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公开(公告)号：US20200040910A1
公开(公告)日：2020-02-06
申请号：US16469468
申请日：2017-12-14
Applicant: Edwards Limited
Inventor： Richard Glyn Horler , Paul Milner
Abstract: The present invention provides a stator blade unit for a turbomolecular pump comprising an array of polymer stator blades, a turbomolecular pump including such a stator blade unit, and to a method of assembling a stator blade unit for a turbomolecular pump.
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公开(公告)号：US10024328B2
公开(公告)日：2018-07-17
申请号：US14438140
申请日：2013-10-14
Applicant: Edwards Limited
Inventor： Alexander James Patey , Emiliano Lucchetta , Ian Keech , Mohammad Eghtesadi Bahrami , Richard Glyn Horler
IPC: F04D15/00 , F04D19/04 , F04D27/00 , F04D29/063 , F04D27/02 , F04D29/057 , F04D29/058 , F04D29/056
Abstract: The present invention relates to a vacuum pump comprising a turbo molecular pumping mechanism wherein an operative characteristic of the turbomolecular pumping mechanism is dependent on the orientation of the vacuum pump and the pump comprises an orientation sensor for sensing the orientation.
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公开(公告)号：US20150292515A1
公开(公告)日：2015-10-15
申请号：US14438148
申请日：2013-10-14
Applicant: EDWARDS LIMITED
Inventor： Mohammad Eghtesadi Bahrami , Richard Glyn Horler
IPC: F04D29/058 , F04D19/04 , F04D27/00 , F04D29/053 , F04D29/26
CPC classification number: F04D29/058 , F04D19/042 , F04D19/048 , F04D27/001 , F04D29/053 , F04D29/056 , F04D29/059 , F04D29/26 , F16C19/52 , F16C32/0444 , F16C2233/00 , F16C2360/45
Abstract: The present invention relates to a vacuum pump 10 comprising a vacuum pumping mechanism 12 comprising a rotor 14 supported for rotation by a drive shaft 16, a first bearing assembly 22 for controlling movement of the rotor during rotation of the drive shaft, a back-up bearing assembly 24 for limiting said movement and a sensor 26 for sensing when said movement is limited by the back-up bearing assembly.
Abstract translation: 本发明涉及一种真空泵10，其包括真空泵机构12，该真空泵机构12包括被驱动轴16支撑的转子14，用于控制转子在驱动轴旋转期间运动的第一轴承组件22， 用于限制所述运动的轴承组件24和用于在所述运动受支撑轴承组件限制时感测的传感器26。
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公开(公告)号：US20150275902A1
公开(公告)日：2015-10-01
申请号：US14438140
申请日：2013-10-14
Applicant: EDWARDS LIMITED
Inventor： Alexander James Patey , Emiliano Lucchetta , Ian Keech , Mohammad Eghtesadi Bahrami , Richard Glyn Horler
IPC: F04D19/04 , F04D29/063 , F04D29/057 , F04D27/00 , F04D29/058
CPC classification number: F04D19/042 , F04D27/00 , F04D27/001 , F04D27/0292 , F04D29/056 , F04D29/057 , F04D29/058 , F04D29/063
Abstract: The present invention relates to a vacuum pump 10 comprising a turbo molecular pumping mechanism 14 wherein an operative characteristic of the turbomolecular pumping mechanism is dependent on the orientation of the vacuum pump and the pump comprises an orientation sensor 28 for sensing the orientation.
Abstract translation: 本发明涉及一种包括涡轮分子泵送机构14的真空泵10，其中涡轮分子泵送机构的操作特性取决于真空泵的取向，并且泵包括用于感测取向的取向传感器28。
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