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    Laser having improved beam quality and reduced operating cost
    12.
    发明授权
    Laser having improved beam quality and reduced operating cost 失效
    激光器具有改善的光束质量和降低的操作成本

    公开(公告)号：US5748656A

    公开(公告)日：1998-05-05

    申请号：US583302

    申请日：1996-01-05

    Applicant: Tom A. Watson ,  William N. Partlo ,  Donald G. Larson ,  Igor V. Fomenkov ,  Anthony J. de Ruyter ,  Palash P. Das

    Inventor： Tom A. Watson ,  William N. Partlo ,  Donald G. Larson ,  Igor V. Fomenkov ,  Anthony J. de Ruyter ,  Palash P. Das

    IPC: H01S3/03 ,  H01S3/036 ,  H01S3/04 ,  H01S3/041 ,  H01S3/225 ,  H01S3/045

    CPC classification number: H01S3/036 ,  H01S3/04 ,  H01S3/041 ,  F28D2021/0077 ,  H01S3/225

    Abstract: Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.

    Abstract translation: 公开了一种可用于例如光刻或医疗手术中的激光。 在一个实施例中，激光器包括放电室和发热电子器件，其封闭在挡板外壳中，其需要较少的冷却空气以可靠地冷却外壳中的部件比先前的未封闭的外壳。 还提供了减少调节空气量的方法。 在另一个实施例中，激光器具有热交换系统，其响应于激光气体温度的变化而快速作用，通过调节调节通过热交换器的水流的流量比例阀，由此通过所述热交换系统提供连续可变的热交换速率 热交换器保持激光温度恒定。 公开了提供激光束并提高激光束的均匀性的方法，以及利用激光的光刻方法和本发明的方法。

    Compact excimer laser
    13.
    发明授权
    Compact excimer laser 失效
    紧凑型准分子激光

    公开(公告)号：US5023884A

    公开(公告)日：1991-06-11

    申请号：US550657

    申请日：1990-07-10

    Applicant: Robert P. Akins ,  Donald G. Larson ,  Uday K. Sengupta ,  Richard L. Sandstrom

    Inventor： Robert P. Akins ,  Donald G. Larson ,  Uday K. Sengupta ,  Richard L. Sandstrom

    IPC: H01S3/03 ,  H01S3/036 ,  H01S3/0971 ,  H01S3/225

    CPC classification number: H01S3/0305 ,  H01S3/036 ,  H01S3/0971 ,  H01S3/225

    Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.

    Abstract translation: 一种紧凑型准分子激光器，包括具有形成内部激光腔的多个壁的壳体结构。 气体位于激光腔内，气体能够起激光作用。 一对间隔开的电极位于激光器腔内，并形成电极之间的放电区域，用于根据电极之间的放电来刺激放电区域内的气体以产生激光作用。 一对电极中的一个位于腔内的中心位置并且接地到壳体结构。 一对电极中的另一个位于与壳体结构的一个壁相邻但间隔开的位置，另一个电极安装在主绝缘体构件上。 主绝缘体构件由陶瓷材料形成，并且位于壳体的一个壁的中间和另一个电极之间，但是与壳体的一个壁间隔开，以使主绝缘体构件相对于壳体结构浮动。 主陶瓷绝缘体构件被压缩地支撑在构件的中心位置处，并且从该中心位置向外延伸，而没有任何附加的支撑，以使浮动主绝缘体对激光器内的任何弯曲力作出反应，而不受中央支架之外的任何限制。

    Compact excimer laser
    14.
    发明授权
    Compact excimer laser 失效

    公开(公告)号：US5018162A

    公开(公告)日：1991-05-21

    申请号：US550660

    申请日：1990-07-10

    Applicant: Robert P. Akins ,  Donald G. Larson ,  Uday K. Sengupta ,  Richard L. Sandstrom

    Inventor： Robert P. Akins ,  Donald G. Larson ,  Uday K. Sengupta ,  Richard L. Sandstrom

    IPC: H01S3/03 ,  H01S3/036 ,  H01S3/0971 ,  H01S3/225

    CPC classification number: H01S3/0305 ,  H01S3/036 ,  H01S3/0971 ,  H01S3/225

    Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.

    Compact excimer laser
    15.
    发明授权
    Compact excimer laser 失效

    公开(公告)号：US5018161A

    公开(公告)日：1991-05-21

    申请号：US550666

    申请日：1990-07-10

    Applicant: Robert P. Akins ,  Donald G. Larson ,  Uday K. Sengupta ,  Richard L. Sandstrom

    Inventor： Robert P. Akins ,  Donald G. Larson ,  Uday K. Sengupta ,  Richard L. Sandstrom

    IPC: H01S3/03 ,  H01S3/036 ,  H01S3/0971 ,  H01S3/225

    CPC classification number: H01S3/0305 ,  H01S3/036 ,  H01S3/0971 ,  H01S3/225

    Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.

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