公开(公告)号：US10514040B2

公开(公告)日：2019-12-24

申请号：US15310841

申请日：2015-05-13

Applicant: EDWARDS LIMITED

Inventor： James Alexander Haylock ,  Richard Lee Harkin ,  Ian Keech ,  Jian Li

IPC: F04D27/00 ,  F04D19/04 ,  F04D17/16 ,  F04D29/58 ,  F04D25/06 ,  F04B39/06 ,  F04B53/08 ,  F04C25/02

Abstract: A vacuum system includes a vacuum pump and an electric motor for driving the vacuum pump. A cooling arrangement cools the vacuum system. A control performs at least one of decreasing voltage and increasing frequency of a signal applied to the electric motor to decrease an amount of magnetic flux generated in the electric motor instead of decreasing the current applied to the electric motor to arrive at a desired torque generated by the electric motor in response to pumping requirements of the vacuum pump.

公开(公告)号：US10024328B2

公开(公告)日：2018-07-17

申请号：US14438140

申请日：2013-10-14

Applicant: Edwards Limited

Inventor： Alexander James Patey ,  Emiliano Lucchetta ,  Ian Keech ,  Mohammad Eghtesadi Bahrami ,  Richard Glyn Horler

IPC: F04D15/00 ,  F04D19/04 ,  F04D27/00 ,  F04D29/063 ,  F04D27/02 ,  F04D29/057 ,  F04D29/058 ,  F04D29/056

Abstract: The present invention relates to a vacuum pump comprising a turbo molecular pumping mechanism wherein an operative characteristic of the turbomolecular pumping mechanism is dependent on the orientation of the vacuum pump and the pump comprises an orientation sensor for sensing the orientation.

公开(公告)号：US20150275902A1

公开(公告)日：2015-10-01

申请号：US14438140

申请日：2013-10-14

Applicant: EDWARDS LIMITED

Inventor： Alexander James Patey ,  Emiliano Lucchetta ,  Ian Keech ,  Mohammad Eghtesadi Bahrami ,  Richard Glyn Horler

IPC: F04D19/04 ,  F04D29/063 ,  F04D29/057 ,  F04D27/00 ,  F04D29/058

CPC classification number: F04D19/042 ,  F04D27/00 ,  F04D27/001 ,  F04D27/0292 ,  F04D29/056 ,  F04D29/057 ,  F04D29/058 ,  F04D29/063

Abstract: The present invention relates to a vacuum pump 10 comprising a turbo molecular pumping mechanism 14 wherein an operative characteristic of the turbomolecular pumping mechanism is dependent on the orientation of the vacuum pump and the pump comprises an orientation sensor 28 for sensing the orientation.

Abstract translation: 本发明涉及一种包括涡轮分子泵送机构14的真空泵10，其中涡轮分子泵送机构的操作特性取决于真空泵的取向，并且泵包括用于感测取向的取向传感器28。