Kampen ,  Lance Barron ,  Roberto Gaddi ,  Richard L. Knipe

IPC: H01H59/00 ,  H01L23/60 ,  H01H1/00

Abstract: The present disclosure generally relates to a MEMS device for reducing ESD. A contacting switch is used to ensure that there is a closed electrical contact between two electrodes even if there is no applied bias voltage.

公开(公告)号：US10566163B2

公开(公告)日：2020-02-18

申请号：US15770705

申请日：2016-11-15

Applicant: CAVENDISH KINETICS, INC.

Inventor： Robertus Petrus Van Kampen ,  Richard L. Knipe ,  Mickael Renault ,  Shibajyoti Ghosh Dastider ,  Jacques Marcel Muyango

IPC: H01H59/00 ,  B81B3/00 ,  H01G5/16

Abstract: A MEMS switch contains an RF electrode 102, pull-down electrodes 104 and anchor electrodes 108 located on a substrate 101. A plurality of islands 226 are provided in the pull-down electrode and electrically isolated therefrom. On top of the RF electrode is the RF contact 206 to which the MEMS-bridge 212, 214 forms an ohmic contact in the pulled-down state. The pull-down electrodes 104 are covered with a dielectric layer 202 to avoid a short-circuit between the bridge and the pull-down electrode. Contact stoppers 224 are disposed on the dielectric layer 202 at locations corresponding to the islands 226, and the resulting gap between the bridge and the dielectric layer in the pulled-down state reduces dielectric charging. In alternative embodiments, the contact stoppers are provide within the dielectric layer 202 or disposed on the islands themselves and under the dielectric layer. The switch provides good controllability of the contact resistance of MEMS switches over a wide voltage operating range.

公开(公告)号：US09711290B2

公开(公告)日：2017-07-18

申请号：US15024931

申请日：2014-09-24

Applicant: CAVENDISH KINETICS, INC.

Inventor： Mickael Renault ,  Vikram Joshi ,  Robertus Petrus Van Kampen ,  Thomas L. Maguire ,  Richard L. Knipe

IPC: H01L29/84 ,  H01G5/16 ,  H01H59/00 ,  B81B3/00 ,  B81C1/00 ,  H01G5/011

CPC classification number: H01G5/16 ,  B81B3/0086 ,  B81B2201/0221 ,  B81B2203/04 ,  B81C1/00166 ,  B81C2201/0104 ,  B81C2201/0109 ,  H01G5/011 ,  H01H59/0009

Abstract: The present invention generally relates to a MEMS device and a method of manufacture thereof. The RF electrode, and hence, the dielectric layer thereover, has a curved upper surface that substantially matches the contact area of the bottom surface of the movable plate. As such, the movable plate is able to have good contact with the dielectric layer and thus, good capacitance is achieved.

公开(公告)号：US09443658B2

公开(公告)日：2016-09-13

申请号：US14420152

申请日：2013-08-07

Applicant: CAVENDISH KINETICS, INC.

Inventor： Robertus Petrus Van Kampen ,  Richard L. Knipe

IPC: H01G5/16 ,  H01G5/38

CPC classification number: H01G5/16 ,  H01G5/18 ,  H01G5/38 ,  H01L27/01 ,  H01L27/0207 ,  H01L27/0805 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/19041 ,  H01L2924/19104 ,  H01L2924/0001

Abstract: A variable capacitor (300) comprises cells (200, 400) that have an RF electrode (202, 402) coupled to a bond pad (30). Each cell comprises a plurality of MEMS devices (100) the capacitance of which can be changed by means of a movable electrode. The MEMS devices are placed in a sealed cavity of the cell and are arranged next to each other along the length of the RF electrode of the cell. The RF electrode of each cell can be trimmed so as to obtain an RF line (402) and a further ground electrode (404) and so as to scale the RF capacitance of the cell without impacting the mechanical performance of the MEMS cells. Each cell has the same control capacitance irrespective of the RF capacitance. This allows each cell to use the same isolation resistor required for RF operation and thus each cell has the same parasitic capacitance. This allows the CMOS control circuit to be optimized and the dynamic performance of the cells to be matched.

Abstract translation: 可变电容器（300）包括具有耦合到接合焊盘（30）的RF电极（202,402）的电池（200,400）。 每个单元包括多个MEMS器件（100），其电容可以通过可移动电极来改变。 MEMS器件被放置在电池的密封空腔中并且沿着电池的RF电极的长度彼此相邻地布置。 可以对每个单元的RF电极进行修整，以获得RF线（402）和另外的接地电极（404），以便在不影响MEMS单元的机械性能的情况下缩放电池的RF电容。 每个单元都具有与RF电容无关的相同的控制电容。 这允许每个单元使用RF操作所需的相同的隔离电阻，因此每个单元具有相同的寄生电容。 这允许CMOS控制电路被优化并且电池的动态性能匹配。

公开(公告)号：US09336953B2

公开(公告)日：2016-05-10

申请号：US13916675

申请日：2013-06-13

Applicant: CAVENDISH KINETICS INC.

Inventor： Cong Quoc Khieu ,  Vikram Joshi ,  Richard L. Knipe

IPC: H01G5/16 ,  B81B7/02 ,  H01G5/18 ,  H01G5/38 ,  H01H59/00

CPC classification number: H01G5/16 ,  B81B7/02 ,  H01G5/18 ,  H01G5/38 ,  H01H59/0009

Abstract: The present invention generally relates to methods for increasing the lifetime of MEMS devices by reducing the number of movements of a switching element in the MEMS device. Rather than returning to a ground state between cycles, the switching element can remain in the same state if both cycles necessitate the same capacitance. For example, if in both a first and second cycle, the switching element of the MEMS device is in a state of high capacitance the switching element can remain in place between the first and second cycle rather than move to the ground state. Even if the polarity of the capacitance is different in successive cycles, the switching element can remain in place and the polarity can be switched. Because the switching element remains in place between cycles, the switching element, while having the same finite number of movements, should have a longer lifetime.

Abstract translation: 本发明一般涉及通过减少MEMS器件中的开关元件的移动次数来增加MEMS器件寿命的方法。 不是在循环之间返回到基态，如果两个循环都需要相同的电容，则开关元件可以保持在相同的状态。 例如，如果在第一和第二周期中，MEMS器件的开关元件处于高电容的状态，则开关元件可以在第一和第二周期之间保持就位而不是移动到基态。 即使电容的极性在连续的循环中不同，开关元件也可以保持在适当的位置，并且可以切换极性。 因为开关元件在周期之间保持原位，所以开关元件虽然具有相同的有限数量的运动，应该具有更长的寿命。

公开(公告)号：US08786933B2

公开(公告)日：2014-07-22

申请号：US13941851

申请日：2013-07-15

Applicant: Cavendish Kinetics Inc.

Inventor： Charles Gordon Smith ,  Richard L. Knipe

IPC: G02B26/00 ,  G02B26/08 ,  B81C1/00

CPC classification number: G02B26/0833 ,  B81B2201/042 ,  B81C1/00317 ,  B81C2203/0136 ,  B81C2203/0145 ,  G02B26/0841

Abstract: The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.

Abstract translation: 目前的公开内容显示了如何制造用于投影显示器的反射镜的快速切换阵列。 因为反射镜在连接到下面的弹簧支撑件的中间没有通孔，所以具有改善的对比度，这是由于不像现有技术那样从腿部或通孔没有光散射。 因为没有支撑触点，镜子可以做得更小，从而可以用较小的像素来制作更高密度的显示器。 另外，由于没有来自任何支撑弹簧支撑件的恢复力，因为粘附，反射镜保持在面向一个或另一个方向的位置。 这意味着不需要使用电压将镜子保持在适当的位置。 这意味着运行显示器需要较少的电力。