Abstract:
A method for designing and manufacturing integrated circuits is provided. The method includes providing a modeling parameter set for manufacturing an integrated circuit; dividing the modeling parameter set into time-dependent data and time-independent data; saving substantially all time-independent data into a design library; and saving substantially all time-dependent data into a design-for-manufacturing (DFM) data kit, wherein the DFM data kit is external to the design library.
Abstract:
Apparatus includes a machine readable storage medium for storing a template library having at least one template. The template is to include a first layout representation of at least one pattern to be formed by multi-patterning a single layer of an IC. The pattern has a plurality of portions to be formed using a plurality of respectively different photomasks. The first layout representation includes data identifying on which photomask each portion is to be located. An electronic design automation (EDA) tool includes a processor configured to receive a hardware description language representation of at least a part of a circuit and generate a second layout representation of the part of the circuit having a plurality of polygons. The EDA tool has a matching module that identifies and outputs an indication of whether one or more of the plurality of portions matches a subset of the plurality of polygons.
Abstract:
A computer implemented method comprises accessing a 3D-IC model stored in a tangible, non-transitory machine readable medium, processing the model in a computer processor to generate a temperature map containing temperatures at a plurality of points of the 3D-IC under the operating condition; identifying an electromigration (EM) rating factor, and calculating and outputting from the processor data representing a temperature-dependent EM current constraint at each point.
Abstract:
Embodiments of the present invention are a system, a computer program product, and a method for implementing an integrated circuit design. An embodiment is a method for implementing an integrated circuit design. The method comprises accessing an original electronic representation of an integrated circuit layout from a first user file, accessing a defined sensitivity index that characterizes an impact of the dummy pattern on the functional component, analyzing the impact of the dummy pattern on the functional component, determining whether the impact is within a limit of the sensitivity index, adjusting one of a plurality of features of the dummy pattern if the impact is not within the limit to form a generated electronic representation of a modified integrated circuit layout, and outputting the generated electronic representation to a second user file. The integrated circuit layout comprises a dummy pattern and a functional component.
Abstract:
A system for defect simulation is provided. A defect layout generator generates a defect layout comprising a given number of spot defects of a given size. A processor first compares the defect layout and a provided circuit layout comprising a plurality of conductive regions. The processor further determines whether the spot defects are located on the conductive regions, and determines whether short-circuits and/or open circuits are caused by the spot defects in the conductive regions.
Abstract:
Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a semiconductor device includes a workpiece and a plurality of first conductive lines disposed over the workpiece in a metallization layer. A plurality of second conductive lines is disposed over the workpiece in the metallization layer. The plurality of second conductive lines comprises a greater vertical height in a cross-sectional view of the workpiece than a vertical height of the plurality of first conductive lines.
Abstract:
A received layout identifies a plurality of circuit components to be included in an integrated circuit (IC) layer for double patterning the layer using two photomasks, the layout including a plurality of first patterns to be included in the first photomask and at least one second pattern to be included in the second photomask. A selected one of the first patterns has first and second endpoints, to be replaced by a replacement pattern connecting the first endpoint to a third endpoint. At least one respective keep-out region is provided adjacent to each respective remaining first pattern except for the selected first pattern. Data are generated representing the replacement pattern, such that no part of the replacement pattern is formed in any of the keep-out regions. Data representing the remaining first patterns and the replacement pattern are output.