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公开(公告)号：US20250052241A1
公开(公告)日：2025-02-13
申请号：US18721793
申请日：2022-12-16
Applicant: Edwards Limited
Inventor： Cainan Long , Nigel Paul Schofield , Alan Ernest Kinnaird Holbrook
Abstract: The present disclosure relates to vacuum pump 10 comprising a substantially hermetically sealed enclosure 40, a core pump assembly located within the enclosure 40, and an inert purge gas inlet 70 fluidly connected to the enclosure 40 for supplying inert purge gas to an interior of the enclosure 40 surrounding the core pump assembly. By providing a sealed enclosure 40 around the core pump assembly and supplying inert purge gas thereto via the inlet 70, an inert positive pressure can be applied to the core pump assembly that reduces leakage of process gas from the core pump assembly such that seals therein can be removed or reduced. In particular, the need for elastomer seals that may be expensive and not be suited to high temperature or corrosive process gas conditions can be removed.
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公开(公告)号：US11821427B2
公开(公告)日：2023-11-21
申请号：US17760408
申请日：2021-02-10
Applicant: Edwards Limited
Inventor： Alan Ernest Kinnaird Holbrook , David Bedwell
CPC classification number: F04C23/001 , F01C21/10 , F04C18/126 , F04C25/02 , F04C29/0014 , F04C2220/50 , F04C2240/10 , F04C2250/30 , F04C2280/04
Abstract: A multi-stage vacuum pump comprising a stator defining multiple pumping chambers is discussed. The stator comprises a plurality of transfer channels for providing a fluid passage from an outlet port of one of the plurality of pumping chambers to an inlet port of a subsequent pumping chamber. Some of the transfer channels comprise two side channel sections on opposing sides of the stator. One of the transfer channels comprises a single side channel section on one side of the stator. The vacuum pump further comprises a gas ballast inlet channel arranged on an other side of the stator to the one side of the stator.
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公开(公告)号：US20230184251A1
公开(公告)日：2023-06-15
申请号：US17999327
申请日：2021-05-20
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield , Alan Ernest Kinnaird Holbrook
CPC classification number: F04C27/009 , F04C18/0215 , F04D27/0246 , F04C27/002 , F04C27/004 , F04C2210/14
Abstract: A scroll vacuum pump has an axially extending drive shaft with an eccentric shaft portion, such that rotation of the drive shaft imparts an orbiting motion to an orbiting scroll relative to a fixed scroll. An axial adjustment mechanism has a plurality of adjustment members angularly spaced around the drive shaft and extending through the pump housing towards the orbiting scroll, the plurality of adjustment members each being configured to provide an independently adjustable axial position of the orbiting scroll. A plurality of sealing means isolate the plurality of adjustment members from a pump chamber, the plurality of sealing means extending around each of the plurality of adjustment members and comprising at least one flexible portion such that one end of the sealing means may orbit relative to a fixed other end of the sealing means.
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公开(公告)号：US10968909B2
公开(公告)日：2021-04-06
申请号：US15749884
申请日：2016-08-04
Applicant: Edwards Limited
Inventor： Phillip North , Kanstantinos Karoulas , Benjamin Raymond Wooller , Alan Ernest Kinnaird Holbrook
Abstract: A dry vacuum pump may include a stator which defines an internal chamber in which a rotor is rotationally mounted. A sensor is mounted to the stator and has an output connected to a processing circuit arranged to analyse the output of the sensor to determine the absolute distance between a point on the surface of the rotor and internal stator surface. The rotor to stator clearance can thus be accurately determined in real time during operation of the pump, so that the pump performance can be optimised over its serviceable life.
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公开(公告)号：US10539123B2
公开(公告)日：2020-01-21
申请号：US14648135
申请日：2013-10-28
Applicant: Edwards Limited
Inventor： Neil Turner , Jack Raymond Tattersall , Alan Ernest Kinnaird Holbrook , Matthew Richard Wickes
Abstract: In situations where a vacuum system is suddenly overloaded, there is a risk of mechanical damage being sustained, for example, bearing damage, gear slippage or rotor and/or stator collisions. Sudden overloads can also lead to electrical damage, for example, over-currents or power surges. Therefore a pressure regulating apparatus is provided for use in a vacuum pumping system having an inlet, an outlet and a conduit interposed between, and in fluid communication with, the inlet and the outlet, wherein the cross-sectional area of the conduit is greater than that required to meet the conductance requirements of the inlet and the outlet.
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Patent Agency Ranking
公开(公告)号：US20230323888A1
公开(公告)日：2023-10-12
申请号：US17796512
申请日：2021-01-25
Applicant: Edwards Limited
Inventor： Alan Ernest Kinnaird Holbrook
CPC classification number: F04D29/083 , F04D19/04 , F16J15/022
Abstract: A set of seals for sealing between two half shells defining at least one pumping chamber and two head plates to be mounted at either end of the two half shells. The set of seals includes: at least one annular seal for sealing between at least one of the head plates and the two half shells; two longitudinal seals for sealing between longitudinal contact faces of the two half shell stators on either side of the at least one pumping chamber, the longitudinal seals being configured to have end portions that abut against the at least one annular seal when mounted in the pump. Each of the seals within the set of seals are made of a material having at least one of: a hardness between 73-83, on the Shore A hardness scale; and a stiffness of between 2.4 and 4.2 N/mm per mm length.
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公开(公告)号：US20180363663A1
公开(公告)日：2018-12-20
申请号：US16060191
申请日：2016-12-13
Applicant: Edwards Limited
Inventor： Alan Ernest Kinnaird Holbrook , Paul Milner
IPC: F04D19/04 , F04D29/056 , F04D29/60 , F04D29/66
Abstract: The present invention relates to a turbo-molecular vacuum pump comprising bearings for supporting the drive shaft and/or the rotor in relation to a pump body, wherein a first bearing is coupled to the rotor and disposed on supporting mount at the high vacuum side of the rotor and radial struts extend from the supporting mount and form an integral part of the body; the invention is characterised in that the radial struts comprise a hinge portion that can flex to allow relative movement of the inlet flange with respect to the supporting mount to reduce distortion effects.
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公开(公告)号：US20180238328A1
公开(公告)日：2018-08-23
申请号：US15749884
申请日：2016-08-04
Applicant: Edwards Limited
Inventor： Phillip North , Kanstantinos Karoulas , Benjamin Raymond Wooller , Alan Ernest Kinnaird Holbrook
CPC classification number: F04C18/12 , F04C28/28 , F04C2220/12 , F04C2240/81 , F04C2270/17
Abstract: A dry vacuum pump may include a stator which defines an internal chamber in which a rotor is rotationally mounted. A sensor is mounted to the stator and has an output connected to a processing circuit arranged to analyse the output of the sensor to determine the absolute distance between a point on the surface of the rotor and internal stator surface. The rotor to stator clearance can thus be accurately determined in real time during operation of the pump, so that the pump performance can be optimised over its serviceable life.
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公开(公告)号：US09879677B2
公开(公告)日：2018-01-30
申请号：US14648131
申请日：2013-10-24
Applicant: Edwards Limited
Inventor： Sivabalan Kailasam , Alan Ernest Kinnaird Holbrook
CPC classification number: F04C27/003 , F01C21/10 , F04C18/123 , F04C18/126 , F04C23/001 , F04C25/02 , F04C27/008 , F04C2230/60 , F04C2230/604
Abstract: A multi-stage vacuum pump comprising: first and second half-shell stator components defining a plurality of pumping chambers and for assembly together along respective longitudinally extending faces; first and second end stator components for assembly at respective longitudinal end faces of the first and second half-shell stator components; gaskets for sealing between the first and second half-shell stator components when assembled together at the longitudinally extending faces; and O-rings for sealing between the first and second end stator components and the first and second half-shell stator components when assembled; wherein annular channels intersect longitudinal recesses and each longitudinal recess comprises a stop fixed relative to the intersection, and the gasket and the longitudinal recess are configured that when the gasket is located in the recess during assembly the gasket is biased against the stop for locating an end portion of the gasket relative to the intersection.
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公开(公告)号：US20150292494A1
公开(公告)日：2015-10-15
申请号：US14648135
申请日：2013-10-28
Applicant: EDWARDS LIMITED
Inventor： Neil Turner , Jack Raymond Tattersall , Alan Ernest Kinnaird Holbrook , Matthew Richard Wickes
CPC classification number: F04B11/0091 , F04B37/14 , F04B39/0055 , F04B41/06 , F04C18/126 , F04C25/02 , F04C28/28 , F04C29/124
Abstract: In situations where a vacuum system is suddenly overloaded, there is a risk of mechanical damage being sustained, for example, bearing damage, gear slippage or rotor and/or stator collisions. Sudden overloads can also lead to electrical damage, for example, over-currents or power surges. Therefore a pressure regulating apparatus is provided for use in a vacuum pumping system having an inlet, an outlet and a conduit interposed between, and in fluid communication with, the inlet and the outlet, wherein the cross-sectional area of the conduit is greater than that required to meet the conductance requirements of the inlet and the outlet.
Abstract translation: 在真空系统突然超载的情况下，存在持续的机械损坏的风险，例如轴承损坏，齿轮打滑或转子和/或定子碰撞。 突然过载也可能导致电气损坏，例如过电流或电涌。 因此，提供一种用于真空泵送系统的压力调节装置，其具有插入在入口和出口之间并与入口和出口流体连通的入口，出口和导管，其中导管的横截面面积大于 这需要满足入口和出口的电导要求。
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