公开(公告)号：US20220196163A1

公开(公告)日：2022-06-23

申请号：US17425974

申请日：2020-01-17

Applicant: FUJIKIN INCORPORATED

Inventor： Daihi TSUCHIGUCHI ,  Toshihide YOSHIDA ,  Ryutaro TANNO ,  Yuya SUZUKI ,  Kenta KONDO ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA ,  Masahiko TAKIMOTO

IPC: F16K7/16 ,  F16K31/122 ,  F16K37/00 ,  F16K31/00

Abstract: A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.

公开(公告)号：US20200370671A1

公开(公告)日：2020-11-26

申请号：US16763731

申请日：2018-11-12

Applicant: FUJIKIN INCORPORATED

Inventor： Masahiko TAKIMOTO ,  Toshihide YOSHIDA ,  Kenta KONDO ,  Ryousuke DOHI ,  Kouji NISHINO

IPC: F16K31/02 ,  F16K31/00

Abstract: A control device for a valve device can detect open/close state of the valve device without using limit switches. The valve device includes a diaphragm for opening and closing a flow path for flowing a fluid, a coil spring for biasing the diaphragm in the closing direction of flow path, a main actuator for driving it against the biasing force of the coil spring, and an adjusting actuator using a piezoelectric element for adjusting the opening degree of the flow path determined by the diaphragm. The controller detects the open/close state of flow path based on the voltage generated by the piezoelectric element of the adjusting actuator, and controls valve device using the detection signal.

公开(公告)号：US20220283081A1

公开(公告)日：2022-09-08

申请号：US17637617

申请日：2020-08-31

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Masahiko TAKIMOTO ,  Kazuteru TANAKA ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01N21/27 ,  G01N21/05 ,  G01N21/17

Abstract: The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, a first light-transmission member 11 for transmitting light from the light source to the measurement cell, a second light transmission member 12 for transmitting light from the measurement cell to the photodetector, a lens 3A provided in the fluid unit, the lens 3A being arranged such that light from the first light transmission member is to be incident on the first position and light is to be emitted from the second position to the second light transmission member, a pressure sensor 5 for measuring pressure of fluid flowing through the measurement cell, and an arithmetic circuit 28 for detecting concentration of the fluid flowing through the measurement cell, the arithmetic circuit being configured to calculate the fluid concentration based on the output of the photodetector and a correction factor related to the pressure output by the pressure sensor and the concentration of fluid in order to reduce the measurement error due to the refractive index of the fluid.

公开(公告)号：US20220082176A1

公开(公告)日：2022-03-17

申请号：US17425448

申请日：2020-01-23

Applicant: FUJIKIN INCORPORATED

Inventor： Ryutaro TANNO ,  Toshihide YOSHIDA ,  Daihi TSUCHIGUCHI ,  Yuya SUZUKI ,  Kenta KONDO ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA ,  Masahiko TAKIMOTO

IPC: F16K31/00 ,  F16K31/122 ,  F16K7/17 ,  F16K37/00

Abstract: A valve device with which a flow rate can be adjusted precisely includes: an operating member for operating a diaphragm provided in such a way as to be capable of moving between a closed position in which the diaphragm closes a flow path and an open position in which the diaphragm opens the flow path; a main actuator for moving the operating member to the open position or the closed position in response to the pressure of a supplied driving fluid; an adjustment actuator for adjusting the position of the operating member positioned in the open position; and a position detecting mechanism for detecting displacement of the operating member with respect to a valve body.

公开(公告)号：US20190129452A1

公开(公告)日：2019-05-02

申请号：US16094252

申请日：2017-04-21

Applicant: FUJIKIN INCORPORATED

Inventor： Kaoru HIRATA ,  Katsuyuki SUGITA ,  Yohei SAWADA ,  Masahiko TAKIMOTO ,  Kouji NISHINO

IPC: G05D7/06 ,  G05B19/042

Abstract: The fluid controller includes a fluid control module and an external control module. The fluid control module includes a control valve on a flow channel, a valve driver circuit that drives the control valve, a fluid meter on a flow channel, and a first processor that processes a signal output from the fluid meter. The external control module includes a second processor that processes a signal output from the first processor. The second processor outputs a valve control signal according to the signal of the fluid meter output from the first processor, the valve control signal is directly input to the valve driver circuit without through the first processor, and the valve driver circuit outputs a voltage that drives the control valve according to the valve control signal from the second processor.

公开(公告)号：US20240151319A1

公开(公告)日：2024-05-09

申请号：US18526626

申请日：2023-12-01

Applicant: FUJIKIN INCORPORATED

Inventor： Masahiko TAKIMOTO ,  Toshihide YOSHIDA ,  Tsutomu SHINOHARA ,  Kouji NISHINO

IPC: F16K31/02 ,  G05D7/06

CPC classification number: F16K31/02 ,  G05D7/0623 ,  G05D7/0635 ,  G05D7/0652 ,  H01L21/67017

Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.

公开(公告)号：US20220074851A1

公开(公告)日：2022-03-10

申请号：US17423500

申请日：2020-01-21

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Kazuteru TANAKA ,  Masahiko TAKIMOTO ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01N21/3504

Abstract: A Concentration measurement device 100 comprises: a measurement cell 4 having a flow path through which a gas flows, a light source 1 for generating incident light to the measurement cell, a photodetector 7 for detecting light emitted from the measurement cell, a pressure sensor 20 for detecting a pressure of the gas in the measurement cell, a temperature sensor 22 for detecting a temperature of the gas in the measurement cell, and an arithmetic circuit 8 for calculating a concentration of the gas based on an output P of the pressure sensor, an output T of the temperature sensor, an output I of the photodetector, and an extinction coefficient α, wherein the arithmetic circuit 8 is configured to calculate the concentration using the extinction coefficient α determined on the basis of the output of the temperature sensor 22.

公开(公告)号：US20210310844A1

公开(公告)日：2021-10-07

申请号：US17264173

申请日：2019-07-16

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Satoru YAMASHITA ,  Masayoshi KAWASHIMA ,  Masahiko TAKIMOTO ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01F1/88

Abstract: A control unit 3 of a flow rate control system 1 comprises: a recording unit 31 for recording measured values of a pressure sensor P and a temperature sensor T, a storage unit 32 for storing volume data between a first valve V1 and a second valve V2 corresponding to the measured value of the pressure sensor P, and an arithmetic unit 33 for calculating a flow rate based on a first pressure value P1 and a first temperature value T1 measured after opening the first valve V1 and the second valve V2 to flow a gas and then closing the first valve V1 and the second valve V2 simultaneously in a state where the gas is flowing; a second pressure value P2 and a second temperature value T2 measured after opening the first valve V1 and the second valve V2 to flow a gas, closing the second valve V2 in a state where the gas is flowing, and then closing the first valve V1 after a predetermined time Δt has elapsed; and a volume value V between the first valve V1 and the second valve V2 which corresponds to the second pressure value P2.

公开(公告)号：US20220170849A1

公开(公告)日：2022-06-02

申请号：US17598636

申请日：2020-03-31

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Kazuteru TANAKA ,  Masahiko TAKIMOTO ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01N21/33 ,  G01N21/27 ,  G01N21/05 ,  G01N21/59

Abstract: The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, optical fibers 11 and 12 for connecting the electric unit 20 and the fluid unit 10 and is configured to measure the concentration of the fluid in the measurement cell by detecting the light incident from the light source 22 to the measurement cell and then emitted from the measurement cell by the photodetector 24, where optical connection parts 32 and 34 connected to the optical fibers 11, 12 and the light source 22 or the photodetector 24 are integrally provided in the electric unit 20.

公开(公告)号：US20200033895A1

公开(公告)日：2020-01-30

申请号：US16499174

申请日：2018-03-20

Applicant: FUJIKIN INCORPORATED

Inventor： Katsuyuki SUGITA ,  Kaoru HIRATA ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Masahiko TAKIMOTO ,  Takahiro IMAI ,  Shinya OGAWA

IPC: G05D7/06 ,  G01F1/36

Abstract: A pressure-type flow rate control device includes a restriction part; a control valve provided upstream of the restriction part; an upstream pressure sensor for detecting pressure between the restriction part and the control valve; and an arithmetic processing circuit connected to the control valve and the upstream pressor sensor. The device is configured to perform flow rate control by controlling the control valve according to an output of the upstream pressure sensor. The arithmetic processing circuit performs an operation of closing the control valve in order to reduce a flow rate of a fluid flowing through the restriction part, and performs an operation of closing the control valve by feedback control in which a target value is an exponential function more gradual than the pressure drop characteristic data when a gas flows out of the restriction part.