公开(公告)号：US20200278234A1

公开(公告)日：2020-09-03

申请号：US16647569

申请日：2018-09-11

Applicant: FUJIKIN INCORPORATED

Inventor： Kenta KONDO ,  Toshihide YOSHIDA ,  Hidenobu SATO ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA ,  Masahiko TAKIMOTO

IPC: G01F15/00 ,  G01F15/06 ,  G01F11/00 ,  H01L21/02

Abstract: A valve device is capable of precisely adjusting a flow rate variation with time, aging, or the like without using an external sensor or using as few external sensors as possible. The apparatus includes an adjusting actuator for adjusting the position of the operating member positioned at the open position, a communication unit for receiving adjustment information relating to the adjustment of the opening degree of the flow path by the valve element from the outside of the apparatus, and a control unit for adjusting the position of the operating member by driving the adjusting actuator based on the adjustment information.

公开(公告)号：US20200278033A1

公开(公告)日：2020-09-03

申请号：US16647560

申请日：2018-09-11

Applicant: FUJIKIN INCORPORATED

Inventor： Kenta KONDO ,  Toshihide YOSHIDA ,  Kenji AIKAWA ,  Hidenobu SATO ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA ,  Masahiko TAKIMOTO

IPC: F16K1/52 ,  F16K31/122 ,  H01L21/67 ,  C23C16/455

Abstract: A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.