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公开(公告)号：US5848089A
公开(公告)日：1998-12-08
申请号：US893904
申请日：1997-07-11
IPC分类号： F04D25/08 , F04D29/04 , F04D29/056 , F04D29/058 , G03F7/20 , H01S3/036 , H01S3/041 , H01S3/225
CPC分类号： G03F7/70575 , H01S3/036 , H01S3/041
摘要： An electric discharge gas laser having a laser cavity in which is contained a laser gas and a fan for circulating the laser gas. The fan is supported by an active magnetic bearing system and driven by a brushless DC motor in which the rotor of the motor and at least two magnetic bearings sealed within the gas environment of the laser cavity and the motor stator and the coils of the bearing magnets are located outside the gas environment.
摘要翻译： 一种具有激光腔的放电气体激光器，其中包含激光气体和用于使激光气体循环的风扇。 风扇由主动磁轴承系统支撑，由无刷直流电动机驱动，电动机的转子和至少两个磁性轴承密封在激光腔的气体环境中，电动机定子和轴承磁体的线圈 位于天然气环境之外。
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公开(公告)号：US5377215A
公开(公告)日：1994-12-27
申请号：US975652
申请日：1992-11-13
申请人： Palash P. Das , Donald G. Larson
发明人： Palash P. Das , Donald G. Larson
摘要： A housing in a laser system encloses a cathode and a displaced anode and gases ionizable and reactive chemically when a voltage pulse produces a cathode-anode electrical discharge. Moving air cools the components (capacitors, thyratron and triggering circuitry) for producing the voltage pulses. The laser gas temperature is continuously regulated at a particular value whether or not there is an electrical discharge. The concentration of one of the gases in the chamber is regulated to values alternately on opposite sides of an optimal value to provide an optimal energy in each chemical reaction of the gases. The gases are recirculated as by a fan driven on a shaft by a pair of motors and are filtered during such recirculation. The shaft speed is regulated at a particular value and the motor currents are regulated to be equal. Any ozone formed in a compartment holding the high voltage terminals is purged by passing a neutral gas (nitrogen) through the compartment to the atmosphere. The neutral gas is passed into the housing through a hose which also holds a high voltage wire in insulated relationship to other electrical components. A collar arrangement at one wire end provides for the introduction of voltage from the collar to the anode of the thyratron with the hose coupled to the housing and grounds the collar with the wire decoupled from the housing. The different high voltage components are sequentially tested for their operability by a system and method unique to this invention.
摘要翻译： 当电压脉冲产生阴极 - 阳极放电时，激光系统中的外壳包围阴极和置换的阳极以及可电化学和化学反应的气体。 移动空气冷却组件（电容器，闸流管和触发电路）以产生电压脉冲。 激光气体温度是否连续地调节在特定值，不管是否有放电。 腔室中的一种气体的浓度在最佳值的相对侧交替地调节为值，以在气体的每个化学反应中提供最佳能量。 气体通过由一对电动机驱动在轴上的风扇再循环，并且在这种再循环期间被过滤。 轴速度被调节在特定值，并且电动机电流被调节为相等。 通过将中性气体（氮气）通过隔室传送到大气中来清洁在保持高电压端子的隔室中形成的任何臭氧。 中性气体通过软管进入壳体，该软管还保持与其它电气部件绝缘的高压电线。 在一个线端处的套环布置提供了从套环到闸流管的阳极的电压的引入，其中软管联接到壳体并且将线圈与线分离的壳体接合。 通过本发明特有的系统和方法，对不同的高压部件依次测试其可操作性。
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公开(公告)号：US5586134A
公开(公告)日：1996-12-17
申请号：US322309
申请日：1994-10-12
申请人： Palash P. Das , Donald G. Larson
发明人： Palash P. Das , Donald G. Larson
摘要： A housing in a laser system encloses a cathode and a displaced anode and gases ionizable and reactive chemically when a voltage pulse produces a cathode-anode electrical discharge. Moving air cools the components (capacitors, thyratron and triggering circuitry) for producing the voltage pulses. The laser gas temperature is continuously regulated at a particular value whether or not there is an electrical discharge. The concentration of one of the gases in the chamber is regulated to values alternately on opposite sides of an optimal value to provide an optimal energy in each chemical reaction of the gases. The gases are recirculated as by a fan driven on a shaft by a pair of motors and are filtered during such recirculation. The shaft speed is regulated at a particular value and the motor currents are regulated to be equal. Any ozone formed in a compartment holding the high voltage terminals is purged by passing a neutral gas (nitrogen) through the compartment to the atmosphere. The neutral gas is passed into the housing through a hose which also holds a high voltage wire in insulated relationship to other electrical components. A collar arrangement at one wire end provides for the introduction of voltage from the collar to the anode of the thyratron with the hose coupled to the housing and grounds the collar with the wire decoupled from the housing. The different high voltage components are sequentially tested for their operability by a system and method unique to this invention.
摘要翻译： 当电压脉冲产生阴极 - 阳极放电时，激光系统中的外壳包围阴极和置换的阳极以及可电化学和化学反应的气体。 移动空气冷却组件（电容器，闸流管和触发电路）以产生电压脉冲。 激光气体温度是否连续地调节在特定值，不管是否有放电。 腔室中的一种气体的浓度在最佳值的相对侧交替地调节为值，以在气体的每个化学反应中提供最佳能量。 气体通过由一对电动机驱动在轴上的风扇再循环，并且在这种再循环期间被过滤。 轴速度被调节在特定值，并且电动机电流被调节为相等。 通过将中性气体（氮气）通过隔室传送到大气中来清洁在保持高电压端子的隔室中形成的任何臭氧。 中性气体通过软管进入壳体，该软管还保持与其它电气部件绝缘的高压电线。 在一个线端处的套环布置提供了从套环到闸流管的阳极的电压的引入，其中软管联接到壳体并且将线圈与线分离的壳体接合。 通过本发明特有的系统和方法，对不同的高压部件依次测试其可操作性。
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公开(公告)号：US6021150A
公开(公告)日：2000-02-01
申请号：US41832
申请日：1998-03-12
CPC分类号： H01S3/036 , H01S3/04 , H01S3/041 , F28D2021/0077 , H01S3/225
摘要： Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.
摘要翻译： 公开了一种可用于例如光刻或医疗手术中的激光。 在一个实施例中，激光器包括放电室和发热电子器件，其封闭在挡板外壳中，其需要较少的冷却空气以可靠地冷却外壳中的部件比先前的未封闭的外壳。 还提供了减少调节空气量的方法。 在另一个实施例中，激光器具有热交换系统，其响应于激光气体温度的变化而快速作用，通过调节调节通过热交换器的水流的流量比例阀，由此通过所述热交换系统提供连续可变的热交换速率 热交换器保持激光温度恒定。 公开了提供激光束并提高激光束的均匀性的方法，以及利用激光的光刻方法和本发明的方法。
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公开(公告)号：US5748656A
公开(公告)日：1998-05-05
申请号：US583302
申请日：1996-01-05
申请人： Tom A. Watson , William N. Partlo , Donald G. Larson , Igor V. Fomenkov , Anthony J. de Ruyter , Palash P. Das
发明人： Tom A. Watson , William N. Partlo , Donald G. Larson , Igor V. Fomenkov , Anthony J. de Ruyter , Palash P. Das
CPC分类号： H01S3/036 , H01S3/04 , H01S3/041 , F28D2021/0077 , H01S3/225
摘要： Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.
摘要翻译： 公开了一种可用于例如光刻或医疗手术中的激光。 在一个实施例中，激光器包括放电室和发热电子器件，其封闭在挡板外壳中，其需要较少的冷却空气以可靠地冷却外壳中的部件比先前的未封闭的外壳。 还提供了减少调节空气量的方法。 在另一个实施例中，激光器具有热交换系统，其响应于激光气体温度的变化而快速作用，通过调节调节通过热交换器的水流的流量比例阀，由此通过所述热交换系统提供连续可变的热交换速率 热交换器保持激光温度恒定。 公开了提供激光束并提高激光束的均匀性的方法，以及利用激光的光刻方法和本发明的方法。
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公开(公告)号：US6034978A
公开(公告)日：2000-03-07
申请号：US310872
申请日：1999-05-12
申请人： Richard C. Ujazdowski , Robert A. Shannon , Dmitry Berger , William N. Partlo , Tom A. Watson , Paul S. Thompson , Toshihiko Ishihara , Carl E. Tedesco, II , Donald G. Larson , Steven M. Harrington , Richard G. Morton , James H. Azzola , I. Roger Oliver , Thomas P. Duffey , Igor V. Fomenkov
发明人： Richard C. Ujazdowski , Robert A. Shannon , Dmitry Berger , William N. Partlo , Tom A. Watson , Paul S. Thompson , Toshihiko Ishihara , Carl E. Tedesco, II , Donald G. Larson , Steven M. Harrington , Richard G. Morton , James H. Azzola , I. Roger Oliver , Thomas P. Duffey , Igor V. Fomenkov
CPC分类号： G03F7/70025 , H01S3/134 , H01S3/036
摘要： A gas discharge laser with fast response gas temperature control to maintain laser gas temperature within desired limits during burst mode operation. Preferred embodiments include a passive temperature stabilizer having fins with surface areas exposed to flowing laser gas at least equal to the surface area of the cooling fins of a laser gas heat exchanger. Preferred embodiments utilize heating elements and coolant flow control to regulate laser gas temperatures using processors programmed to anticipate idle periods.
摘要翻译： 一种具有快速响应气体温度控制的气体放电激光器，用于在脉冲串模式操作期间将激光气体温度保持在期望的限度内。 优选实施例包括具有散热片的被动温度稳定器，其表面积暴露于至少等于激光气体热交换器的冷却片的表面积的流动激光气体。 优选实施例利用加热元件和冷却剂流量控制来调节激光气体温度，使用编程为预期空闲周期的处理器。
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公开(公告)号：US5027366A
公开(公告)日：1991-06-25
申请号：US550649
申请日：1990-07-10
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
摘要翻译： 一种紧凑型准分子激光器，包括具有形成内部激光腔的多个壁的壳体结构。 气体位于激光腔内，气体能够起激光作用。 一对间隔开的电极位于激光器腔内，并形成电极之间的放电区域，用于根据电极之间的放电来刺激放电区域内的气体以产生激光作用。 一对电极中的一个位于腔内的中心位置并且接地到壳体结构。 一对电极中的另一个位于与壳体结构的一个壁相邻但间隔开的位置，另一个电极安装在主绝缘体构件上。 主绝缘体构件由陶瓷材料形成，并且位于壳体的一个壁和另一个电极的中间，但与壳体的一个壁间隔开，以使主绝缘构件相对于壳体结构浮动。 主陶瓷绝缘体部件被压缩地支撑在构件的中心位置处，并且从该中心位置向外延伸，而没有任何额外的支撑，以使浮动主绝缘体对激光器内的任何弯曲力作出响应，而不受中央支架之外的任何限制。
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公开(公告)号：US5048041A
公开(公告)日：1991-09-10
申请号：US550389
申请日：1990-07-10
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/036 , H01S3/0305 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
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公开(公告)号：US5033055A
公开(公告)日：1991-07-16
申请号：US550658
申请日：1990-07-10
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure an with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
摘要翻译： 一种紧凑型准分子激光器，包括具有形成内部激光腔的多个壁的壳体结构。 气体位于激光腔内，气体能够起激光作用。 一对间隔开的电极位于激光器腔内，并形成电极之间的放电区域，用于根据电极之间的放电来刺激放电区域内的气体以产生激光作用。 一对电极中的一个位于腔内的中心位置并且接地到壳体结构。 一对电极中的另一个位于与壳体结构的一个壁相邻但间隔开的位置，另一个电极安装在主绝缘体构件上。 主绝缘体构件由陶瓷材料形成，并且位于壳体的一个壁和另一个电极的中间，但与壳体的一个壁间隔开，以使主绝缘构件相对于壳体结构浮动。 主陶瓷绝缘体部件被压缩地支撑在构件的中心位置处，并且从该中心位置向外延伸，而没有任何额外的支撑，以使浮动主绝缘体对激光器内的任何弯曲力作出响应，而不受中央支架之外的任何限制。
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公开(公告)号：US5337330A
公开(公告)日：1994-08-09
申请号：US958922
申请日：1992-10-09
申请人： Donald G. Larson
发明人： Donald G. Larson
IPC分类号： H01S3/038 , H01S3/0977 , H01S3/097
CPC分类号： H01S3/038 , H01S3/0384
摘要： An anode and a cathode in a laser are spaced in a first direction. A voltage difference between these members produces an electrical discharge which ionizes gases in the laser to react chemically and produce coherent radiation. First and second tubes made from a dielectric material are spaced in the laser in a second direction transverse (preferably perpendicular) to the first direction. The anode, the cathode and the tubes extend through the laser in a direction transverse (preferably perpendicular) to the first and second directions. The tubes are preferably at least a 99.9% pure polycrystalline aluminum oxide ceramic with traces of other metallic elements than aluminum. Bushings made from a material homogeneous (preferably identical) to the tube material are integral with the tube near the opposite tube ends. First electrical conductors extend through the tubes. Second electrical conductors (preferably resilient) contact (preferably line contact) the external tube surfaces to define capacitors with the first conductors and the tube material. Positioning members movably engage the tube external surfaces near the tube ends in co-operation with the resilient members establishing three (3)- line contacts with the tubes for positioning the tubes precisely in the cavity. When a voltage pulse is applied between the first conductor inside each tube and the conductors on such tube, the resultant corona discharge from the external tube surface produces ultraviolet light which pre-ionizes the gases in the cavity. This facilitates the ionization of the gases in the cavity when an anode-cathode electrical discharge is produced.
摘要翻译： 激光器中的阳极和阴极在第一方向上间隔开。 这些构件之间的电压差产生放电，其使激光器中的气体电离化学反应并产生相干辐射。 由介电材料制成的第一和第二管在激光器中沿与第一方向横向（优选垂直）的第二方向间隔开。 阳极，阴极和管沿横向（优选垂直于）第一和第二方向的方向延伸穿过激光器。 这些管优选是至少99.9％的纯多晶氧化铝陶瓷，其余的金属元素比铝更多。 由与材料均匀（优选相同）的材料制成的套管与相邻管端附近的管是一体的。 第一个电导体延伸穿过管子。 第二电导体（优选弹性的）接触（优选线接触）外管表面以限定具有第一导体和管材料的电容器。 定位构件与弹性构件相配合地可移动地接合在管端附近的管外表面，该弹性构件与管构成三（3）线接触，用于将管精确地定位在空腔中。 当在每个管内的第一导体和这种管之间的导体之间施加电压脉冲时，从外管表面产生的电晕放电产生紫外光，其预先使空腔中的气体离子化。 当产生阳极 - 阴极放电时，这有助于空腔中的气体的电离。
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