公开(公告)号：US20130343844A1

公开(公告)日：2013-12-26

申请号：US13529264

申请日：2012-06-21

申请人： William J. Fosnight ,  Eric Christensen ,  Leslie Marshall ,  Ryan John Gallagher ,  Stephanie Waite ,  Gabriel Gaxiola

发明人： William J. Fosnight ,  Eric Christensen ,  Leslie Marshall ,  Ryan John Gallagher ,  Stephanie Waite ,  Gabriel Gaxiola

IPC分类号： B65G1/04 ,  H01L21/677

CPC分类号： H01L21/67733 ,  B65G1/0464 ,  B65G2201/0297 ,  H01L21/677

摘要： A material handling system includes an overhead rack defining a plurality of storage positions. The overhead rack defines at least one interior window devoid of storage locations. First and second side rails are disposed above the overhead rack. A first cross rail is movably coupled to the first and second side rails. A first transport vehicle movably is coupled to the first cross rail and operable to descend below the overhead rack through the at least one interior window.

摘要翻译： 材料处理系统包括限定多个存储位置的架空架。 架空架定义至少一个没有存储位置的内部窗口。 第一和第二侧轨设置在架空架上方。 第一横梁可移动地联接到第一和第二侧轨。 第一运输车辆可移动地联接到第一交叉轨道并且可操作以通过至少一个内部窗口在架空架下方下降。

公开(公告)号：US20130079913A1

公开(公告)日：2013-03-28

申请号：US13247792

申请日：2011-09-28

申请人： Chinmay S. Oza ,  William J. Fosnight ,  Jan Rothe ,  John R. Robinson ,  Gabriel Gaxiola

发明人： Chinmay S. Oza ,  William J. Fosnight ,  Jan Rothe ,  John R. Robinson ,  Gabriel Gaxiola

IPC分类号： G06F19/00

CPC分类号： H01L21/67276

摘要： A method and system of semiconductor fabrication are provided. In the method, an equipment unit performs a process on substrates to form processed substrates. The equipment unit also communicates processing data to a local scheduler. The local scheduler schedules removal of processed substrates from the equipment unit and delivery of unprocessed substrates to the equipment unit based on the processing data.

摘要翻译： 提供了半导体制造的方法和系统。 在该方法中，设备单元在基板上进行处理以形成经处理的基板。 设备单元还将处理数据传送到本地调度器。 本地调度器基于处理数据调度从设备单元移除经处理的基板并将未处理的基板传送到设备单元。

公开(公告)号：US20120174525A1

公开(公告)日：2012-07-12

申请号：US13324731

申请日：2011-12-13

申请人： Foster D. Hinshaw ,  William J. Fosnight

发明人： Foster D. Hinshaw ,  William J. Fosnight

IPC分类号： B25C5/00 ,  E04B1/38

CPC分类号： B25C1/00 ,  B25B21/002 ,  B25F5/00

摘要： A construction fastening system adapted to fasten sheathing to framing with one or more fasteners. The fastening system has a frame and a fastening actuator coupled to the frame. The fastening actuator has a fastener reservoir portion and a fastener insertion portion. A position detector is coupled to the frame, the position detector connected to a controller, the position detector adapted to detect a position of the system. A trigger is coupled to the fastening actuator, the trigger coupled to the controller. The fastening actuator is adapted to insert a fastener from the reservoir into the sheathing upon actuation of the trigger. The controller is adapted to actuate the trigger upon detection of a predetermined change in the position of the system.

摘要翻译： 一种结构紧固系统，其适于用一个或多个紧固件将护套固定到框架上。 紧固系统具有联接到框架的框架和紧固致动器。 紧固致动器具有紧固件储存部分和紧固件插入部分。 位置检测器耦合到框架，位置检测器连接到控制器，位置检测器适于检测系统的位置。 触发器耦合到紧固致动器，触发器耦合到控制器。 紧固致动器适于在触发器的致动时将紧固件从储存器插入护套中。 控制器适于在检测到系统的位置的预定变化时致动触发器。

公开(公告)号：US20120060662A1

公开(公告)日：2012-03-15

申请号：US13178138

申请日：2011-07-07

申请人： FOSTER D. HINSHAW ,  William J. Fosnight

发明人： FOSTER D. HINSHAW ,  William J. Fosnight

IPC分类号： B27B5/29

CPC分类号： B23D45/048 ,  B23D45/143 ,  B23D47/042 ,  B23D47/10 ,  B23D59/001 ,  B23D59/008 ,  Y10T83/531

摘要： A automated stick cutting system is provided adapted to produce stick-frame construction components from material for building construction. The automated stick cutting system has a frame having an in-feed portion and an out-feed portion. A saw is adapted to cut the material, the saw coupled to the frame. An in-feed drive is coupled to the frame, the in-feed drive adapted to accept the material from the in-feed portion and feed the material to the saw. A position detector is coupled to the frame, the position detector adapted to track a position of the material relative to the in-feed drive. An out-feed drive is adapted to accept the material uncut from the in-feed drive, the out-feed drive adapted to accept the material cut from the saw and feed cut material to the out-feed portion. An edge detector is adapted to detect a leading edge of the material when being fed to the saw by the in-feed drive. The position detector and the edge detector cooperate with operation of the saw to meter lengths of the material through the in-feed drive and to cut a predetermined length of the material with the saw.

摘要翻译： 提供了一种自动化的棒切割系统，其适于从用于建筑施工的材料制造棒框架结构部件。 自动棒切割系统具有框架，其具有进给部分和出料部分。 锯适于切割材料，锯连接到框架。 进给驱动器联接到框架，进给驱动器适于接收来自进给部分的材料并将材料供给到锯。 位置检测器耦合到框架，位置检测器适于跟踪材料相对于进给驱动器的位置。 输出驱动器适于接收从进给驱动器未切割的材料，输出驱动器适于接受从锯切割的材料并将切割材料供给到进给部分。 边缘检测器适于在通过进给驱动器馈送到锯时检测材料的前缘。 位置检测器和边缘检测器与锯的操作配合，以通过进给驱动器测量材料的长度，并用锯切割预定长度的材料。

公开(公告)号：US06848876B2

公开(公告)日：2005-02-01

申请号：US09760147

申请日：2001-01-12

申请人： Daniel J. Babbs ,  William J. Fosnight ,  Tim Cosentino ,  Mark Sammut ,  Pascal Pinna ,  Russell Zemen

发明人： Daniel J. Babbs ,  William J. Fosnight ,  Tim Cosentino ,  Mark Sammut ,  Pascal Pinna ,  Russell Zemen

IPC分类号： B65G1/04 ,  B65G1/16 ,  B65G49/07 ,  G03F7/20

CPC分类号： H01L21/67769 ,  B65G1/045 ,  B65G1/16 ,  G03F7/70741 ,  Y10S414/138

摘要： A reticle management system is disclosed including a sorter coupled to one or more stockers that allow a customized configuration of the overall reticle management system. The stockers may be bare reticle stockers, closed container reticle stockers, or both. In embodiments of the present invention, the reticle management system includes between one and six individual bare reticle stockers and/or closed container stockers for storing reticles affixed to a reticle sorter. The sorter includes a reticle inspection station for inspecting the reticles, a plurality of input/output (I/O) load ports and a reticle handling robot for transferring the reticles between the stockers, the inspection station and the I/O load ports. The management system further includes a control unit for housing control electronics for the system.

摘要翻译： 公开了一种掩模版管理系统，其包括耦合到一个或多个存储器的分类器，其允许整个标线管理系统的定制配置。 储料器可以是裸露的光罩储存器，封闭的容器标线贮存器或两者。 在本发明的实施例中，掩模版管理系统包括一个和六个单独裸光掩模存储器和/或封闭的容器存放器，用于存放附着在掩模版分选机上的光罩。 分拣机包括用于检查掩模版的掩模版检查站，多个输入/输出（I / O）装载端口和用于在储料器，检查站和I / O装载端口之间传送掩模版的掩模版处理机器人。 管理系统还包括用于容纳系统的控制电子装置的控制单元。

公开(公告)号：US06579052B1

公开(公告)日：2003-06-17

申请号：US08891543

申请日：1997-07-11

申请人： Anthony C. Bonora ,  Raymond S. Martin ,  Robert Netsch ,  Joshua T. Oen ,  Terry Mosier ,  William J. Fosnight

发明人： Anthony C. Bonora ,  Raymond S. Martin ,  Robert Netsch ,  Joshua T. Oen ,  Terry Mosier ,  William J. Fosnight

IPC分类号： B65G100

CPC分类号： H01L21/67161 ,  H01L21/67769 ,  Y10S414/14

摘要： A storage, delivery and retrieval system having a rear wall to which is affixed a plurality of shelves capable of supporting one or more wafer-carrying pods. The structure further includes a pair of vertical rails lying in a plane spaced from and substantially parallel to the shelf-supporting wall. The horizontal rail extends between and is translationally mounted to the vertical rails, which horizontal rail supports a gripper capable of movement along the horizontal rail. The movement of the horizontal rail along the vertical rails, and the movement of the gripper along the horizontal rail, allows the gripper to be positioned at any location within an X-Z plane including the storage shelves. The system includes a two-dimensional transport system. That is, all transport of the pods by the system occurs without the pods ever leaving the X-Z plane of the shelves. This feature contributes to the overall small footprint of the system. Additionally, the gripper moves around in the same plane as the pods, and the rails have a small profile and operate directly adjacent the storage shelves. These features further contribute to the storage, delivery and retrieval system according to the present invention.

摘要翻译： 具有后壁的储存，输送和取回系统，其上固定有能够支撑一个或多个晶片承载舱的多个搁架。 该结构还包括位于与支架壁间隔开并基本上平行于支架壁的平面中的一对垂直导轨。 水平导轨在垂直轨道之间延伸并且平行地安装在该横向导轨上，该水平轨道支撑能够沿着水平轨道移动的夹具。 水平导轨沿着垂直导轨的移动以及夹持器沿着水平导轨的运动允许夹具定位在包括存储架的X-Z平面内的任何位置处。 该系统包括二维传输系统。 也就是说，系统的所有荚运输都没有荚果离开架子的X-Z平面。 该功能有助于系统的整体体积小。 此外，夹具在与荚一起在同一平面内移动，并且导轨具有小的轮廓并且直接靠近货架。 这些特征进一步有助于根据本发明的存储，传送和检索系统。

公开(公告)号：US06318953B1

公开(公告)日：2001-11-20

申请号：US09351986

申请日：1999-07-12

申请人： Anthony C. Bonora ,  Robert Netsch ,  Patrick Sullivan ,  William J. Fosnight ,  Joshua Shenk ,  Edwin Noma

发明人： Anthony C. Bonora ,  Robert Netsch ,  Patrick Sullivan ,  William J. Fosnight ,  Joshua Shenk ,  Edwin Noma

IPC分类号： B65G6300

CPC分类号： H01L21/67775 ,  Y10S414/135 ,  Y10S414/136

摘要： An ergonomic loading assembly for an I/O port onto which a bare cassette may be easily loaded and unloaded. The loading assembly further provides isolation between the operator and the I/O port after loading of a cassette to minimize safety risks and to minimize the amount of particulates and contaminants around the workpieces while on the port. In a preferred embodiment, the loading assembly includes a cover assembly having a stationary cover section around the port plate, and two pivoting cover sections which open and close like jaws to allow a cassette to positioned within the cover assembly when opened and which enclose the cassette within the cover assembly when closed. The loading assembly further includes a pivoting deck onto which the cassette is loaded when the pivoting cover sections are open. The deck receives the cassette with the workpieces oriented at or near vertical. Thereafter, as the pivoting cover sections are closed, the pivoting deck rotates the cassette and seats the cassette on the port door of the port with the workpieces positioned in a horizontal orientation. Thereafter, the port plate, pivoting deck and cassette may be transferred away from the port plate so that processing of the workpieces in the cassette by the processing tool may take place.

摘要翻译： 用于I / O端口的符合人体工程学的装载组件，裸机盒可以在其上容易地装载和卸载。 装载组件进一步在装载盒之后在操作者和I / O端口之间提供隔离，以最小化安全隐患，并使端口周围的工件周围的颗粒物和污染物的数量最小化。 在优选实施例中，装载组件包括具有围绕端口板的固定盖部分的盖组件，以及两个枢转盖部分，其打开和关闭类似的夹爪，以允许盒在打开时定位在盖组件内并且包围盒 封闭时在盖组件内。 装载组件还包括枢转甲板，当枢转盖部分打开时，该卡盘装载在该枢转甲板上。 工作台接收垂直方向的工件。 此后，当枢转盖部分被关闭时，枢转甲板使盒子旋转，并使工件在水平方向上定位在端口的端口门上。 此后，端口板，枢转甲板和盒可以从端口板转移离开，使得可以通过处理工具对盒中的工件进行处理。

公开(公告)号：US06298280B1

公开(公告)日：2001-10-02

申请号：US09162334

申请日：1998-09-28

申请人： Anthony C. Bonora ,  William J. Fosnight ,  Krishna D. Swamy ,  Mark R. Davis ,  Mike Cookson

发明人： Anthony C. Bonora ,  William J. Fosnight ,  Krishna D. Swamy ,  Mark R. Davis ,  Mike Cookson

IPC分类号： G06F700

CPC分类号： H01L21/681 ,  Y10S414/141

摘要： A system for positioning an end effector of a wafer handling robot with respect to a wafer to be extracted from a cassette, and for thereafter reading an indicial mark on the wafer. The system includes a pair of sensor units fixedly mounted on the end effector, which sensor units are capable of detecting the wafer edge upon approach of the end effector toward the wafer. Based on the positions of the end effector when the first and then the second sensor units detect the edge of the wafer, a computer may determine the orientation of the end effector with respect to the wafer, and adjust a position of the end effector to a center of the wafer. Thereafter, the indicial mark on the wafer may be read by a camera by withdrawing the wafer from the cassette on the end effector, positioning the center of the wafer over the central axis of rotation of the wafer handling robot, and rotating the robot until the indicial mark is located under the camera.

摘要翻译： 一种用于将晶片处理机器人的端部执行器相对于要从盒中提取的晶片定位并且此后读取晶片上的指示标记的系统。 该系统包括固定地安装在末端执行器上的一对传感器单元，这些传感器单元能够在末端执行器朝向晶片接近时检测晶片边缘。 当第一和第二传感器单元检测到晶片的边缘时，基于末端执行器的位置，计算机可以确定端部执行器相对于晶片的取向，并且将末端执行器的位置调整到 晶圆中心。 此后，晶片上的指示标记可以由相机通过从晶片处理机器人的中心旋转轴上定位晶片的中心并将机器人旋转直到 指纹位于相机下方。

公开(公告)号：US5988233A

公开(公告)日：1999-11-23

申请号：US49461

申请日：1998-03-27

申请人： William J. Fosnight ,  Anthony C. Bonora ,  Raymond S. Martin ,  Jay Tatro

发明人： William J. Fosnight ,  Anthony C. Bonora ,  Raymond S. Martin ,  Jay Tatro

IPC分类号： H01L21/677 ,  H01L21/673 ,  B65B1/04

CPC分类号： H01L21/67376 ,  H01L21/67393

摘要： A system for providing uniform, controlled and efficient purge gas flow rates and gas flow patterns for removing contaminants and/or particulates from wafers within a pod. The purge system includes seals at the interfaces between the gas inlet and removal lines to substantially prevent leakage at the interfaces. The system may establish seals at the inlet and outlet without having to use conventional fluid flow pins extending above the support surface. The negative pressure applied at the outlet controls the flow rate through the pod, and the rate at which gas leaves the pod will limit the rate at which gas may enter the pod. In a preferred embodiment, the inlet flow is approximately equal to the outlet flow. With substantially equal inlet and outlet pressures, the purging gas flows through the upper and lower portions of the pod in a substantially uniform flow pattern so that contaminants and particulates are removed evenly from wafers throughout the pod. As an alternative to the normal purge and/or trickle modes of operation, the system may remove a volume of gas from a pod and replace it with a new volume of gas by operating the low pressure source with the high pressure source turned off. Further still, the flow lines may include flow rate control systems that provide purging flow for a predetermined time interval, and thereafter provide a trickle flow as long as the pod is seated on the support surface.

摘要翻译： 一种用于提供均匀，受控和有效的吹扫气体流速和气流模式的系统，用于从荚内的晶片中去除污染物和/或颗粒物。 吹扫系统包括在气体入口和排出管线之间的界面处的密封，以基本上防止在界面处的泄漏。 该系统可以在入口和出口处建立密封件，而不必使用在支撑表面上方延伸的常规流体流动销。 在出口处施加的负压控制通过荚的流速，并且气体离开荚的速率将限制气体可以进入荚的速率。 在优选实施例中，入口流大致等于出口流。 具有基本上相等的入口和出口压力，净化气体以大致均匀的流动方式流过容器的上部和下部，使得污染物和微粒从整个容器中的晶片均匀地除去。 作为正常吹扫和/或滴流操作模式的替代方案，系统可以从容器中去除一定体积的气体，并通过在高压源关闭的情况下操作低压源来替换新的体积的气体。 此外，流动管线可以包括流量控制系统，其提供预定时间间隔的清洗流量，并且此后提供涓流流动，只要荚座位于支撑表面上即可。

公开(公告)号：US5944475A

公开(公告)日：1999-08-31

申请号：US730484

申请日：1996-10-11

申请人： Anthony C. Bonora ,  William J. Fosnight ,  Raymond S. Martin

发明人： Anthony C. Bonora ,  William J. Fosnight ,  Raymond S. Martin

IPC分类号： B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67775 ,  H01L21/67772 ,  Y10S414/14

摘要： A rotating and translating support assembly for receiving a front-opening pod according to applicable SEMI standards, and thereafter rotating the pod to a desired orientation. In this way, a number of pods may be received at interface ports of a minienvironment, and each of the pods and ports may be angled toward and aligned with a single, 2-arm pick and place robot. In a preferred embodiment of the present invention, the rotating and translating support assembly comprises a plate rotationally and translationally mounted on a shelf extending from the minienvironment adjacent to a front-opening interface port. In one embodiment, the support plate may be mounted on a shaft attached to a rotating assembly, such as for example a worm and drive gear. The rotating assembly may in turn be mounted on a translating assembly, such as for example a carriage riding on a lead screw. The rotating and translating assemblies may be controlled by a host computer, so as to rotate and translate a pod received on the support plate, to align the pod with an interface port which may be provided at an angle with respect to the front of the minienvironment.

摘要翻译： 旋转和平移支撑组件，用于根据适用的SEMI标准接收前开口舱，然后将舱旋转到期望的方位。 以这种方式，可以在微型环境的接口端口处接收多个荚，并且每个荚和端口可以朝向和对准单个2臂拾放和放置机器人。 在本发明的优选实施例中，旋转和平移支撑组件包括旋转地并且平移地安装在从邻近前开口接口端口的小环境延伸的搁架上的板。 在一个实施例中，支撑板可以安装在附接到旋转组件的轴上，例如蜗杆和驱动齿轮。 旋转组件可以依次安装在平移组件上，例如骑在导螺杆上的滑架。 旋转和平移组件可以由主计算机控制，以便旋转和平移容纳在支撑板上的容器，以使该容器与可以相对于小型环境的前部以一定角度提供的接口端口对准 。