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    Vacuum pump and rotating body for vacuum pump
    1.
    发明授权
    Vacuum pump and rotating body for vacuum pump 有权

    公开(公告)号：US12129861B2

    公开(公告)日：2024-10-29

    申请号：US18000047

    申请日：2021-05-28

    申请人： Edwards Japan Limited

    发明人： Katsunori Takahashi

    IPC分类号： F04D19/04

    CPC分类号： F04D19/042 ,  F04D19/048

    摘要： An object is to prevent backflow of particles during discharging. The vacuum pump includes: a casing having an inlet port and an outlet port; a stator column provided upright inside the casing; a rotating body having a shape surrounding an outer circumference of the stator column; and a magnetic bearing configured to magnetically levitate and support a rotating shaft of the rotating body, with the vacuum pump being configured to suck gas from the inlet port and exhaust the gas from the outlet port by rotation of the rotating body, wherein a projection portion for discharging an electric charge carried on the rotating body is provided at at least one of a first position formed on a back surface side of the rotating body, a second position formed on a bottom surface side of the rotating body, and a third position formed in an intermediate point of a flow passage of the gas of the rotating body.

    Magnetic bearing control apparatus and vacuum pump
    3.
    发明授权
    Magnetic bearing control apparatus and vacuum pump 有权

    公开(公告)号：US11767851B2

    公开(公告)日：2023-09-26

    申请号：US16764594

    申请日：2018-11-05

    申请人： Edwards Japan Limited

    发明人： Masayuki Yamamoto

    IPC分类号： F04D19/04 ,  F16C32/04 ,  H01F7/06 ,  H03F3/217

    CPC分类号： F04D19/048 ,  F16C32/0451 ,  H01F7/064 ,  H03F3/217

    摘要： A magnetic bearing control apparatus and a vacuum pump which do not require a displacement sensor, which enable control with high accuracy, and which are small and low cost. A rate of change (di/dt) that is a time derivative of a current value Im flowing through an electromagnet varies in accordance with a magnitude of a displacement of a gap between a target member and the electromagnet. The rate of change (di/dt) can be obtained by detecting a voltage value Vs that is generated at both ends of an inductive element. Therefore, by detecting the voltage value Vs, the magnitude of the displacement of the gap can be estimated by calculation. Inductive elements are connected in series to electromagnets and the voltage Vs between the inductive elements is detected by the differential input amplifier. A single period of switching of a PWM switching amplifier is constituted by a current control period of the electromagnet and a displacement detection period for detecting the rate of change (di/dt). In addition, the displacement detection period is further constituted by a current increase period and a current decrease period which are certain periods of time. The current increase period and the current decrease period are equal to each other.

    MAGNETIC BEARING CONTROL DEVICE AND VACUUM PUMP
    4.
    发明申请
    MAGNETIC BEARING CONTROL DEVICE AND VACUUM PUMP 审中-公开

    公开(公告)号：US20180216665A1

    公开(公告)日：2018-08-02

    申请号：US15716766

    申请日：2017-09-27

    申请人： SHIMADZU CORPORATION

    发明人： Junichiro KOZAKI

    IPC分类号： F16C32/04

    CPC分类号： F16C32/0457 ,  F04D19/042 ,  F04D19/048 ,  F04D29/058 ,  F16C32/0446 ,  F16C32/0489 ,  F16C2360/45

    摘要： A magnetic bearing control device is configured to detect, by a sensor, excitation current supplied from an excitation amplifier to a magnetic bearing configured to magnetically levitate a rotor, thereby generating a voltage equivalent signal for PWM control of the excitation amplifier based on a current setting signal based on a deviation of a rotor levitation position with respect to a target levitation position and an excitation current detection signal of the sensor. The voltage equivalent signal is generated based on the current setting signal and a current deviation signal as a difference between the current setting signal and the excitation current detection signal.

    TURBO COMPRESSOR
    8.
    发明申请
    TURBO COMPRESSOR 审中-公开
    涡轮压缩机

    公开(公告)号：US20150219106A1

    公开(公告)日：2015-08-06

    申请号：US14410510

    申请日：2013-06-25

    申请人： Robert Bosch GmbH

    发明人： Simon Klink ,  Alister Clay

    IPC分类号： F04D19/04 ,  F04D29/051 ,  F04D29/058

    CPC分类号： F04D19/048 ,  F04D17/12 ,  F04D29/051 ,  F04D29/058

    摘要： A turbo compressor includes a first compressor stage, which has a first compressor wheel, and a second compressor stage, which has a second compressor wheel, the first compressor wheel and the second compressor wheel being situated on a common shaft (12), the shaft being supported without contact. To reduce the complexity of the turbo compressor, a contactless bearing of the shaft is situated between the first compressor wheel and the second compressor wheel.

    摘要翻译： 涡轮压缩机包括具有第一压缩机叶轮的第一压缩机级和具有第二压缩机叶轮的第二压缩机级，第一压缩机叶轮和第二压缩机叶轮位于公共轴（12）上，所述轴 得到支持而没有接触。 为了降低涡轮压缩机的复杂性，轴的非接触式轴承位于第一压缩机叶轮和第二压缩机叶轮之间。

    Vacuum pump or vacuum apparatus with vacuum pump
    9.
    发明授权
    Vacuum pump or vacuum apparatus with vacuum pump 有权
    真空泵或真空泵真空泵

    公开(公告)号：US08858188B2

    公开(公告)日：2014-10-14

    申请号：US14019035

    申请日：2013-09-05

    申请人： Alexander Makarov

    发明人： Alexander Makarov

    IPC分类号： F04D29/40 ,  F04D19/04

    CPC分类号： H01J49/24 ,  F04D19/042 ,  F04D19/048 ,  F04D29/083 ,  F04D29/601

    摘要： The invention relates to a vacuum pump or vacuum apparatus having a vacuum pump for the evacuation of one or a plurality of volumes, the vacuum pump having a plurality of pressure stages and at least two suction inlets. According to the invention, an outer suction inlet for a first pressure stage spatially encompasses an inner suction inlet for a second pressure stage such that the inner suction inlet seals only against pressure within the outer suction inlet, not against external pressure.

    摘要翻译： 本发明涉及一种具有用于排空一个或多个体积的真空泵的真空泵或真空装置，真空泵具有多个压力级和至少两个吸入口。 根据本发明，用于第一压力级的外部吸入口空间地包围用于第二压力级的内部吸入口，使得内部吸入口仅抵抗外部吸入口内的压力而不受外部压力的影响。

    Magnetic bearing device with an improved vacuum feedthrough
    10.
    发明授权
    Magnetic bearing device with an improved vacuum feedthrough 有权
    具有改进的真空馈通的磁性轴承装置

    公开(公告)号：US07932655B2

    公开(公告)日：2011-04-26

    申请号：US12064523

    申请日：2006-08-18

    申请人： Philipp Buhler ,  Rene Larsonneur

    发明人： Philipp Buhler ,  Rene Larsonneur

    IPC分类号： H02K7/09

    CPC分类号： F16C32/047 ,  F04D19/048 ,  F04D25/0693 ,  F04D29/058 ,  F16C32/0457 ,  F16C32/0461 ,  F16C32/0489 ,  F16C35/00 ,  F16C2360/44 ,  F16C2360/45

    摘要： A magnetic bearing device (1) with an improved vacuum-tight electrical feedthrough through its housing (10) is disclosed. The feedthrough (30) comprises a flat connection element (31) such as a rigid or flexible printed circuit board extending through the wall of the housing (10), preferably all the way along an inner circumference of the housing. The connection element is sealed in a gas-tight manner to the housing. The element preferably has a central opening (36) for receiving the rotor shaft. Connections to the bearing units and sensors may be achieved by flat-ribbon cables (51) or flexprints. The sensors are preferably also implemented as printed sensors. Thus a very compact and cost-efficient magnetic bearing device can be obtained. An alternative embodiment uses a connection element on a side wall of the housing as a feedthrough to the bearing components.

    摘要翻译： 公开了一种通过其壳体（10）具有改进的真空密封电馈通的磁性轴承装置（1）。 馈通（30）包括平坦连接元件（31），例如延伸穿过壳体（10）的壁的刚性或柔性印刷电路板，优选地一直沿着壳体的内圆周。 连接元件以气密方式密封到壳体。 元件优选地具有用于接收转子轴的中心开口（36）。 与轴承单元和传感器的连接可以通过扁平电缆（51）或柔性印刷来实现。 传感器优选地也被实现为印刷传感器。 因此，可以获得非常紧凑且具有成本效益的磁轴承装置。 替代实施例使用壳体侧壁上的连接元件作为轴承部件的馈通。