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11.发明申请Monolithic Piezo Actuator With a Change in the Electrode Structure in the Junction Region, and Use of the Piezo Actuator 有权连接区域电极结构发生变化的单片压电致动器以及压电致动器的使用公开(公告)号：US20080185938A1
公开(公告)日：2008-08-07
申请号：US11996601
申请日：2006-07-26
IPC分类号： H01L41/083 , H01L41/187 , H01L41/047
CPC分类号： H01L41/257 , H01L41/0471 , H01L41/0838 , H01L41/273 , Y10T29/42
摘要： A piezo actuator in a monolithic multilayer design, has at least one piezoelectrically active stack element, wherein the stack element has stacked piezoceramic layers made of piezoceramic material and electrode layers arranged between the piezoceramic layers, at least one piezoelectrically inactive terminating region arranged above the stack element, and at least one junction region arranged between the stack element and the terminating region, wherein the stack element, the terminating region and the junction region are connected to one another to form a monolithic total stack. The junction region has stacked piezoceramic layers and electrode layers arranged between the piezoceramic layers, and the piezoceramic layers and the electrode layers are in a form and are arranged on one another such that in the stack direction of the junction region one piezoelectrically active area per junction piezoceramic layer is successively changed from piezoceramic layer to piezoceramic layer.
摘要翻译： 一种整体式多层设计中的压电致动器，具有至少一个压电有源堆叠元件，其中堆叠元件具有由压电陶瓷材料制成的堆叠的压电陶瓷层和布置在压电陶瓷层之间的电极层，至少一个布置在堆叠之上的压电非活化终止区 元件，以及布置在堆叠元件和终止区域之间的至少一个结区域，其中堆叠元件，端接区域和结区域彼此连接以形成整体堆叠。 接合区域具有堆叠的压电陶瓷层和布置在压电陶瓷层之间的电极层，并且压电陶瓷层和电极层呈一种形式并且彼此布置，使得在接合区域的堆叠方向上每个结的一个压电有源面积 压电陶瓷层从压电陶瓷层依次改变为压电陶瓷层。
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公开(公告)号：US08704430B2
公开(公告)日：2014-04-22
申请号：US12376346
申请日：2007-08-06
申请人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
发明人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
IPC分类号： H01L41/083
CPC分类号： H01L41/273 , H01L41/0838
摘要： A piezoceramic multilayer actuator has a first sub-stack (12, 14, 16) with a plurality of piezoceramic layers (22) and at least one internal electrode (24, 26), the piezoceramic layers (22) and the at least one internal electrode (24, 26) being laminated in an alternating manner, a second sub-stack (12, 14, 16) has a plurality of piezoceramic layers (22) and at least one internal electrode (24, 26), the piezoceramic layers (22) and the at least one internal electrode (24, 26) being laminated in an alternating manner, and a connection layer (40) arranged between the first sub-stack (12, 14, 16) and the second sub-stack (12, 14, 16), wherein the connection layer (40) is set up by a multitude of single connection points or connection lines (44) or other connection regions.
摘要翻译： 压电陶瓷多层致动器具有具有多个压电陶瓷层（22）和至少一个内部电极（24,26）的第一子堆叠（12,14,16），所述压电陶瓷层（22）和所述至少一个内部 电极（24,26）以交替的方式层压，第二子堆叠（12,14,16）具有多个压电陶瓷层（22）和至少一个内部电极（24,26），所述压电陶瓷层 22）和所述至少一个内部电极（24,26）以交替的方式层叠，以及布置在所述第一子堆叠（12,14）和所述第二子堆叠（12）之间的连接层（40） ，14,16），其中所述连接层（40）由多个单个连接点或连接线（44）或其它连接区域设置。
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13.发明授权Piezoceramic multilayer actuator and method of manufacturing a piezoceramic multilayer actuator 有权压电陶瓷多层致动器和制造压电陶瓷多层致动器的方法公开(公告)号：US07948150B2
公开(公告)日：2011-05-24
申请号：US12031385
申请日：2008-02-14
申请人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
发明人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
IPC分类号： H01L41/053
CPC分类号： H01L41/273 , H01L41/0838 , H01L41/1876
摘要： A piezoceramic multilayer actuator (10) includes a plurality of green layers, wherein the green layers are to be converted to piezoceramic layers (12) with a piezoceramic material in a subsequent step of heating. A security layer material mixture with a second material (32) and particles (30) embedded in the second material (32) is provided, wherein the particles (30) have a third material different from the first material and different from the second material (32). The security layer material mixture is laminated between two piezoceramic layers (12), thereby forming a green stack. The green stack is heated to a sintering temperature, wherein the green layers are converted to the piezoceramic layers (12), and wherein a chemical reaction of the third material degrades the mechanical connection of the piezoceramic layers (12) by the security layer (20).
摘要翻译： 压电陶瓷多层致动器（10）包括多个绿色层，其中在随后的加热步骤中，将绿色层用压电陶瓷材料转换成压电陶瓷层（12）。 提供了具有第二材料（32）和嵌入第二材料（32）中的颗粒（30）的安全层材料混合物，其中所述颗粒（30）具有不同于第一材料并且不同于第二材料 32）。 将安全层材料混合物层压在两个压电陶瓷层（12）之间，由此形成一个绿色叠层。 将绿色叠层加热至烧结温度，其中绿色层转变为压电陶瓷层（12），并且其中第三材料的化学反应降低了压电陶瓷层（12）与安全层（20）的机械连接 ）。
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14.发明申请公开(公告)号：US20100019620A1
公开(公告)日：2010-01-28
申请号：US12520888
申请日：2007-12-19
CPC分类号： H01L41/0533 , H01L41/0838 , H01L41/23 , H01L41/273 , Y10T29/42
摘要： In a piezoelectric multilayer actuator (1) having micromechanical relief zones (30) and an insulation layer (40) as well as in a method for producing said actuator, as a result of the micromechanical relief zones (30), poling cracks are concentrated in these relief regions (30). This makes it possible to provide the sections I, II, III of the multilayer actuator (1) with an insulation layer (40) which only has an extension behaviour similar to the multilayer actuator (1) without poling cracks.
摘要翻译： 在具有微机械卸载区（30）和绝缘层（40）的压电多层致动器（1）中以及用于制造所述致动器的方法中，由于微机械卸载区（30），极化裂纹集中在 这些浮雕区域（30）。 这使得可以向多层致动器（1）的部分I，II，III提供仅具有类似于多层致动器（1）的延伸行为的绝缘层（40），而不会发生极化的裂纹。
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15.发明申请Piezoceramic Multilayer Actuator and Method of Manufacturing a Piezoceramic Multilayer Actuator 有权压电陶瓷多层致动器和制造压电陶瓷多层致动器的方法公开(公告)号：US20080218028A1
公开(公告)日：2008-09-11
申请号：US12031385
申请日：2008-02-14
申请人： Bernhard Dollgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
发明人： Bernhard Dollgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
IPC分类号： H01L41/083 , H01L41/187 , H01L41/24
CPC分类号： H01L41/273 , H01L41/0838 , H01L41/1876
摘要： In a method of manufacturing a piezoceramic multilayer actuator (10), a plurality of green layers is provided, wherein the green layers are to be converted to piezoceramic layers (12) with a piezoceramic material in a subsequent step of heating. A security layer material mixture with a second material (32) and particles (30) embedded in the second material (32) is provided, wherein the particles (30) have a third material different from the first material and different from the second material (32). The security layer material mixture is laminated between two piezoceramic layers (12), thereby forming a green stack. The green stack is heated to a sintering temperature, wherein the green layers are converted to the piezoceramic layers (12), and wherein a chemical reaction of the third material degrades the mechanical connection of the piezoceramic layers (12) by the security layer (20).
摘要翻译： 在制造压电陶瓷多层致动器（10）的方法中，提供多个生坯层，其中在随后的加热步骤中，将绿色层用压电陶瓷材料转换成压电陶瓷层（12）。 提供了具有第二材料（32）和嵌入第二材料（32）中的颗粒（30）的安全层材料混合物，其中所述颗粒（30）具有不同于第一材料并且不同于第二材料 32）。 将安全层材料混合物层压在两个压电陶瓷层（12）之间，由此形成一个绿色叠层。 将绿色叠层加热至烧结温度，其中绿色层转变为压电陶瓷层（12），并且其中第三材料的化学反应降低了压电陶瓷层（12）与安全层（20）的机械连接 ）。
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16.发明申请Monolithic Piezoactuator With Rotation of the Polarisation in the Transition Region and Use of Said Piezoactuator 有权过渡区域极化旋转的单片压电元件及所述压电元件的使用公开(公告)号：US20080203857A1
公开(公告)日：2008-08-28
申请号：US11996573
申请日：2006-07-26
IPC分类号： H01L41/083 , H01L41/047 , H01L41/187
CPC分类号： H01L41/257 , H01L41/0471 , H01L41/0838 , H01L41/273 , Y10T29/42
摘要： A piezoactuator has at least one piezoelectric-active partial stack with piezoceramic layers arranged one over the other with piezoceramic material and electrode layers arranged between the piezoceramic layers, at least one piezoelectric-inactive terminating region arranged over the partial stack and at least one transition region between the partial stack and the terminating region, the partial stack, the terminating region and the transition region all connected together to give a monolithic complete stack. The transition region has a transition region stack with piezoceramic layers arranged one over the other and electrode layers arranged between the piezoceramic layers both have a form and are arranged on each other such that, in the stack direction of the transition region stack, from piezoceramic layer to piezoceramic layer there is a successive rotation about a main axis of the polarity and/or a rotation of the main axis of the electric control is provided.
摘要翻译： 压电致动器具有至少一个压电活性部分叠层，压电陶瓷层彼此排列，压电陶瓷材料和布置在压电陶瓷层之间的电极层，至少一个排列在部分叠层上的压电非活化终止区域和至少一个过渡区域 在部分堆叠和终止区域之间，部分堆叠，终止区域和过渡区域全部连接在一起，以提供整体堆叠。 过渡区域具有过渡区堆叠，其中压电陶瓷层彼此排列，并且布置在压电陶瓷层之间的电极层都具有一种形式并且彼此排列，使得在过渡区堆叠的堆叠方向上，从压电陶瓷层 对于压电陶瓷层，存在围绕极性的主轴的连续旋转和/或提供电控制的主轴的旋转。
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公开(公告)号：US09112152B2
公开(公告)日：2015-08-18
申请号：US13702128
申请日：2011-06-06
申请人： Katrin Benkert , Hermann Bödinger , Stefan Denneler , Harald Johannes Kastl , Andreas Lenk , Carsten Schuh
发明人： Katrin Benkert , Hermann Bödinger , Stefan Denneler , Harald Johannes Kastl , Andreas Lenk , Carsten Schuh
IPC分类号： H01L41/273 , H01L41/293 , H01L41/083 , H01L41/27
CPC分类号： H01L41/273 , H01L41/0472 , H01L41/083 , H01L41/27 , H01L41/293 , Y10T29/42
摘要： A method for producing a piezo actuator includes: providing a green stack including alternately successive green films and inner electrode layers; forming trenches on the outside green stack in areas in which the inner electrode layers are intended to be electrically insulated from the corresponding outer electrodes, the trenches shortening the inner electrode layers from the outside of the green stack toward the inside; filling the trenches with an electrically insulating slurry; further processing the green stack, including filling the trenches with slurry, such that the green films produce piezo electric layers and the green stack produces a piezo stack; mounting two outer electrodes on the outside of the piezo stack, such that the two outer electrodes are alternately electrically connected to the inner electrode layers. The trenches may be filled with the slurry using one of the following methods; screen printing, immersion, spraying, or vacuum infiltration.
摘要翻译： 一种制造压电致动器的方法包括：提供包括交替连续的绿色膜和内部电极层的绿色堆叠; 在内部电极层与对应的外部电极电绝缘的区域中的外部绿色堆叠上形成沟槽，沟槽将内部电极层从绿色堆叠的外部朝向内部缩短; 用电绝缘浆料填充沟槽; 进一步处理绿色堆叠，包括用浆料填充沟槽，使得绿色膜产生压电层，绿色堆叠产生压电堆叠; 将两个外部电极安装在压电叠层的外部，使得两个外部电极交替地电连接到内部电极层。 可以使用以下方法之一用泥浆填充沟槽; 丝网印刷，浸渍，喷涂或真空渗透。
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18.发明授权Piezoceramic multilayer actuator with stress relief sections and insulation layers in sections without relief zones 有权具有应力消除部分和绝缘层的压电陶瓷多层致动器，不带减压区段公开(公告)号：US08106565B2
公开(公告)日：2012-01-31
申请号：US12520888
申请日：2007-12-19
IPC分类号： H01L41/083
CPC分类号： H01L41/0533 , H01L41/0838 , H01L41/23 , H01L41/273 , Y10T29/42
摘要： In a piezoelectric multilayer actuator (1) having micromechanical relief zones (30) and an insulation layer (40) as well as in a method for producing said actuator, as a result of the micromechanical relief zones (30), poling cracks are concentrated in these relief regions (30). This makes it possible to provide the sections I, II, III of the multilayer actuator (1) with an insulation layer (40) which only has an extension behavior similar to the multilayer actuator (1) without poling cracks.
摘要翻译： 在具有微机械卸载区（30）和绝缘层（40）的压电多层致动器（1）中以及用于制造所述致动器的方法中，由于微机械卸载区（30），极化裂纹集中在 这些浮雕区域（30）。 这使得可以向多层致动器（1）的部分I，II，III提供仅具有类似于多层致动器（1）的延伸行为的绝缘层（40），而不会发生极化裂纹。
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19.发明授权公开(公告)号：US07851974B2
公开(公告)日：2010-12-14
申请号：US12032465
申请日：2008-02-15
申请人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
发明人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
CPC分类号： H01L41/0838 , H01L41/273 , Y10T29/42
摘要： A piezoceramic multilayer actuator (10) has a plurality of piezoceramic layers (12), a security layer (20) and a plurality of inner electrodes (16, 18). The piezoceramic layers (12) has a piezoceramic first material sintered at a sintering temperature. The security layer (20) has a second material and is disposed between two piezoceramic layers (12). Each of the plurality of inner electrodes (16, 18) has a third material and is deposited between two piezoceramic layers (12). The degree of sintering of the second material is lower than the degree of sintering of the third material.
摘要翻译： 压电陶瓷多层致动器（10）具有多个压电陶瓷层（12），安全层（20）和多个内部电极（16,18）。 压电陶瓷层（12）具有在烧结温度下烧结的压电陶瓷第一材料。 安全层（20）具有第二材料并且设置在两个压电陶瓷层（12）之间。 多个内部电极（16,18）中的每一个具有第三材料并且沉积在两个压电陶瓷层（12）之间。 第二材料的烧结程度低于第三材料的烧结程度。
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20.发明授权Monolithic piezoactuator with rotation of the polarisation in the transition region and use of said piezoactuator 有权具有在过渡区域中的偏振旋转的单片压电致动器以及所述压电致动器的使用公开(公告)号：US07545080B2
公开(公告)日：2009-06-09
申请号：US11996573
申请日：2006-07-26
IPC分类号： H01L41/08
CPC分类号： H01L41/257 , H01L41/0471 , H01L41/0838 , H01L41/273 , Y10T29/42
摘要： A piezoactuator has at least one piezoelectric-active partial stack with piezoceramic layers arranged one over the other with piezoceramic material and electrode layers arranged between the piezoceramic layers, at least one piezoelectric-inactive terminating region arranged over the partial stack and at least one transition region between the partial stack and the terminating region, the partial stack, the terminating region and the transition region all connected together to give a monolithic complete stack. The transition region has a transition region stack with piezoceramic layers arranged one over the other and electrode layers arranged between the piezoceramic layers both have a form and are arranged on each other such that, in the stack direction of the transition region stack, from piezoceramic layer to piezoceramic layer there is a successive rotation about a main axis of the polarity and/or a rotation of the main axis of the electric control is provided.
摘要翻译： 压电致动器具有至少一个压电活性部分叠层，压电陶瓷层彼此排列，压电陶瓷材料和布置在压电陶瓷层之间的电极层，至少一个排列在部分叠层上的压电非活化终止区域和至少一个过渡区域 在部分堆叠和终止区域之间，部分堆叠，终止区域和过渡区域全部连接在一起，以提供整体堆叠。 过渡区域具有过渡区堆叠，其中压电陶瓷层彼此排列，并且布置在压电陶瓷层之间的电极层都具有一种形式并且彼此排列，使得在过渡区堆叠的堆叠方向上，从压电陶瓷层 对于压电陶瓷层，存在围绕极性的主轴的连续旋转和/或提供电控制的主轴的旋转。
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